Plasma Tuning Rods in Microwave Resonator Plasma Sources

ABSTRACT

The invention provides a plurality of resonator subsystems. The resonator subsystems can comprise one or more resonant cavities configured to couple electromagnetic (EM) energy in a desired EM wave mode to plasma by generating resonant microwave energy in a resonant cavity adjacent the plasma. The resonator subsystem can be coupled to a process chamber using one or more interface subsystems and can comprise one or more resonant cavities, and each resonant cavity can have a plurality of plasma tuning rods coupled thereto. Some of the plasma tuning rods can be configured to couple the EM-energy from one or more of the resonant cavities to the process space within the process chamber.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is related to co-pending U.S. patent application Ser. No. 13/______, attorney docket No. TEA-045, entitled “Plasma-Tuning Rods in Surface Wave Antenna (SWA) Sources”, filed on even date herewith. This application is related to co-pending U.S. patent application Ser. No. 13/______, attorney docket No. TEA-071, entitled “Plasma Tuning Rods in Microwave Processing Systems”, filed on even date herewith. The contents of each of these applications are herein incorporated by reference in their entireties.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to substrate/wafer processing, and more particularly to microwave resonator systems and methods for processing substrates and/or semiconductor wafers.

2. Description of the Related Art

Typically, during semiconductor processing, a (dry) plasma etch process is utilized to remove or etch material along fine lines or within vias or contacts patterned on a semiconductor substrate. The plasma etch process generally involves positioning a semiconductor substrate with an overlying patterned, protective layer, for example a photoresist layer, into a process chamber.

Once the substrate is positioned within the chamber, an ionizable, dissociative gas mixture is introduced within the chamber at a pre-specified flow rate, while a vacuum pump is throttled to achieve an ambient process pressure. Thereafter, a plasma is formed when a portion of the gas species present are ionized following a collision with an energetic electron. Moreover, the heated electrons serve to dissociate some species of the mixture gas species and create reactant specie(s) suitable for the etching exposed surfaces. Once the plasma is formed, any exposed surfaces of the substrate are etched by the plasma. The process is adjusted to achieve optimal conditions, including an appropriate concentration of desirable reactant and ion populations to etch various features (e.g., trenches, vias, contacts, etc.) in the exposed regions of substrate. Such substrate materials where etching is required include silicon dioxide (SiO₂), poly-silicon, and silicon nitride, for example.

Conventionally, various techniques have been implemented for exciting a gas into plasma for the treatment of a substrate during semiconductor device fabrication, as described above. In particular, (“parallel plate”) capacitively coupled plasma (CCP) processing systems, or inductively coupled plasma (ICP) processing systems have been utilized commonly for plasma excitation. Among other types of plasma sources, there are microwave plasma sources (including those utilizing electron-cyclotron resonance (ECR)), surface wave plasma (SWP) sources, and helicon plasma sources.

It is becoming common wisdom that microwave resonator systems offer improved plasma processing performance, particularly for etching processes, over CCP systems, ICP systems and resonantly heated systems. Microwave resonator systems produce a high degree of ionization at a relatively lower Boltzmann electron temperature (T_(e)). In addition, SWP sources generally produce plasma richer in electronically excited molecular species with reduced molecular dissociation. However, the practical implementation of microwave resonator systems still suffers from several deficiencies including, for example, plasma stability and uniformity.

SUMMARY OF THE INVENTION

The invention relates to a microwave resonator systems and, more particularly, to stable and/or uniform resonator subsystems in microwave resonator systems.

According to embodiments, a plurality of resonator subsystems is described. The resonator subsystems comprise one or more resonant cavities configured to couple electromagnetic (EM) energy in a desired EM wave mode to plasma by generating resonant microwave energy in a resonant cavity adjacent to the plasma. The resonator subsystem can be coupled to a process chamber using one or more interface subsystems and can comprise one or more resonant cavities, and each resonant cavity can have a plurality of plasma tuning rods coupled thereto. Some of the plasma tuning rods can be configured to couple the EM-energy from one or more of the resonant cavities to the process space within the process chamber. In addition, one or more microwave assemblies can be coupled to one or more of the resonant cavities, and one or more additional plasma tuning rods can be configured to couple the EM-energy from one or more of the microwave assemblies to one or more of the resonant cavities. Furthermore, one or more microwave sources can be coupled to one or more of the microwave assemblies and/or to one or more of the resonant cavities.

BRIEF DESCRIPTION OF THE DRAWINGS

Embodiments of the invention will now be described, by way of example only, with reference to the accompanying schematic drawings in which corresponding reference symbols indicate corresponding parts, and in which:

FIGS. 1A-1C illustrate different exemplary views of a first microwave processing system according to embodiments of the invention;

FIGS. 2A-2C illustrate different exemplary views of a second microwave processing system according to embodiments of the invention;

FIGS. 3A-3C illustrate different exemplary views of a third microwave processing system according to embodiments of the invention;

FIGS. 4A-4C illustrate different exemplary views of a fourth microwave processing system according to embodiments of the invention;

FIGS. 5A-5D show different views of exemplary plasma-tuning rods in accordance with embodiments of the invention;

FIGS. 6A-6D show different views of other exemplary plasma-tuning rods in accordance with embodiments of the invention;

FIGS. 7A-7D show different views of exemplary plasma-tuning rods in accordance with embodiments of the invention;

FIG. 8 illustrates a flow diagram for an exemplary operating procedure in accordance with embodiments of the invention; and

FIG. 9 illustrates a plasma processing system 900 according to embodiments of the invention.

DETAILED DESCRIPTION

Microwave resonator sources are disclosed in various embodiments. However, one skilled in the relevant art will recognize that the various embodiments may be practiced without one or more of the specific details, or with other replacement and/or additional methods, materials, or components. In other instances, well-known structures, materials, or operations are not shown or described in detail to avoid obscuring aspects of various embodiments of the invention.

Similarly, for purposes of explanation, specific numbers, materials, and configurations are set forth in order to provide a thorough understanding of the invention. Nevertheless, the invention may be practiced without specific details. Furthermore, it is understood that the various embodiments shown in the figures are illustrative representations and are not necessarily drawn to scale.

Reference throughout this specification to “one embodiment” or “an embodiment” or variation thereof means that a particular feature, structure, material, or characteristic described in connection with the embodiment is included in at least one embodiment of the invention, but do not denote that they are present in every embodiment. Thus, the appearances of the phrases such as “in one embodiment” or “in an embodiment” in various places throughout this specification are not necessarily referring to the same embodiment of the invention. Furthermore, the particular features, structures, materials, or characteristics may be combined in any suitable manner in one or more embodiments.

Nonetheless, it should be appreciated that, contained within the description are features which, notwithstanding the inventive nature of the general concepts being explained, are also of an inventive nature.

Referring now to the drawings, wherein like reference numerals designate identical or corresponding parts throughout the several views, FIG. 1A illustrates a first microwave resonator system 100 according to embodiments of the invention. The first microwave resonator system 100 may be used in a dry plasma etching system or a plasma enhanced deposition system. The first microwave resonator system 100 can include a first resonator subsystem 180 that can be coupled to a process chamber 110. Alternatively, the first microwave resonator system 100 may be configured differently.

FIG. 1A shows a front view of the first microwave resonator system 100. The front view shows an x/y plane view of a process chamber 110 that can be configured using a first interface assembly 165 a, a plurality of chamber walls 112 coupled to the first interface assembly 165 a, and a process space 115 can be configured within the process chamber 110. For example, the chamber walls 112 can have wall thicknesses (t) associated therewith, and the wall thicknesses (t) can vary from about 1 mm to about 5 mm. The first interface assembly 165 a can have a first interface thickness (t_(i1)) associated therewith, and the first interface thickness (t_(i1)) can vary from about 1 mm to about 10 mm.

The front view shows an x/y plane view of a first resonator subsystem 180 that can comprise a first resonator assembly 181 having a plurality of resonator walls (182 a, 182 b, 183, and 184) defining a first EM-energy tuning space 185 therein. For example, the resonator walls (182 a, 182 b, 183, and 184) can include dielectric material such as quartz. In addition, one or more resonator sensors 106 can be coupled to the first EM-energy tuning space 185 to obtain first resonator data.

The resonator walls 182 a can have wall thicknesses (t_(a)) associated therewith, and the wall thicknesses (t_(a)) can vary from about 1 mm to about 5 mm. The resonator walls 182 b can have wall thicknesses (t_(b)) associated therewith, and the wall thicknesses (t_(b)) can vary from about 1 mm to about 5 mm. The resonator walls 182 can have wall thicknesses (t) associated therewith, and the wall thicknesses (t) can vary from about 1 mm to about 5 mm.

In some examples, the first interface assembly 165 a can be used to removably couple the first resonator assembly 181 to the process chamber 110. The first interface assembly 165 a can have first interface thicknesses (t_(i1)) associated therewith, and the first interface thicknesses (t_(i1)) can vary from about 1 mm to about 10 mm. Alternatively, the first interface assembly 165 a may not be required or may be configured differently. A first interface assembly 165 a can comprise one or more isolation assemblies (164 a, 164 b, and 164 c). Each of the isolation assemblies (164 a, 164 b, and 164 c) can be removably coupled to a lower resonator wall 183 and removably coupled to one or more of the first interface assembly 165 a.

In addition, a second interface assembly 165 b can be coupled to the first resonator assembly 181 using an upper resonator wall 184. The second interface assembly 165 b can have second interface thicknesses (t_(i2)) associated therewith, and the second interface thicknesses (t_(i2)) can vary from about 1 mm to about 10 mm. Alternatively, the second interface assembly 165 b may not be required or may be configured differently. The second interface assembly 165 b can comprise one or more control assemblies (160 a, 160 b, and 160 c). Each of the control assemblies (160 a, 160 b, and 160 c) can be removably coupled to the upper resonator wall 184 and removably coupled to the second interface assembly 165 b.

The first microwave resonator system 100 can be configured to form plasma in the process space 115 as the substrate holder 120 and the substrate are moved through the process space 115. The first microwave resonator system 100 can be configured to process 200 mm substrates, 300 mm substrates, or larger-sized substrates. In addition, square and/or rectangular chambers can be configured so that the first microwave resonator system 100 may be configured to process square or rectangular substrates, wafers, or LCDs regardless of their size, as would be appreciated by those skilled in the art. Therefore, while aspects of the invention will be described in connection with the processing of a semiconductor substrate, the invention is not limited solely thereto.

In other embodiments, the first resonator subsystem 180 can comprise a plurality of resonant cavities (not shown) therein. In some other embodiments, the first resonator subsystem 180 can comprise a plurality of resonator subsystems having one or more resonant cavities therein. In various systems, the first resonator subsystem 180 and the first EM-energy tuning space 185 can have cylindrical shapes, rectangular shapes, or squares shapes.

In some embodiments, a microwave source 150 can be coupled to the first resonator assembly 181. In addition, one or more RF sources (not shown) sources (not shown) may be coupled to the first resonator subsystem 180. The microwave source 150 can be coupled to a matching network 152, and the matching network 152 can be coupled to a coupling network 154. Alternatively, a plurality of matching networks (not shown) or a plurality of coupling networks (not shown) may be coupled to the first resonator subsystem 180. The coupling network 154 can be removably coupled to an upper resonator wall 184 of the first resonator assembly 181 and can be used to provide microwave energy to the first EM-energy tuning space 185. Alternatively, other coupling configurations may be used.

A first plasma-tuning rod (170 a, 175 a) can have a first plasma-tuning portion 170 a that can extend into the process space 115 at a first location (x_(2a)), and a first EM-tuning portion 175 a that can extend into the first EM-energy tuning space 185 at a first location (x_(1a)). A first isolation assembly 164 a can be used to position (extend) the first plasma-tuning portion 170 a a first plasma-tuning distance 171 a within the process space 115 at a first location defined using (x_(2a)). For example, the first plasma-tuning distance 171 a can vary from about 10 mm to about 400 mm, and the first plasma-tuning distance 171 a can be wavelength-dependent and can vary from about (λ/4) to about (10λ).

A first EM-coupling region 162 a can be established at a first EM-coupling distance 176 a from the upper resonator wall 184 within the first EM-energy tuning space 185, and the first EM-tuning portion 175 a can extend into the first EM-coupling region 162 a. The first EM-tuning portion 175 a can obtain first tunable microwave energy from the first EM-coupling region 162 a, and the first microwave energy can be transferred as first plasma-tuning energy to the process space 115 at the first location (x_(2a)) using the first plasma-tuning portion 170 a. The first EM-coupling region 162 a can include a tunable E-field region, a tunable H-field region, a maximum field region, a maximum voltage region, maximum energy region, or a maximum current region, or any combination thereof. For example, the first EM-coupling distance 176 a can vary from about 0.01 mm to about 10 mm, and the first EM-coupling distance 176 a can be wavelength-dependent and can vary from about (λ/4) to about (10λ).

A first plasma-tuning slab 161 a can be coupled to a first control assembly 160 a and can be used to move 163 a the first plasma-tuning slab 161 a a first EM-tuning distance 177 a relative to the first EM-tuning portion 175 a of the first plasma-tuning rod (170 a, 175 a) within the first EM-energy tuning space 185. The first control assembly 160 a and the first plasma-tuning slab 161 a can be used to optimize the microwave energy coupled from the first EM-coupling region 162 a to the first EM-tuning portion 175 a of the first plasma-tuning rod (170 a, 175 a). For example, the first EM-tuning distance 177 a can be established between the first EM-tuning portion 175 a and the first plasma-tuning slab 161 a within the first EM-energy tuning space 185, and the first EM-tuning distance 177 a can vary from about 0.01 mm to about 1 mm.

The first plasma-tuning rod (170 a, 175 a) can have a first diameter (d_(1a)) associated therewith, and the first diameter (d_(1a)) can vary from about 0.01 mm to about 1 mm. The first isolation assembly 164 a can have a first diameter (D_(1a)) associated therewith, and the first diameter (D_(1a)) can vary from about 1 mm to about 10 mm.

The first EM-tuning portion 175 a, the first EM-coupling region 162 a, the first control assembly 160 a, and the first plasma-tuning slab 161 a can have a first x/y plane offset (x_(1a)) associated therewith. For example, the first x/x plane offset (x_(1a)) can be established relative to the resonator wall 182 b, can be wavelength-dependent, and can vary from about (λ/4) to about (10λ). The first control assembly 160 a can have a cylindrical configuration and a diameter (d_(2a)) that can vary from about 1 mm to about 5 mm. The first plasma-tuning slab 161 a can have diameters (D_(2a)) associated therewith, and the diameter (D_(2a)) can vary from about 1 mm to about 10 mm.

A second plasma-tuning rod (170 b, 175 b) can have a second plasma-tuning portion 170 b that can extend into the process space 115 at a second location (x_(2b)), and a second EM-tuning portion 175 b that can extend into the first EM-energy tuning space 185 at a second location (x_(1b)). A second isolation assembly 164 b can be used to position (extend) the second plasma-tuning portion 170 b at the second plasma-tuning distance 171 b within the process space 115 at second locations defined using (x_(2b)). For example, the second plasma-tuning distances 171 b can vary from about 10 mm to about 400 mm, and the second plasma-tuning distances 171 b can be wavelength-dependent and can vary from about (λ/4) to about (10λ).

A second EM-coupling region 162 b can be established at second EM-coupling distances 176 b from the lower resonator wall 183 defining the first EM-energy tuning space 185, and the second EM-tuning portion 175 b can extend into the second EM-coupling region 162 b. The second EM-tuning portion 175 b can obtain second tunable microwave energy from the second EM-coupling region 162 b, and the second microwave energy can be transferred as second plasma-tuning energy to the process space 115 at the second location (x_(2b)) using the second plasma-tuning portion 170 b. The second EM-coupling region 162 b can include a tunable E-field region, a tunable H-field region, a maximum field region, a maximum voltage region, maximum energy region, or a maximum current region, or any combination thereof. For example, the second EM-coupling distance 176 b can vary from about 0.01 mm to about 10 mm, and the second EM-coupling distance 176 b can be wavelength-dependent and can vary from about (λ/4) to about (10λ).

A second plasma-tuning slab 161 b can be coupled to a second control assembly 160 b and can be used to move 163 b the second plasma-tuning slab 161 b second EM-tuning distances 177 b relative to the second EM-tuning portion 175 b of the second plasma-tuning rod (170 b, 175 b) within the first EM-energy tuning space 185. The second control assembly 160 b and the second plasma-tuning slab 161 b can be used to optimize the microwave energy coupled from the second EM-coupling region 162 b to the second EM-tuning portion 175 b of the second plasma-tuning rod (170 b, 175 b). For example, the second EM-tuning distances 177 b can be established between the second EM-tuning portion 175 b and the second plasma-tuning slab 161 b within the first EM-energy tuning space 185, and the second EM-tuning distances 177 b can vary from about 0.01 mm to about 1 mm.

The second plasma-tuning rod (170 b, 175 b) can have second diameters (d_(1b)) associated therewith, and the second diameters (d_(1b)) can vary from about 0.01 mm to about 1 mm. The second isolation assembly 164 b can have second diameters (D_(1b)) associated therewith, and the second diameters (D_(1b)) can vary from about 1 mm to about 10 mm.

The second EM-tuning portion 175 b, the second EM-coupling region 162 b, the second control assembly 160 b, and the second plasma-tuning slab 161 b can have second x/y plane offsets (x_(1b)) associated therewith. For example, the second x/y plane offsets (x_(1b)) can be established relative to the resonator wall 182 b and can be wavelength-dependent and can vary from about (λ/4) to about (10λ). The second control assembly 160 b can have a cylindrical configuration and second diameters (d_(2b)) that can vary from about 1 mm to about 5 mm. The second plasma-tuning slab 161 b can have diameters (D_(2b)) associated therewith, and the diameters (D_(2b)) can vary from about 1 mm to about 10 mm.

A third plasma-tuning rod (170 c, 175 c) can have a third plasma-tuning portion 170 c that can extend into the process space 115 at a third location (x_(2c)), and a third EM-tuning portion 175 c that can extend into the first EM-energy tuning space 185 at a third location (x_(1c)). A third isolation assembly 164 c can be used to position (extend) the third plasma-tuning portion 170 c at the third plasma-tuning distances 171 c within the process space 115 at third locations defined using (x_(2c)). For example, the third plasma-tuning distances 171 c can vary from about 10 mm to about 400 mm, and the third plasma-tuning distances 171 c can be wavelength-dependent and can vary from about (λ/4) to about (10λ).

A third EM-coupling region 162 c can be established at third EM-coupling distances 176 c from the lower resonator wall 183 defining the first EM-energy tuning space 185, and the third EM-tuning portion 175 c can extend into the third EM-coupling region 162 c. The third EM-tuning portion 175 c can obtain third tunable microwave energy from the third EM-coupling region 162 c, and the third microwave energy can be transferred as third plasma-tuning energy to the process space 115 at the third location (x_(2c)) using the third plasma-tuning portion 170 c. The third EM-coupling region 162 c can include a tunable E-field region, a tunable H-field region, a maximum field region, a maximum voltage region, maximum energy region, or a maximum current region, or any combination thereof. For example, the third EM-coupling distance 176 c can vary from about 0.01 mm to about 10 mm, and the third EM-coupling distance 176 c can be wavelength-dependent and can vary from about (λ/4) to about (10λ).

A third plasma-tuning slab 161 c can be coupled to a third control assembly 160 c and can be used to move 163 c the third plasma-tuning slab 161 c third EM-tuning distances 177 c relative to the third EM-tuning portion 175 c of the third plasma-tuning rod (170 c, 175 c) within the first EM-energy tuning space 185. The third control assembly 160 c and the third plasma-tuning slab 161 c can be used to optimize the microwave energy coupled from the third EM-coupling region 162 c to the third EM-tuning portion 175 c of the third plasma-tuning rod (170 c, 175 c). For example, the third EM-tuning distances 177 c can be established between the third EM-tuning portion 175 c and the third plasma-tuning slab 161 c within the first EM-energy tuning space 185, and the third EM-tuning distances 177 c can vary from about 0.01 mm to about 1 mm.

The third plasma-tuning rod (170 c, 175 c) can have third diameters (d_(1c)) associated therewith, and the third diameters (d_(1c)) can vary from about 0.01 mm to about 1 mm. The third isolation assembly 164 c can have third diameters (D_(1c)) associated therewith, and the third diameters (D_(1c)) can vary from about 1 mm to about 10 mm.

The third EM-tuning portion 175 c, the third EM-coupling region 162 c, the third control assembly 160 c, and the third plasma-tuning slab 161 c can have third x/y plane offsets (x_(1c)) associated therewith. For example, the third x/y plane offsets (x_(1c)) can be established relative to the resonator wall 182 b and can be wavelength-dependent and can vary from about (λ/4) to about (10λ). The third control assembly 160 c can have a cylindrical configuration and third diameters (d_(2c)) that can vary from about 1 mm to about 5 mm. The third plasma-tuning slab 161 c can have third diameters (D_(2c)) associated therewith, and the third diameters (D_(2c)) can vary from about 1 mm to about 10 mm.

The control assemblies (160 a, 160 b, and 165 c) can be coupled 196 to the controller 195, and the controller 195 can use process recipes to establish, control, and optimize the EM-tuning distances (177 a, 177 b, and 177 c) to control the plasma uniformity within the process space 115. The controller 195 can be coupled 196 to the microwave source 150, the matching network 152, and the coupling network 154, and the controller 195 can use process recipes to establish, control, and optimize the microwave source 150, the matching network 152, and the coupling network 154 to control the EM-coupling regions (162 a, 162 b, and 165 c) in the EM-energy tuning space 185 and the plasma uniformity within the process space 115. For example, the microwave source 150 can operate at frequencies from about 500 MHz to about 5000 MHz. In addition, the controller 195 can be coupled 196 to the resonator sensors 106 and process sensors 107, and the controller 195 can use process recipes to establish, control, and optimize the data from the resonator sensors 106 and the process sensors 107 to control the EM-coupling regions (162 a, 162 b, and 165 c) in the EM-energy tuning space 185 and the plasma uniformity within the process space 115.

The front view of the first microwave resonator system 100 includes an x/y plane view of a cavity-control assembly 155 that is shown coupled to a front view of a cavity-tuning slab 156. The cavity-control assembly 155 can have a first diameter (d_(1aa)) associated therewith, and the first diameter (d_(1aa)) can vary from about 0.01 mm to about 1 mm. The cavity-tuning slab 156 can have a second diameter (D_(1aa)) associated therewith, and the second diameter (D_(1aa)) can vary from about 1 mm to about 10 mm. The cavity-control assembly 155 and the cavity-tuning slab 156 can have a first x/y plane offset (y_(1aa)) associated therewith, and the first x/y plane offset (y_(1aa)) can vary from about 1 mm to about 10 mm.

The cavity-control assembly 155 can be used to move 157 the cavity-tuning slab 156 cavity-tuning distances 158 within the first EM-energy tuning space 185. The controller 195 can be coupled 196 to the cavity-control assembly 155, and the controller 195 can use process recipes to establish, control, and optimize the cavity-tuning distances 158 to control and maintain the plasma uniformity within the process space 115 in real-time. For example, the cavity-tuning distances 158 can vary from about 0.01 mm to about 10 mm, and the cavity-tuning distances 158 can be wavelength-dependent and can vary from about (λ/4) to about (10λ).

Still referring to FIG. 1A, a substrate holder 120, and a lower electrode 121 are shown. When present, the lower electrode 121 can be used to couple Radio Frequency (RF) power to plasma in process space 115. For example, lower electrode 121 can be electrically biased at an RF voltage via the transmission of RF power from RF generator 130 through impedance match network 131 and RF sensor 135 to lower electrode 121. The RF bias can serve to heat electrons to form and/or maintain the plasma. A typical frequency for the RF bias can range from 1 MHz to 100 MHz and is preferably 13.56 MHz. Alternatively, RF power may be applied to the lower electrode 121 at multiple frequencies. Furthermore, impedance match network 131 can serve to maximize the transfer of RF power to the plasma in process chamber 110 by minimizing the reflected power. Various match network topologies and automatic control methods can be utilized. The RF sensor 135 can measure the power levels and/or frequencies associated with the fundamental signals, harmonic signals, and/or intermodulation signals. In addition, the controller 195 can be coupled 196 to the RF generator 130, the impedance match network 131, and the RF sensor 135, and the controller 195 can use process recipes to establish, control, and optimize the data to and from the RF generator 130, the impedance match network 131, and the RF sensor 135 to control the EM-coupling regions (162 a, 162 b, and 165 c) in the EM-energy tuning space 185 and the plasma uniformity within the process space 115.

Some of the first microwave resonator systems 100 can include a pressure control system 190 and exhaust port 191 coupled to the process chamber 110, and configured to evacuate the process chamber 110, as well as control the pressure within the process chamber 110. Alternatively, the pressure control system 190 and/or the exhaust port 191 may not be required.

As shown in FIG. 1A, the first microwave resonator systems 100 can comprise a first gas supply system 140 coupled to a first supply element 141, and the first supply element 141 can be coupled to one or more first flow elements 142 that can be coupled to the process chamber 110. The first flow elements 142 can be configured to introduce a first process gas to process space 115, and can include flow control and/or flow measuring devices. In addition, the first microwave resonator systems 100 can comprise a second gas supply system 145 coupled to a second supply element 146, and the second supply element 146 can be one or more second flow elements 147 that can be coupled to the process chamber 110. The second flow elements 147 can be configured to introduce a second process gas to process space 115, and can include flow control and/or flow measuring devices. Alternatively, the second gas supply system 145, the second supply element 146, and/or the second flow elements 147 may not be required.

During dry plasma etching, the process gas may comprise an etchant, a passivant, or an inert gas, or a combination of two or more thereof. For example, when plasma etching a dielectric film such as silicon oxide (SiO_(x)) or silicon nitride (Si_(x)N_(y)), the plasma etch gas composition generally includes a fluorocarbon-based chemistry (C_(x)F_(y)) such as at least one of C₄F₈, C₅F₈, C₃F₆, C₄F₆, CF₄, etc., and/or may include a fluorohydrocarbon-based chemistry (C_(x)H_(y)F_(z)) such as at least one of CHF₃, CH₂F₂, etc., and can have at least one of an inert gas, oxygen, CO or CO₂. Additionally, for example, when etching polycrystalline silicon (polysilicon), the plasma etch gas composition generally includes a halogen-containing gas such as HBr, Cl₂, NF₃, or SF₆ or a combination of two or more thereof, and may include fluorohydrocarbon-based chemistry (C_(x)H_(y)F_(z)) such as at least one of CHF₃, CH₂F₂, etc., and at least one of an inert gas, oxygen, CO or CO₂, or two or more thereof. During plasma-enhanced deposition, the process gas may comprise a film forming precursor, a reduction gas, or an inert gas, or a combination of two or more thereof.

FIG. 1B illustrates a top view of a first resonator assembly in accordance with embodiments of the invention. The first resonator subsystem 180 can have a total length (x_(T1)) and a total height (z_(T1)) associated therewith in the x/z plane. For example, the total length (x_(T1)) can vary from about 10 mm to about 500 mm, and the total height (z_(T1)) can vary from about 10 mm to about 1000 mm.

The top view of first resonator subsystem 180 includes an x/z plane view of a first control assembly 160 a that is shown surrounded by a top (dash line) view of a first plasma-tuning slab 161 a. The first control assembly 160 a can have a first diameter (d_(2a)) associated therewith, and the first diameter (d_(2a)) can vary from about 0.01 mm to about 1 mm. The first plasma-tuning slab 161 a can have a second diameter (D_(2a)) associated therewith, and the second diameter (D_(2a)) can vary from about 1 mm to about 10 mm. The first control assembly 160 a and the first plasma-tuning slab 161 a can have first x/z plane offsets (x_(1a)) associated therewith, and the first x/z plane offsets (x_(1a)) can vary from about 1 mm to about 10 mm. Alternatively, the first control assembly 160 a and the first plasma-tuning slab 161 a may have different first x/z plane offsets (x_(1a)) associated therewith. The first control assembly 160 a and the first plasma-tuning slab 161 a can have first x/z plane offsets (z_(1a)) associated therewith, and the first x/z plane offsets (z_(1a)) can vary from about 1 mm to about 10 mm. Alternatively, the first control assembly 160 a and the first plasma-tuning slab 161 a may have different first x/z plane offsets (z_(1a)) associated therewith.

In addition, the top view of first resonator subsystem 180 includes an x/z plane view of a second control assembly 160 b that is shown surrounded by a top (dash line) view of a second plasma-tuning slab 161 b. The second control assembly 160 b can have a first diameter (d_(2b)) associated therewith, and the first diameter (d_(2b)) can vary from about 0.01 mm to about 1 mm. The second plasma-tuning slab 161 b can have a second diameter (D_(2b)) associated therewith, and the second diameter (D_(2b)) can vary from about 1 mm to about 10 mm. The second control assembly 160 b and the second plasma-tuning slab 161 b can have second x/z plane offsets (x_(1b)) associated therewith, and the second x/z plane offsets (x_(1b)) can vary from about 1 mm to about 10 mm. Alternatively, the second control assembly 160 b and the second plasma-tuning slab 161 b may have different second x/z plane offsets (x_(1b)) associated therewith. The second control assembly 160 b and the second plasma-tuning slab 161 b can have second x/z plane offsets (z_(1b)) associated therewith, and the second x/z plane offsets (z_(1b)) can vary from about 1 mm to about 10 mm. Alternatively, the second control assembly 160 b and the second plasma-tuning slab 161 b may have different second x/z plane offsets (z_(1a)) associated therewith.

Furthermore, the top view of first resonator subsystem 180 includes an x/z plane view of a third control assembly 160 c that is shown surrounded by a top (dash line) view of a third plasma-tuning slab 161 c. The third control assembly 160 c can have a first diameter (d_(2c)) associated therewith, and the first diameter (d_(2c)) can vary from about 0.01 mm to about 1 mm. The third plasma-tuning slab 161 c can have a second diameter (D_(2c)) associated therewith, and the third diameter (D_(2c)) can vary from about 1 mm to about 10 mm. The third control assembly 160 c and the third plasma-tuning slab 161 c can have third x/z plane offsets (x_(1c)) associated therewith, and the third x/z plane offsets (x_(1c)) can vary from about 1 mm to about 10 mm. Alternatively, the third control assembly 160 c and the third plasma-tuning slab 161 c may have different third x/z plane offsets (x_(1c)) associated therewith. The third control assembly 160 c and the third plasma-tuning slab 161 c can have third x/z plane offsets (z_(1c)) associated therewith, and the third x/z plane offsets (z_(1c)) can vary from about 1 mm to about 10 mm. Alternatively, the third control assembly 160 c and the third plasma-tuning slab 161 c may have different third x/z plane offsets (z_(1c)) associated therewith.

FIG. 1B shows top views of resonator walls (182 a, 182 b, 183, and 184). The resonator wall 182 a can have wall thicknesses (t_(a)) associated therewith, and the wall thicknesses (t_(a)) can vary from about 1 mm to about 5 mm. The resonator wall 182 b can have wall thicknesses (t_(b)) associated therewith, and the wall thicknesses (t_(b)) can vary from about 1 mm to about 5 mm. The resonator walls (182 a and 182 b) can have wall thicknesses (t) associated therewith, and the wall thicknesses (t) can vary from about 1 mm to about 5 mm.

The top view of the first microwave resonator system 100 includes an x/z plane view of a cavity-control assembly 155 that is shown coupled to a top view of a cavity-tuning slab 156. The cavity-control assembly 155 can have a first diameter (d_(1aa)) associated therewith, and the first diameter (d_(1aa)) can vary from about 0.01 mm to about 1 mm. The cavity-tuning slab 156 can have a second diameter (D_(1aa)) associated therewith, and the second diameter (D_(1aa)) can vary from about 1 mm to about 10 mm. The cavity-control assembly 155 and the cavity-tuning slab 156 can have a first x/z plane offset (z_(1aa)) associated therewith, and the first x/z plane offset (z_(1aa)) can vary from about 1 mm to about 10 mm.

FIG. 1C illustrates a side view of the first microwave resonator system 100. The side view shows a y/z plane view of a process chamber 110 that can be configured using a first interface assembly 165 a, a plurality of chamber walls 112 coupled to the first interface assembly 165 a, and a process space 115 can be configured within the process chamber 110. For example, the chamber walls 112 can have wall thicknesses (t) associated therewith, and the wall thicknesses (t) can vary from about 1 mm to about 5 mm. The first interface assembly 165 a can have a first interface thickness (t_(i1)) associated therewith, and the first interface thickness (t_(i1)) can vary from about 1 mm to about 10 mm.

The side view shows a y/z plane view of a first resonator subsystem 180 that can comprise a first resonator assembly 181 that can be configured using a plurality of resonator walls (182 a, 182 b, 183, and 184). For example, the resonator walls (182 a, 182 b, 183, and 184) can include dielectric material such as quartz and can define a first EM-energy tuning space 185 therein. In addition, one or more resonator sensors 106 can be coupled to the first EM-energy tuning space 185 to obtain first resonator data.

The resonator walls 182 a can have wall thicknesses (t_(a)) associated therewith, and the wall thicknesses (t_(a)) can vary from about 1 mm to about 5 mm. The resonator walls 182 b can have wall thicknesses (t_(b)) associated therewith, and the wall thicknesses (t_(b)) can vary from about 1 mm to about 5 mm. The resonator walls 182 can have wall thicknesses (t) associated therewith, and the wall thicknesses (t) can vary from about 1 mm to about 5 mm.

In some examples, the first interface assembly 165 a can be used to removably couple the first resonator assembly 181 to the process chamber 110. The first interface assembly 165 a can have first interface thicknesses (t_(i1)) associated therewith, and the first interface thicknesses (t_(i1)) can vary from about 1 mm to about 10 mm. Alternatively, the first interface assembly 165 a may not be required or may be configured differently. A first interface assembly 165 a can comprise one or more isolation assemblies (164 a, 164 b, and 164 c). Each of the isolation assemblies (164 a, 164 b, and 164 c) can be removably coupled to a lower resonator wall 183 and removably coupled to one or more of the first interface assembly 165 a.

In addition, a second interface assembly 165 b can be coupled to the first resonator assembly 181 using an upper resonator wall 184. The second interface assembly 165 b can have second interface thicknesses (t_(i2)) associated therewith, and the second interface thicknesses (t_(i2)) can vary from about 1 mm to about 10 mm. Alternatively, the second interface assembly 165 b may not be required or may be configured differently. The second interface assembly 165 b can comprise one or more control assemblies (160 a, 160 b, and 160 c). Each of the control assemblies (160 a, 160 b, and 160 c) can be removably coupled to the upper resonator wall 184 and removably coupled to the second interface assembly 165 b.

The first microwave resonator system 100 can be configured to form plasma in the process space 115 as the substrate holder 120 and the substrate are moved through the process space 115. The first microwave resonator system 100 can be configured to process 200 mm substrates, 300 mm substrates, or larger-sized substrates. In addition, square and/or rectangular chambers can be configured so that the first microwave resonator system 100 may be configured to process square or rectangular substrates, wafers, or LCDs regardless of their size, as would be appreciated by those skilled in the art. Therefore, while aspects of the invention will be described in connection with the processing of a semiconductor substrate, the invention is not limited solely thereto.

In other embodiments, the first resonator subsystem 180 can comprise a plurality of resonant cavities (not shown) therein. In some other embodiments, the first resonator subsystem 180 can comprise a plurality of resonator subsystems having one or more resonant cavities therein. In various systems, the first resonator assembly 181 and the first EM-energy tuning space 185 can have cylindrical shapes, rectangular shapes, or squares shapes.

In FIG. 1C, a microwave source 150 is shown coupled to the first resonator assembly 181. The microwave source 150 can be coupled to a matching network 152, and the matching network 152 can be coupled to a coupling network 154. Alternatively, a plurality of matching networks (not shown) or a plurality of coupling networks (not shown) may be coupled to the first resonator subsystem 180. The coupling network 154 can be removably coupled to an upper resonator wall 184 of the first resonator assembly 181 and can be used to provide microwave energy to the first EM-energy tuning space 185. Alternatively, other coupling configurations may be used.

The side view includes a y/z plane view of a first set of plasma-tuning rods {(170 a, 175 a), (170 b, 175 b), and (170 c, 175 c)} that can have a first set of plasma-tuning portions (170 a, 170 b, and 170 c) that can extend into the process space 115 at first y/z plane locations (z_(2a-c)), and a first set of EM-tuning portions (175 a, 175 b, and 175 c) that can extend into the first EM-energy tuning space 185 at second z-plane locations (z_(1a-c)). A first set of isolation assemblies (164 a, 164 b, and 164 c) can be used to position (extend) the first set of plasma-tuning portions (170 a, 170 b, and 170 c) plasma-tuning distances (171 a, 171 b, and 171 c) within the process space 115 at the first locations defined using (z_(2a-c)). For example, the plasma-tuning distances (171 a, 171 b, and 171 c) can vary from about 10 mm to about 400 mm, and the plasma-tuning distances (171 a, 171 b, and 171 c) can be wavelength-dependent and can vary from about (λ/4) to about (10λ).

A first set of EM-coupling regions (162 a, 162 b, and 162 c) can be established at a first set of EM-coupling distances (176 a, 176 b, and 176 c) from the lower resonator wall 183 within the first EM-energy tuning space 185, and the first set of EM-tuning portions (175 a, 175 b, and 175 c) can extend into the first set of EM-coupling regions (162 a, 162 b, and 162 c). The first set of EM-tuning portions (175 a, 175 b, and 175 c) can obtain tunable microwave energies from the first set of EM-coupling regions (162 a, 162 b, and 162 c), and the tunable microwave energies can be transferred as controllable plasma-tuning energies to the process space 115 at the first z-plane locations (z_(2a-c)) using the first set of plasma-tuning portions (170 a, 170 b, and 170 c). The first set of EM-coupling regions (162 a, 162 b, and 162 c) can include a tunable E-field region, a tunable H-field region, a maximum field region, a maximum voltage region, maximum energy region, or a maximum current region, or any combination thereof. For example, the first set of EM-coupling distances (176 a, 176 b, and 176 c) can vary from about 0.01 mm to about 10 mm, and the first set of EM-coupling distances (176 a, 176 b, and 176 c) can be wavelength-dependent and can vary from about (λ/4) to about (10λ).

A first set of plasma-tuning slabs (161 a, 161 b, and 161 c) can be coupled to a first set of control assemblies (160 a, 160 b, and 160 c) and can be used to move (163 a, 163 b, and 163 c) the first set of plasma-tuning slabs (161 a, 161 b, and 161 c) a first set of EM-tuning distances (177 a, 177 b, and 177 c) relative to the first set of EM-tuning portions (175 a, 175 b, and 175 c) of the first set of plasma-tuning rod {(170 a, 175 a), (170 b, 175 b), and (170 c, 175 c)} within the first EM-energy tuning space 185. The first set of control assemblies (160 a, 160 b, and 160 c) and the first set of plasma-tuning slabs (161 a, 161 b, and 161 c) can be used to optimize the microwave energies coupled from the first set of EM-coupling regions (162 a, 162 b, and 162 c) to the first set of EM-tuning portions (175 a, 175 b, and 175 c) of the first set of plasma-tuning rods {(170 a, 175 a), (170 b, 175 b), and (170 c, 175 c)}. For example, the first set of EM-tuning distances (177 a, 177 b, and 177 c) can be established between the first set of EM-tuning portions (175 a, 175 b, and 175 c) and the first set of plasma-tuning slabs (161 a, 161 b, and 161 c) within the first EM-energy tuning space 185, and the first set of EM-tuning distances (177 a, 177 b, and 177 c) can vary from about 0.01 mm to about 1 mm.

The first set of plasma-tuning rod {(170 a, 175 a), (170 b, 175 b), and (170 c, 175 c)} can comprise dielectric material and can have first diameter (d_(1a)) associated therewith, and the first diameters (d_(1a)) can vary from about 0.01 mm to about 1 mm. The first set of isolation assemblies (164 a, 164 b, and 164 c) can have first diameters (D_(1a)) associated therewith, and the first diameters (D_(1a)) can vary from about 1 mm to about 10 mm.

The first set of EM-tuning portions (175 a, 175 b, and 175 c), the first set of EM-coupling regions (162 a, 162 b, and 162 c), the first set of control assemblies (160 a, 160 b, and 160 c), and the first set of plasma-tuning slabs (161 a, 161 b, and 161 c) can have z-plane offsets (z_(1a-c)) associated therewith. For example, the z-plane offsets (z_(1a-c)) can be established relative to the lower resonator wall 183 and can be wavelength-dependent and can vary from about (λ/4) to about (10λ). The first set of control assemblies (160 a, 160 b, and 160 c) can comprise dielectric material, can have cylindrical configurations and diameter (d_(2a-c)) that can vary from about 1 mm to about 5 mm. The first set of plasma-tuning slabs (161 a, 161 b, and 161 c) can comprise dielectric material and can have diameters (D_(2a-c)) associated therewith, and the diameters (D_(2a-c)) can vary from about 1 mm to about 10 mm.

As shown in FIG. 1C, the control assemblies (160 a, 160 b, and 165 c) can be coupled 196 to the controller 195, and the controller 195 can use process recipes to establish, control, and optimize the EM-tuning distances (177 a, 177 b, and 177 c) to control the EM-coupling regions (162 a, 162 b, and 165 c) in the EM-energy tuning space 185 and the plasma uniformity within the process space 115. The controller 195 can be coupled 196 to the microwave source 150, the matching network 152, and the coupling network 154, and the controller 195 can use process recipes to establish, control, and optimize the microwave source 150, the matching network 152, and the coupling network 154 to control the EM-coupling regions (162 a, 162 b, and 165 c) in the EM-energy tuning space 185 and the plasma uniformity within the process space 115. For example, the microwave source 150 can operate at frequencies from about 500 MHz to about 5000 MHz. In addition, the controller 195 can be coupled 196 to the resonator sensors 106 and process sensors 107, and the controller 195 can use process recipes to establish, control, and optimize the data from the resonator sensors 106 and the process sensors 107 to control the EM-coupling regions (162 a, 162 b, and 165 c) in the EM-energy tuning space 185 and the plasma uniformity within the process space 115.

The side view of the first microwave resonator system 100 includes a y/z plane view of a cavity-control assembly 155 and a y/z plane view of a cavity-tuning slab 156. The cavity-control assembly 155 can have a first diameter (d_(1aa)) associated therewith, and the first diameter (d_(1aa)) can vary from about 0.01 mm to about 1 mm. The cavity-tuning slab 156 can have a second diameter (D_(1aa)) associated therewith, and the second diameter (D_(1aa)) can vary from about 1 mm to about 10 mm. The cavity-control assembly 155 and the cavity-tuning slab 156 can have first y-plane offsets (y_(1aa)) associated therewith, and the first y-plane offsets (y_(1aa)) can vary from about 1 mm to about 10 mm.

Still referring to FIG. 1C, side views of the substrate holder 120 and the lower electrode 121 are shown. When present, the lower electrode 121 can be used to couple Radio Frequency (RF) power to plasma in process space 115. For example, lower electrode 121 can be electrically biased at an RF voltage via the transmission of RF power from RF generator 130 through impedance match network 131 and RF sensor 135 to lower electrode 121. The RF bias can serve to heat electrons to form and/or maintain the plasma. A typical frequency for the RF bias can range from 1 MHz to 100 MHz and is preferably 13.56 MHz. Alternatively, RF power may be applied to the lower electrode 121 at multiple frequencies. Furthermore, impedance match network 131 can serve to maximize the transfer of RF power to the plasma in process chamber 110 by minimizing the reflected power. Various match network topologies and automatic control methods can be utilized. The RF sensor 135 can measure the power levels and/or frequencies associated with the fundamental signals, harmonic signals, and/or intermodulation signals. In addition, the controller 195 can be coupled 196 to the RF generator 130, the impedance match network 131, and the RF sensor 135, and the controller 195 can use process recipes to establish, control, and optimize the data to and from the RF generator 130, the impedance match network 131, and the RF sensor 135 to control the EM-coupling regions (162 a, 162 b, and 165 c) in the EM-energy tuning space 185 and the plasma uniformity within the process space 115.

The side view of the first microwave resonator system 100 can include a y/z plane view of a pressure control system 190 and exhaust port 191 coupled to the process chamber 110, and configured to evacuate the process chamber 110, as well as control the pressure within the process chamber 110. Alternatively, the pressure control system 190 and/or the exhaust port 191 may not be required.

As shown in FIG. 1C, the side view can include y/z plane views of the first gas supply system 140, the first supply element 141, the first flow elements 142, and the process chamber 110. The first flow elements 142 can be configured around the process space 115, and can be configured to introduce a first process gas to process space 115. In addition, the side view can include y/z plane views of the second gas supply system 145, the second supply element 146, and the second flow elements 147. The second flow elements 147 can be configured around the process space 115, and can be configured to introduce a second process gas to process space 115.

During dry plasma etching, the process gas may comprise an etchant, a passivant, or an inert gas, or a combination of two or more thereof. For example, when plasma etching a dielectric film such as silicon oxide (SiO_(x)) or silicon nitride (Si_(x)N_(y)), the plasma etch gas composition generally includes a fluorocarbon-based chemistry (C_(x)F_(y)) such as at least one of C₄F₈, C₅F₈, C₃F₆, C₄F₆, CF₄, etc., and/or may include a fluorohydrocarbon-based chemistry (C_(x)H_(y)F_(z)) such as at least one of CHF₃, CH₂F₂, etc., and can have at least one of an inert gas, oxygen, CO or CO₂. Additionally, for example, when etching polycrystalline silicon (polysilicon), the plasma etch gas composition generally includes a halogen-containing gas such as HBr, Cl₂, NF₃, or SF₆ or a combination of two or more thereof, and may include fluorohydrocarbon-based chemistry (C_(x)H_(y)F_(z)) such as at least one of CHF₃, CH₂F₂, etc., and at least one of an inert gas, oxygen, CO or CO₂, or two or more thereof. During plasma-enhanced deposition, the process gas may comprise a film forming precursor, a reduction gas, or an inert gas, or a combination of two or more thereof.

FIG. 2A illustrates a second microwave resonator system 200 according to embodiments of the invention. The second microwave resonator system 200 may be used in a dry plasma etching system or a plasma enhanced deposition system. The second microwave resonator system 200 can comprise a “movable” resonator subsystem 280 coupled to a “variable” process space 215 using one or more baffle members 262. The “movable” resonator subsystem 280 can comprise a second resonator assembly 281 therein that can be moved relative to the top of the process space 215. One or more displacement systems 286 can be coupled to the “movable” resonator subsystem 280 using one or more baffle assemblies 287, and the displacement systems 286 can be used to vertically move 288 the “movable” resonator subsystem 280 a displacement distance 289 relative to the top of the process space 215. For example, the displacement distance 289 can vary from about 1 mm (millimeter) to about 10 mm. Alternatively, the second microwave resonator system 200 may be configured differently.

FIG. 2A shows a front view of a second microwave resonator system 200. The front view shows an x/y plane view of a process chamber 210 that can be configured using a first interface assembly 265 a, a plurality of chamber walls 212 coupled to the first interface assembly 212 a, and a process space 215 can be configured within the process chamber 210. For example, the chamber walls 212 can have wall thicknesses (t) associated therewith, and the wall thicknesses (t) can vary from about 1 mm to about 5 mm. The first interface assembly 212 a can have a first interface thickness (t_(i1)) associated therewith, and the first interface thickness (t_(i1)) can vary from about 1 mm to about 10 mm.

The front view shows an x/y plane view of a second resonator subsystem 280 that can comprise a second resonator assembly 281 having a plurality of resonator walls (282 a, 282 b, 283, and 284) defining a second EM-energy tuning space 285 therein. For example, the resonator walls (282 a, 282 b, 283, and 284) can include dielectric material such as quartz. In addition, one or more resonator sensors 206 can be coupled to the second EM-energy tuning space 285 to obtain second resonator data.

The resonator walls 282 a can have wall thicknesses (t_(a)) associated therewith, and the wall thicknesses (t_(a)) can vary from about 1 mm to about 5 mm. The resonator walls 282 b can have wall thicknesses (t_(b)) associated therewith, and the wall thicknesses (t_(b)) can vary from about 1 mm to about 5 mm. The resonator walls 283 can have wall thicknesses (t) associated therewith, and the wall thicknesses (t) can vary from about 1 mm to about 5 mm.

In some examples, the first interface assembly 265 a can be used to removably couple the second resonator assembly 281 to the process chamber 210. The first interface assembly 265 a can have first interface thicknesses (t_(i1)) associated therewith, and the first interface thicknesses (t_(i1)) can vary from about 1 mm to about 10 mm. Alternatively, the first interface assembly 265 a may not be required or may be configured differently. A first interface assembly 265 a can comprise one or more isolation assemblies (264 a, 264 b, and 264 c). Each of the isolation assemblies (264 a, 264 b, and 264 c) can be removably coupled to a lower resonator wall 283 and removably coupled to one or more of the first interface assembly 265 a.

In addition, a second interface assembly 265 b can be coupled to the second resonator assembly 281 using an upper resonator wall 284. The second interface assembly 265 b can have second interface thicknesses (t_(i2)) associated therewith, and the second interface thicknesses (t_(i2)) can vary from about 1 mm to about 10 mm. Alternatively, the second interface assembly 265 b may not be required or may be configured differently. The second interface assembly 265 b can comprise one or more control assemblies (260 a, 260 b, and 260 c). Each of the control assemblies (260 a, 260 b, and 260 c) can be removably coupled to the upper resonator wall 284 and removably coupled to the second interface assembly 265 b.

The second microwave resonator system 200 can be configured to form plasma in the process space 215 as the substrate holder 220 and the substrate are moved through the process space 215. The second microwave resonator system 200 can be configured to process 200 mm substrates, 300 mm substrates, or larger-sized substrates. In addition, square and/or rectangular chambers can be configured so that the second microwave resonator system 200 may be configured to process square or rectangular substrates, wafers, or LCDs regardless of their size, as would be appreciated by those skilled in the art. Therefore, while aspects of the invention will be described in connection with the processing of a semiconductor substrate, the invention is not limited solely thereto.

In other embodiments, the second resonator subsystem 280 can comprise a plurality of resonant cavities (not shown) therein. In some other embodiments, the second resonator subsystem 280 can comprise a plurality of resonator subsystems having one or more resonant cavities therein. In various systems, the second resonator assembly 281, and the second EM-energy tuning space 285 can have cylindrical shapes, rectangular shapes, or squares shapes.

In some embodiments, a microwave source 250 can be coupled to the second resonator assembly 281. In addition, one or more RF sources (not shown) sources (not shown) may be coupled to the second resonator subsystem 280. The microwave source 250 can be coupled to a matching network 252, and the matching network 252 can be coupled to a coupling network 254. Alternatively, a plurality of matching networks (not shown) or a plurality of coupling networks (not shown) may be coupled to the second resonator subsystem 280. The coupling network 254 can be removably coupled to an upper resonator wall 284 of the second resonator assembly 281 and can be used to provide microwave energy to the second EM-energy tuning space 285. Alternatively, other coupling configurations may be used.

A first plasma-tuning rod (270 a, 275 a) can have a first plasma-tuning portion 270 a that can extend into the process space 215 at a first location (x_(2a)), and a first EM-tuning portion 275 a that can extend into the second EM-energy tuning space 285 at a first location (x_(1a)). A first isolation assembly 264 a can be used to position (extend) the first plasma-tuning portion 270 a a first plasma-tuning distance 271 a within the process space 215 at a first location defined using (x_(2a)). For example, the first plasma-tuning distance 271 a can vary from about 10 mm to about 400 mm, and the first plasma-tuning distance 271 a can be wavelength-dependent and can vary from about (λ/4) to about (10λ).

A first EM-coupling region 262 a can be established at a first EM-coupling distance 276 a from the lower resonator wall 283 within the second EM-energy tuning space 285, and the first EM-tuning portion 275 a can extend into the first EM-coupling region 262 a. The first EM-tuning portion 275 a can obtain first tunable microwave energy from the first EM-coupling region 262 a, and the first microwave energy can be transferred as first plasma-tuning energy to the process space 215 at the first location (x_(2a)) using the first plasma-tuning portion 270 a. The first EM-coupling region 262 a can include a tunable E-field region, a tunable H-field region, a maximum field region, a maximum voltage region, maximum energy region, or a maximum current region, or any combination thereof. For example, the first EM-coupling distance 276 a can vary from about 0.01 mm to about 10 mm, and the first EM-coupling distance 276 a can be wavelength-dependent and can vary from about (λ/4) to about (10λ).

A first plasma-tuning slab 261 a can be coupled to a first control assembly 260 a and can be used to move 263 a the first plasma-tuning slab 261 a a first EM-tuning distance 277 a relative to the first EM-tuning portion 275 a of the first plasma-tuning rod (270 a, 275 a) within the second EM-energy tuning space 285. The first control assembly 260 a and the first plasma-tuning slab 261 a can be used to optimize the microwave energy coupled from the first EM-coupling region 262 a to the first EM-tuning portion 275 a of the first plasma-tuning rod (270 a, 275 a). For example, the first EM-tuning distance 277 a can be established between the first EM-tuning portion 275 a and the first plasma-tuning slab 261 a within the second EM-energy tuning space 285, and the first EM-tuning distance 277 a can vary from about 0.01 mm to about 1 mm.

The first plasma-tuning rod (270 a, 275 a) can have a first diameter (d_(1a)) associated therewith, and the first diameter (d_(1a)) can vary from about 0.01 mm to about 1 mm. The first isolation assembly 264 a can have a first diameter (D_(1a)) associated therewith, and the first diameter (D_(1a)) can vary from about 1 mm to about 10 mm.

The first EM-tuning portion 275 a, the first EM-coupling region 262 a, the first control assembly 260 a, and the first plasma-tuning slab 261 a can have a first x-plane offset (x_(1a)) associated therewith. For example, the first x-plane offset (x_(1a)) can be established relative to the resonator wall 282 b, can be wavelength-dependent, and can vary from about (λ/4) to about (10λ). The first control assembly 260 a can have a cylindrical configuration and a diameter (d_(2a)) that can vary from about 1 mm to about 5 mm. The first plasma-tuning slab 261 a can have diameters (D_(2a)) associated therewith, and the diameter (D_(2a)) can vary from about 1 mm to about 10 mm.

A second plasma-tuning rod (270 b, 275 b) can have a second plasma-tuning portion 270 b that can extend into the process space 215 at a second location (x_(2b)), and a second EM-tuning portion 275 b that can extend into the second EM-energy tuning space 285 at a second location (x_(1b)). A second isolation assembly 264 b can be used to position (extend) the second plasma-tuning portion 270 b second plasma-tuning distances 271 b within the process space 215 at second locations defined using (x_(2b)). For example, the second plasma-tuning distances 271 b can vary from about 10 mm to about 400 mm, and the second plasma-tuning distances 271 b can be wavelength-dependent and can vary from about (λ/4) to about (10λ).

A second EM-coupling region 262 b can be established at second EM-coupling distances 276 b from the lower resonator wall 283 defining the second EM-energy tuning space 285, and the second EM-tuning portion 275 b can extend into the second EM-coupling region 262 b. The second EM-tuning portion 275 b can obtain second tunable microwave energy from the second EM-coupling region 262 b, and the second microwave energy can be transferred as second plasma-tuning energy to the process space 215 at the second location (x_(2b)) using the second plasma-tuning portion 270 b. The second EM-coupling region 262 b can include a tunable E-field region, a tunable H-field region, a maximum field region, a maximum voltage region, maximum energy region, or a maximum current region, or any combination thereof. For example, the second EM-coupling distance 276 b can vary from about 0.01 mm to about 10 mm, and the second EM-coupling distance 276 b can be wavelength-dependent and can vary from about (λ/4) to about (10λ).

A second plasma-tuning slab 261 b can be coupled to a second control assembly 260 b and can be used to move 263 b the second plasma-tuning slab 261 b second EM-tuning distances 277 b relative to the second EM-tuning portion 275 b of the second plasma-tuning rod (270 b, 275 b) within the second EM-energy tuning space 285. The second control assembly 260 b and the second plasma-tuning slab 261 b can be used to optimize the microwave energy coupled from the second EM-coupling region 262 b to the second EM-tuning portion 275 b of the second plasma-tuning rod (270 b, 275 b). For example, the second EM-tuning distances 277 b can be established between the second EM-tuning portion 275 b and the second plasma-tuning slab 261 b within the second EM-energy tuning space 285, and the second EM-tuning distances 277 b can vary from about 0.01 mm to about 1 mm.

The second plasma-tuning rod (270 b, 275 b) can have second diameters (d_(1b)) associated therewith, and the second diameters (d_(1b)) can vary from about 0.01 mm to about 1 mm. The second isolation assembly 264 b can have second diameters (D_(1b)) associated therewith, and the second diameters (D_(1b)) can vary from about 1 mm to about 10 mm.

The second EM-tuning portion 275 b, the second EM-coupling region 262 b, the second control assembly 260 b, and the second plasma-tuning slab 261 b can have second x-plane offsets (x_(1b)) associated therewith. For example, the second x-plane offsets (x_(1b)) can be established relative to the resonator wall 282 b and can be wavelength-dependent and can vary from about (λ/4) to about (10λ). The second control assembly 260 b can have a cylindrical configuration and second diameters (d_(2b)) that can vary from about 1 mm to about 5 mm. The second plasma-tuning slab 261 b can have diameters (D_(2b)) associated therewith, and the diameters (D_(2b)) can vary from about 1 mm to about 10 mm.

A third plasma-tuning rod (270 c, 275 c) can have a third plasma-tuning portion 270 c that can extend into the process space 215 at a third location (x_(2c)), and a third EM-tuning portion 275 c that can extend into the second EM-energy tuning space 285 at a third location (x_(1c)). A third isolation assembly 264 c can be used to position (extend) the third plasma-tuning portion 270 c third plasma-tuning distances 271 c within the process space 215 at third locations defined using (x_(2c)). For example, the third plasma-tuning distances 271 c can vary from about 10 mm to about 400 mm, and the third plasma-tuning distances 271 c can be wavelength-dependent and can vary from about (λ/4) to about (10λ).

A third EM-coupling region 262 c can be established at third EM-coupling distances 276 c from the lower resonator wall 283 defining the second EM-energy tuning space 285, and the third EM-tuning portion 275 c can extend into the third EM-coupling region 262 c. The third EM-tuning portion 275 c can obtain third tunable microwave energy from the third EM-coupling region 262 c, and the third microwave energy can be transferred as third plasma-tuning energy to the process space 215 at the third location (x_(2c)) using the third plasma-tuning portion 270 c. The third EM-coupling region 262 c can include a tunable E-field region, a tunable H-field region, a maximum field region, a maximum voltage region, maximum energy region, or a maximum current region, or any combination thereof. For example, the third EM-coupling distance 276 c can vary from about 0.01 mm to about 10 mm, and the third EM-coupling distance 276 c can be wavelength-dependent and can vary from about (λ/4) to about (10λ).

A third plasma-tuning slab 261 c can be coupled to a third control assembly 260 c and can be used to move 263 c the third plasma-tuning slab 261 c third EM-tuning distances 277 c relative to the third EM-tuning portion 275 c of the third plasma-tuning rod (170 c, 275 c) within the second EM-energy tuning space 285. The third control assembly 260 c and the third plasma-tuning slab 261 c can be used to optimize the microwave energy coupled from the third EM-coupling region 262 c to the third EM-tuning portion 275 c of the third plasma-tuning rod (270 c, 275 c). For example, the third EM-tuning distances 277 c can be established between the third EM-tuning portion 275 c and the third plasma-tuning slab 261 c within the second EM-energy tuning space 285, and the third EM-tuning distances 277 c can vary from about 0.01 mm to about 1 mm.

The third plasma-tuning rod (270 c, 275 c) can have third diameters (d_(1c)) associated therewith, and the third diameters (d_(1c)) can vary from about 0.01 mm to about 1 mm. The third isolation assembly 264 c can have third diameters (D_(1c)) associated therewith, and the third diameters (D_(1c)) can vary from about 1 mm to about 10 mm.

The third EM-tuning portion 275 c, the third EM-coupling region 262 c, the third control assembly 260 c, and the third plasma-tuning slab 261 c can have third x-plane offsets (x_(1c)) associated therewith. For example, the third x-plane offsets (x_(1c)) can be established relative to the resonator wall 282 b and can be wavelength-dependent and can vary from about (λ/4) to about (10λ). The third control assembly 260 c can have a cylindrical configuration and third diameters (d_(2c)) that can vary from about 1 mm to about 5 mm. The third plasma-tuning slab 261 c can have third diameters (D_(2c)) associated therewith, and the third diameters (D_(2c)) can vary from about 1 mm to about 10 mm.

The control assemblies (260 a, 260 b, and 265 c) can be coupled 296 to the controller 295, and the controller 295 can use process recipes to establish, control, and optimize the EM-tuning distances (277 a, 277 b, and 277 c) to control the EM-coupling regions (262 a, 262 b, and 265 c) in the EM-energy tuning space 285 and the plasma uniformity within the process space 215. The controller 295 can be coupled 296 to the microwave source 250, the matching network 252, and the coupling network 254, and the controller 295 can use process recipes to establish, control, and optimize the microwave source 250, the matching network 252, and the coupling network 254 to control the EM-coupling regions (262 a, 262 b, and 265 c) in the EM-energy tuning space 285 and the plasma uniformity within the process space 215. For example, the microwave source 250 can operate at frequencies from about 500 MHz to about 5000 MHz. In addition, the controller 295 can be coupled 296 to the resonator sensors 206 and process sensors 207, and the controller 295 can use process recipes to establish, control, and optimize the data from the resonator sensors 206 and the process sensors 207 to control the EM-coupling regions (262 a, 262 b, and 265 c) in the EM-energy tuning space 285 and the plasma uniformity within the process space 215.

The front view of the second microwave resonator system 200 includes an x/y plane view of a cavity-control assembly 255 that is shown coupled to a front view of a cavity-tuning slab 256. The cavity-control assembly 255 can have a first diameter (d_(1aa)) associated therewith, and the first diameter (d_(1aa)) can vary from about 0.01 mm to about 1 mm. The cavity-tuning slab 256 can have a second diameter (D_(1aa)) associated therewith, and the second diameter (D_(1aa)) can vary from about 1 mm to about 10 mm. The cavity-control assembly 255 and the cavity-tuning slab 256 can have y-plane offsets (y_(1aa)) associated therewith, and the y-plane offsets (y_(1aa)) can vary from about 1 mm to about 10 mm.

The cavity-control assembly 255 can be used to move 257 the cavity-tuning slab 256 second cavity-tuning distances 258 within the second EM-energy tuning space 285. The controller 295 can be coupled 296 to the cavity-control assembly 255, and the controller 295 can use process recipes to establish, control, and optimize the second cavity-tuning distances 258 to control and maintain the plasma uniformity within the process space 215 in real-time. For example, the second cavity-tuning distances 258 can vary from about 0.01 mm to about 10 mm, and the second cavity-tuning distances 258 can be wavelength-dependent and can vary from about (λ/16) to about (10λ).

Still referring to FIG. 2A, a substrate holder 220, and a lower electrode 221 are shown. When present, the lower electrode 221 can be used to couple Radio Frequency (RF) power to plasma in process space 215. For example, lower electrode 221 can be electrically biased at an RF voltage via the transmission of RF power from RF generator 230 through impedance match network 231 and RF sensor 235 to lower electrode 221. The RF bias can serve to heat electrons to form and/or maintain the plasma. A typical frequency for the RF bias can range from 1 MHz to 100 MHz and is preferably 13.56 MHz. Alternatively, RF power may be applied to the lower electrode 221 at multiple frequencies. Furthermore, impedance match network 231 can serve to maximize the transfer of RF power to the plasma in process chamber 210 by minimizing the reflected power. Various match network topologies and automatic control methods can be utilized. The RF sensor 235 can measure the power levels and/or frequencies associated with the fundamental signals, harmonic signals, and/or intermodulation signals. In addition, the controller 295 can be coupled 296 to the RF generator 230, the impedance match network 231, and the RF sensor 235, and the controller 295 can use process recipes to establish, control, and optimize the data to and from the RF generator 230, the impedance match network 231, and the RF sensor 235 to the EM-coupling regions (262 a, 262 b, and 265 c) in the EM-energy tuning space 285 and control the plasma uniformity within the process space 215.

Some second microwave resonator systems 200 can include a pressure control system 290 and exhaust port 291 coupled to the process chamber 210, and configured to evacuate the process chamber 210, as well as control the pressure within the process chamber 210. Alternatively, the pressure control system 290 and/or the exhaust port 291 may not be required.

As shown in FIG. 2A, the second microwave resonator systems 200 can comprise a first gas supply system 240 coupled to a first supply element 241, and the first supply element 241 can be one or more flow elements 242 that can be coupled to the process chamber 210. The flow elements 242 can be configured to introduce a first process gas to process space 215, and can include flow control and/or flow measuring devices. In addition, the second plasma processing system 200 can comprise a second gas supply system 245 coupled to a second supply element 246, and the second supply element 246 can be one or more second flow elements 247 that can be coupled to the process chamber 210. The second flow elements 247 can be configured to introduce a second process gas to process space 215, and can include flow control and/or flow measuring devices. Alternatively, the second gas supply system 245, the second supply element 246, and/or the second flow elements 247 may not be required.

During dry plasma etching, the process gas may comprise an etchant, a passivant, or an inert gas, or a combination of two or more thereof. For example, when plasma etching a dielectric film such as silicon oxide (SiO_(x)) or silicon nitride (Si_(x)N_(y)), the plasma etch gas composition generally includes a fluorocarbon-based chemistry (C_(x)F_(y)) such as at least one of C₄F₈, C₅F₈, C₃F₆, C₄F₆, CF₄, etc., and/or may include a fluorohydrocarbon-based chemistry (C_(x)H_(y)F_(z)) such as at least one of CHF₃, CH₂F₂, etc., and can have at least one of an inert gas, oxygen, CO or CO₂. Additionally, for example, when etching polycrystalline silicon (polysilicon), the plasma etch gas composition generally includes a halogen-containing gas such as HBr, Cl₂, NF₃, or SF₆ or a combination of two or more thereof, and may include fluorohydrocarbon-based chemistry (C_(x)H_(y)F_(z)) such as at least one of CHF₃, CH₂F₂, etc., and at least one of an inert gas, oxygen, CO or CO₂, or two or more thereof. During plasma-enhanced deposition, the process gas may comprise a film forming precursor, a reduction gas, or an inert gas, or a combination of two or more thereof.

FIG. 2B illustrates a top view of a second resonator assembly in accordance with embodiments of the invention. The second resonator assembly 281 can have a total length (x_(T1)) and a total height (z_(T1)) associated therewith in the x/z plane. For example, the total length (x_(T1)) can vary from about 10 mm to about 500 mm, and the total height (z_(T1)) can vary from about 10 mm to about 1000 mm.

The top view of second resonator subsystem 280 includes an x/z plane view of a first control assembly 260 a that is shown surrounded by a top (dash line) view of a first plasma-tuning slab 261 a. The first control assembly 260 a can have a first diameter (d_(2a)) associated therewith, and the first diameter (d_(2a)) can vary from about 0.01 mm to about 1 mm. The first plasma-tuning slab 261 a can have a second diameter (D_(2a)) associated therewith, and the second diameter (D_(2a)) can vary from about 1 mm to about 10 mm. The first control assembly 260 a and the first plasma-tuning slab 261 a can have first x-plane offsets (x_(1a)) associated therewith, and the first x-plane offsets (x_(1a)) can vary from about 1 mm to about 10 mm. Alternatively, the first control assembly 260 a and the first plasma-tuning slab 261 a may have different first x-plane offsets (x_(1a)) associated therewith. The first control assembly 260 a and the first plasma-tuning slab 261 a can have first z-plane offsets (z_(1a)) associated therewith, and the first z-plane offsets (z_(1a)) can vary from about 1 mm to about 10 mm. Alternatively, the first control assembly 260 a and the first plasma-tuning slab 261 a may have different first z-plane offsets (z_(1a)) associated therewith.

In addition, the top view of the second resonator subsystem 280 includes an x/z plane view of a second control assembly 260 b that is shown surrounded by a top (dash line) view of a second plasma-tuning slab 261 b. The second control assembly 260 b can have a first diameter (d_(2b)) associated therewith, and the first diameter (d_(2b)) can vary from about 0.01 mm to about 1 mm. The second plasma-tuning slab 261 b can have a second diameter (D_(2b)) associated therewith, and the second diameter (D_(2b)) can vary from about 1 mm to about 10 mm. The second control assembly 260 b and the second plasma-tuning slab 261 b can have second x-plane offsets (x_(1b)) associated therewith, and the second x-plane offsets (x_(1b)) can vary from about 1 mm to about 10 mm. Alternatively, the second control assembly 260 b and the second plasma-tuning slab 261 b may have different second x-plane offsets (x_(1b)) associated therewith. The second control assembly 260 b and the second plasma-tuning slab 261 b can have second z-plane offsets (z_(1b)) associated therewith, and the second z-plane offsets (z_(1b)) can vary from about 1 mm to about 10 mm. Alternatively, the second control assembly 260 b and the second plasma-tuning slab 261 b may have different second z-plane offsets (z_(1a)) associated therewith.

Furthermore, the top view of second resonator subsystem 280 includes a x/z plane view of a third control assembly 260 c that is shown surrounded by a top (dash line) view of a third plasma-tuning slab 261 c. The third control assembly 260 c can have a first diameter (d_(2c)) associated therewith, and the first diameter (d_(2c)) can vary from about 0.01 mm to about 1 mm. The third plasma-tuning slab 261 c can have a second diameter (D_(2c)) associated therewith, and the third diameter (D_(2c)) can vary from about 1 mm to about 10 mm. The third control assembly 260 c and the third plasma-tuning slab 261 c can have third x-plane offsets (x_(1c)) associated therewith, and the third x-plane offsets (x_(1c)) can vary from about 1 mm to about 10 mm. Alternatively, the third control assembly 260 c and the third plasma-tuning slab 261 c may have different third x-plane offsets (x_(1c)) associated therewith. The third control assembly 260 c and the third plasma-tuning slab 261 c can have third z-plane offsets (z_(1c)) associated therewith, and the third z-plane offsets (z_(1b)) can vary from about 1 mm to about 10 mm. Alternatively, the third control assembly 260 c and the third plasma-tuning slab 261 c may have different third z-plane offsets (z_(1a)) associated therewith.

FIG. 2B shows top views of resonator walls (282 a, 282 b, 283, and 284). The resonator wall 282 a can have wall thicknesses (t_(a)) associated therewith, and the wall thicknesses (t_(a)) can vary from about 1 mm to about 5 mm. The resonator wall 282 b can have wall thicknesses (t_(b)) associated therewith, and the wall thicknesses (t_(b)) can vary from about 1 mm to about 5 mm. The resonator walls (282 a and 282 b) can have wall thicknesses (t) associated therewith, and the wall thicknesses (t) can vary from about 1 mm to about 5 mm.

The top view of the second microwave resonator system 200 includes an x/z plane view of a cavity-control assembly 255 that is shown coupled to a top view of a cavity-tuning slab 256. The cavity-control assembly 255 can have a first diameter (d_(1aa)) associated therewith, and the first diameter (d_(1aa)) can vary from about 0.01 mm to about 1 mm. The cavity-tuning slab 256 can have a second diameter (D_(1aa)) associated therewith, and the second diameter (D_(1aa)) can vary from about 1 mm to about 10 mm. The cavity-control assembly 255 and the cavity-tuning slab 256 can have a first y-plane offset (y_(1aa)) associated therewith, and the first y-plane offset (y_(1aa)) can vary from about 1 mm to about 10 mm.

FIG. 2C illustrates a side view of the second microwave resonator system 200. The side view shows a y/z plane view of a process chamber 210 that can be configured using a first interface assembly 265 a, a plurality of chamber walls 212 coupled to the first interface assembly 212 a, and a process space 215 can be configured within the process chamber 210. For example, the chamber walls 212 can have wall thicknesses (t) associated therewith, and the wall thicknesses (t) can vary from about 1 mm to about 5 mm. The first interface assembly 212 a can have a first interface thickness (t_(i1)) associated therewith, and the first interface thickness (t_(i1)) can vary from about 1 mm to about 10 mm.

The side view shows a y/z plane view of a second resonator subsystem 280 that can comprise a second resonator assembly 281 that can be configured using a plurality of resonator walls (282 a, 282 b, 283, and 284). For example, the resonator walls (282 a, 282 b, 283, and 284) can include dielectric material such as quartz and can define a second EM-energy tuning space 285 therein. In addition, one or more resonator sensors 206 can be coupled to the second EM-energy tuning space 285 to obtain first resonator data.

The resonator walls 282 a can have wall thicknesses (t_(a)) associated therewith, and the wall thicknesses (t_(a)) can vary from about 1 mm to about 5 mm. The resonator walls 282 b can have wall thicknesses (t_(b)) associated therewith, and the wall thicknesses (t_(b)) can vary from about 1 mm to about 5 mm. The resonator walls 283 can have wall thicknesses (t) associated therewith, and the wall thicknesses (t) can vary from about 1 mm to about 5 mm.

In some examples, the first interface assembly 265 a can be used to removably couple the second resonator assembly 281 to the process chamber 210. The first interface assembly 265 a can have first interface thicknesses (t_(i1)) associated therewith, and the first interface thicknesses (t_(i1)) can vary from about 1 mm to about 10 mm. Alternatively, the first interface assembly 265 a may not be required or may be configured differently. A first interface assembly 265 a can comprise one or more isolation assemblies (264 a, 264 b, and 264 c). Each of the isolation assemblies (264 a, 264 b, and 264 c) can be removably coupled to a lower resonator wall 283 and removably coupled to one or more of the first interface assembly 265 a.

In addition, a second interface assembly 265 b can be coupled to the second resonator assembly 281 using an upper resonator wall 284. The second interface assembly 265 b can have second interface thicknesses (t_(i2)) associated therewith, and the second interface thicknesses (t_(i2)) can vary from about 1 mm to about 10 mm. Alternatively, the second interface assembly 265 b may not be required or may be configured differently. The second interface assembly 265 b can comprise one or more control assemblies (260 a, 260 b, and 260 c). Each of the control assemblies (260 a, 260 b, and 260 c) can be removably coupled to the upper resonator wall 284 and removably coupled to the second interface assembly 265 b.

The second microwave resonator system 200 can be configured to form plasma in the process space 215 as the substrate holder 220 and the substrate are moved through the process space 215. The second microwave resonator system 200 can be configured to process 200 mm substrates, 300 mm substrates, or larger-sized substrates. In addition, square and/or rectangular chambers can be configured so that the second microwave resonator system 200 may be configured to process square or rectangular substrates, wafers, or LCDs regardless of their size, as would be appreciated by those skilled in the art. Therefore, while aspects of the invention will be described in connection with the processing of a semiconductor substrate, the invention is not limited solely thereto.

In other embodiments, the second resonator subsystem 280 can comprise a plurality of resonant cavities (not shown) therein. In some other embodiments, the second resonator subsystem 280 can comprise a plurality of resonator subsystems having one or more resonant cavities therein. In various systems, the second resonator assembly 281 and the second EM-energy tuning space 285 can have cylindrical shapes, rectangular shapes, or squares shapes.

In FIG. 2C, a microwave source 250 is shown coupled to the second resonator assembly 281. The microwave source 250 can be coupled to a matching network 252, and the matching network 252 can be coupled to a coupling network 254. Alternatively, a plurality of matching networks (not shown) or a plurality of coupling networks (not shown) may be coupled to the second resonator subsystem 280. The coupling network 254 can be removably coupled to an upper resonator wall 284 of the second resonator assembly 281 and can be used to provide microwave energy to the second EM-energy tuning space 285. Alternatively, other coupling configurations may be used.

The side view includes a y/z plane view of a first set of plasma-tuning rods {(270 a, 275 a), (270 b, 275 b), and (270 c, 275 c)} that can have a first set of plasma-tuning portions (270 a, 270 b, and 270 c) that can extend into the process space 215 at first z-plane locations (z_(2a-c)), and a first set of EM-tuning portions (275 a, 275 b, and 275 c) that can extend into the second EM-energy tuning space 285 at second z-plane locations (z_(1a-c)). A first set of isolation assemblies (264 a, 264 b, and 264 c) can be used to position (extend) the first set of plasma-tuning portions (270 a, 270 b, and 270 c) at the first set of plasma-tuning distances (271 a, 271 b, and 271 c) within the process space 215 at the first locations defined using (z_(2a-c)). For example, the first set of plasma-tuning distances (271 a, 271 b, and 271 c) can vary from about 10 mm to about 400 mm, and the first set of plasma-tuning distances (271 a, 271 b, and 271 c) can be wavelength-dependent and can vary from about (λ/4) to about (10λ).

A first set of EM-coupling regions (262 a, 262 b, and 262 c) can be established at the first set of EM-coupling distances (276 a, 276 b, and 276 c) from the lower resonator wall 283 within the second EM-energy tuning space 285, and the first set of EM-tuning portions (275 a, 275 b, and 275 c) can extend into the first set of EM-coupling regions (262 a, 262 b, and 262 c). The first set of EM-tuning portions (275 a, 275 b, and 275 c) can obtain tunable microwave energies from the first set of EM-coupling regions (262 a, 262 b, and 262 c), and the tunable microwave energies can be transferred as controllable plasma-tuning energies to the process space 215 at the first z-plane locations (z_(2a-c)) using the first set of plasma-tuning portions (270 a, 270 b, and 270 c). The first set of EM-coupling regions (262 a, 262 b, and 262 c) can include a tunable E-field region, a tunable H-field region, a maximum field region, a maximum voltage region, maximum energy region, or a maximum current region, or any combination thereof. For example, the first set of EM-coupling distances (276 a, 276 b, and 276 c) can vary from about 0.01 mm to about 10 mm, and the first set of EM-coupling distances (276 a, 276 b, and 276 c) can be wavelength-dependent and can vary from about (λ/4) to about (10λ).

A first set of plasma-tuning slabs (261 a, 261 b, and 261 c) can be coupled to a first set of control assemblies (260 a, 260 b, and 260 c) and can be used to move (263 a, 263 b, and 263 c) the first set of plasma-tuning slabs (261 a, 261 b, and 261 c) first set of EM-tuning distances (277 a, 277 b, and 277 c) relative to the first set of EM-tuning portions (275 a, 275 b, and 275 c) of the first set of plasma-tuning rod {(270 a, 275 a), (270 b, 275 b), and (270 c, 275 c)} within the second EM-energy tuning space 285. The first set of control assemblies (260 a, 260 b, and 260 c) and the first set of plasma-tuning slabs (261 a, 261 b, and 261 c) can be used to optimize the microwave energies coupled from the first set of EM-coupling regions (262 a, 262 b, and 262 c) to the first set of EM-tuning portions (275 a, 275 b, and 275 c) of the first set of plasma-tuning rod {(270 a, 275 a), (270 b, 275 b), and (270 c, 275 c)}. For example, the first set of EM-tuning distances (277 a, 277 b, and 277 c) can be established between the first set of EM-tuning portions (275 a, 275 b, and 275 c) and the first set of plasma-tuning slabs (261 a, 261 b, and 261 c) within the second EM-energy tuning space 285, and the first set of EM-tuning distances (277 a, 277 b, and 277 c) can vary from about 0.01 mm to about 1 mm.

The first set of plasma-tuning rod {(270 a, 275 a), (270 b, 275 b), and (270 c, 275 c)} can comprise dielectric material and can have first diameter (d_(1a)) associated therewith, and the first diameters (d_(1a)) can vary from about 0.01 mm to about 1 mm. The first set of isolation assemblies (264 a, 264 b, and 264 c) can comprise dielectric material and can have first diameters (D_(1a)) associated therewith, and the first diameters (D_(1a)) can vary from about 1 mm to about 10 mm.

The first set of EM-tuning portions (275 a, 275 b, and 275 c), the first set of EM-coupling regions (262 a, 262 b, and 262 c), the first set of control assemblies (260 a, 260 b, and 260 c), and the first set of plasma-tuning slabs (261 a, 261 b, and 261 c) can have z-plane offsets (z_(1a-c)) associated therewith. For example, the z-plane offsets (z_(1a-c)) can be established relative to the lower resonator wall 283 and can be wavelength-dependent and can vary from about (λ/4) to about (10λ). The first set of control assemblies (260 a, 260 b, and 260 c) can comprise dielectric material, can have cylindrical configurations and diameter (d_(2a-c)) that can vary from about 1 mm to about 5 mm. The first set of plasma-tuning slabs (261 a, 261 b, and 261 c) can comprise dielectric material and can have diameters (D_(2a-c)) associated therewith, and the diameters (D_(2a-c)) can vary from about 1 mm to about 10 mm.

As shown in FIG. 2C, the control assemblies (260 a, 260 b, and 265 c) can be coupled 296 to the controller 295, and the controller 295 can use process recipes to establish, control, and optimize the EM-tuning distances (277 a, 277 b, and 277 c) to control the EM-coupling regions (262 a, 262 b, and 265 c) in the EM-energy tuning space 285 and the plasma uniformity within the process space 215. The controller 295 can be coupled 296 to the microwave source 250, the matching network 252, and the coupling network 254, and the controller 295 can use process recipes to establish, control, and optimize the microwave source 250, the matching network 252, and the coupling network 254 to control the EM-coupling regions (262 a, 262 b, and 265 c) in the EM-energy tuning space 285 and the plasma uniformity within the process space 215. For example, the microwave source 250 can operate at frequencies from about 500 MHz to about 5000 MHz. In addition, the controller 295 can be coupled 296 to the resonator sensors 206 and process sensors 207, and the controller 295 can use process recipes to establish, control, and optimize the data from the resonator sensors 206 and the process sensors 207 to control the EM-coupling regions (262 a, 262 b, and 265 c) in the EM-energy tuning space 285 and the plasma uniformity within the process space 215.

The side view of the second microwave resonator system 200 includes a y/z plane view of a cavity-control assembly 255 and a y/z plane view of a cavity-tuning slab 256. The cavity-control assembly 255 can have a first diameter (d_(1aa)) associated therewith, and the first diameter (d_(1aa)) can vary from about 0.01 mm to about 1 mm. The cavity-tuning slab 256 can have a second diameter (D_(1aa)) associated therewith, and the second diameter (D_(1aa)) can vary from about 1 mm to about 10 mm. The cavity-control assembly 255 and the cavity-tuning slab 256 can have first y/z plane offsets (y_(1aa)) associated therewith, and the first y/z plane offsets (y_(1aa)) can vary from about 1 mm to about 10 mm.

Still referring to FIG. 2C, y/z plane views of the substrate holder 220 and the lower electrode 221 are shown. When present, the lower electrode 221 can be used to couple Radio Frequency (RF) power to plasma in process space 215. For example, lower electrode 221 can be electrically biased at an RF voltage via the transmission of RF power from RF generator 230 through impedance match network 231 and RF sensor 235 to lower electrode 221. The RF bias can serve to heat electrons to form and/or maintain the plasma. A typical frequency for the RF bias can range from 1 MHz to 100 MHz and is preferably 13.56 MHz. Alternatively, RF power may be applied to the lower electrode 221 at multiple frequencies. Furthermore, impedance match network 231 can serve to maximize the transfer of RF power to the plasma in process chamber 210 by minimizing the reflected power. Various match network topologies and automatic control methods can be utilized. The RF sensor 235 can measure the power levels and/or frequencies associated with the fundamental signals, harmonic signals, and/or intermodulation signals. In addition, the controller 295 can be coupled 296 to the RF generator 230, the impedance match network 231, and the RF sensor 235, and the controller 295 can use process recipes to establish, control, and optimize the data to and from the RF generator 230, the impedance match network 231, and the RF sensor 235 to control the EM-coupling regions (262 a, 262 b, and 265 c) in the EM-energy tuning space 285 and the plasma uniformity within the process space 215.

The side view of the second microwave resonator system 200 can include a y/z plane view of a pressure control system 290 and exhaust port 291 coupled to the process chamber 210, and configured to evacuate the process chamber 210, as well as control the pressure within the process chamber 210. Alternatively, the pressure control system 290 and/or the exhaust port 291 may not be required.

As shown in FIG. 2C, the side view can include y/z plane views of the first gas supply system 240, the first supply element 241, the first flow elements 242, and the process chamber 210. The first flow elements 242 can be configured around the process space 215, and can be configured to introduce a first process gas to process space 215. In addition, the side view can include y/z plane views of the second gas supply system 245, the second supply element 246, and the second flow elements 247. The second flow elements 247 can be configured around the process space 215, and can be configured to introduce a second process gas to process space 215.

During dry plasma etching, the process gas may comprise an etchant, a passivant, or an inert gas, or a combination of two or more thereof. For example, when plasma etching a dielectric film such as silicon oxide (SiO_(x)) or silicon nitride (Si_(x)N_(y)), the plasma etch gas composition generally includes a fluorocarbon-based chemistry (C_(x)F_(y)) such as at least one of C₄F₈, C₅F₈, C₃F₆, C₄F₆, CF₄, etc., and/or may include a fluorohydrocarbon-based chemistry (C_(x)H_(y)F_(z)) such as at least one of CHF₃, CH₂F₂, etc., and can have at least one of an inert gas, oxygen, CO or CO₂. Additionally, for example, when etching polycrystalline silicon (polysilicon), the plasma etch gas composition generally includes a halogen-containing gas such as HBr, Cl₂, NF₃, or SF₆ or a combination of two or more thereof, and may include fluorohydrocarbon-based chemistry (C_(x)H_(y)F_(z)) such as at least one of CHF₃, CH₂F₂, etc., and at least one of an inert gas, oxygen, CO or CO₂, or two or more thereof. During plasma-enhanced deposition, the process gas may comprise a film forming precursor, a reduction gas, or an inert gas, or a combination of two or more thereof.

FIG. 3A illustrates a third microwave resonator system 300 according to embodiments of the invention. The third microwave resonator system 300 may be used in a dry plasma etching system or a plasma enhanced deposition system. The third microwave resonator system 300 can include a third resonator subsystem 380 that can be coupled to a process chamber 310. Alternatively, the third microwave resonator system 300 may be configured differently.

FIG. 3A shows a front view of the third microwave resonator system 300. The front view shows an x/y plane view of a process chamber 310 that can be configured using a first interface assembly 365 a, a plurality of chamber walls 312 coupled to the first interface assembly 312 a, and a process space 315 can be configured within the process chamber 310. For example, the chamber walls 312 can have wall thicknesses (t) associated therewith, and the wall thicknesses (t) can vary from about 1 mm to about 5 mm. The first interface assembly 312 a can have a first interface thickness (t_(i1)) associated therewith, and the first interface thickness (t_(i1)) can vary from about 1 mm to about 10 mm.

The front view shows an x/y plane view of a third resonator subsystem 380 that can comprise a third resonator assembly 381 having a plurality of resonator walls (382 a, 382 b, 383, and 384) defining a third EM-energy tuning space 385 therein. For example, the resonator walls (382 a, 382 b, 383, and 384) can include dielectric material such as quartz. In addition, one or more resonator sensors 306 can be coupled to the third EM-energy tuning space 385 to obtain first resonator data.

The resonator walls 382 a can have wall thicknesses (t_(a)) associated therewith, and the wall thicknesses (t_(a)) can vary from about 1 mm to about 5 mm. The resonator walls 382 b can have wall thicknesses (t_(b)) associated therewith, and the wall thicknesses (t_(b)) can vary from about 1 mm to about 5 mm. The resonator walls 383 can have wall thicknesses (t) associated therewith, and the wall thicknesses (t) can vary from about 1 mm to about 5 mm.

In some examples, the first interface assembly 365 a can be used to removably couple the third resonator assembly 381 to the process chamber 310. The first interface assembly 365 a can have first interface thicknesses (t_(i1)) associated therewith, and the first interface thicknesses (t_(i1)) can vary from about 1 mm to about 10 mm. Alternatively, the first interface assembly 365 a may not be required or may be configured differently. A first interface assembly 365 a can comprise one or more isolation assemblies (364 a, 364 b, and 364 c). Each of the isolation assemblies (364 a, 364 b, and 364 c) can be removably coupled to a lower resonator wall 383 and removably coupled to one or more of the first interface assembly 365 a. A first protection assembly 372 a can be coupled to the first isolation assembly 364 a, and the first protection assembly 372 a can be configured at a first location (x_(2a)) within the process space 315. The first protection assembly 372 a can have a first isolated protection space 373 a therein and can have a first insertion length 374 a associated therewith. A second protection assembly 372 b can be coupled to the second isolation assembly 364 b, and the second protection assembly 372 b can be configured at a second location (x_(2b)) within the process space 315. The second protection assembly 372 b can have a second isolated protection space 373 b therein and can have a second insertion length 374 b associated therewith. A third protection assembly 372 c can be coupled to the third isolation assembly 364 c, and the third protection assembly 372 c can be configured at a third location (x_(2c)) within the process space 315. The third protection assembly 372 c can have a third isolated protection space 373 c therein and can have a third insertion length 374 c associated therewith. For example, the insertion lengths (374 a, 374 b, and 374 c) can vary from about 1 mm to about 10 mm in the x/y plane, and the first set of protection assemblies (372 a, 372 b, and 372 c) can be constructed using one or more dielectric materials.

In addition, a second interface assembly 365 b can be coupled to the third resonator assembly 381 using an upper resonator wall 384. The second interface assembly 365 b can have second interface thicknesses (t_(i2)) associated therewith, and the second interface thicknesses (t_(i2)) can vary from about 1 mm to about 10 mm. Alternatively, the second interface assembly 365 b may not be required or may be configured differently. The second interface assembly 365 b can comprise one or more control assemblies (360 a, 360 b, and 360 c). Each of the control assemblies (360 a, 360 b, and 360 c) can be removably coupled to the upper resonator wall 384 and removably coupled to the second interface assembly 365 b.

The third microwave resonator system 300 can be configured to form plasma in the process space 315 as the substrate holder 320 and the substrate are moved through the process space 315. The third microwave resonator system 300 can be configured to process 200 mm substrates, 300 mm substrates, or larger-sized substrates. In addition, square and/or rectangular chambers can be configured so that the third microwave resonator system 300 may be configured to process square or rectangular substrates, wafers, or LCDs regardless of their size, as would be appreciated by those skilled in the art. Therefore, while aspects of the invention will be described in connection with the processing of a semiconductor substrate, the invention is not limited solely thereto.

In other embodiments, the third resonator subsystem 380 can comprise a plurality of resonant cavities (not shown) therein. In some other embodiments, the third resonator subsystem 380 can comprise a plurality of resonator subsystems having one or more resonant cavities therein. In various systems, the third resonator assembly 381 and the third EM-energy tuning space 385 can have cylindrical shapes, rectangular shapes, or squares shapes.

In some embodiments, a microwave source 350 can be coupled to the third resonator assembly 381. In addition, one or more RF sources (not shown) sources (not shown) may be coupled to the third resonator subsystem 380. The microwave source 350 can be coupled to a matching network 352, and the matching network 352 can be coupled to a coupling network 354. Alternatively, a plurality of matching networks (not shown) or a plurality of coupling networks (not shown) may be coupled to the third resonator subsystem 380. The coupling network 354 can be removably coupled to an upper resonator wall 384 of the third resonator assembly 381 and can be used to provide microwave energy to the third EM-energy tuning space 385. Alternatively, other coupling configurations may be used.

A first plasma-tuning rod (370 a, 375 a) can have a first plasma-tuning portion 370 a that can extend into the first isolated protection space 373 a established in the first protection assembly 372 a at a first location (x_(2a)) in the process space 315, and a first EM-tuning portion 375 a that can extend into the third EM-energy tuning space 385 at a first location (x_(1a)). A first isolation assembly 364 a can be used to position (extend) the first plasma-tuning portion 370 a first plasma-tuning distances 371 a within the first isolated protection space 373 a established in the first protection assembly 372 a. For example, the first plasma-tuning distance 371 a can vary from about 10 mm to about 400 mm, and the first plasma-tuning distance 371 a can be wavelength-dependent and can vary from about (λ/4) to about (10λ).

A first EM-coupling region 362 a can be established at a first EM-coupling distance 376 a from the lower resonator wall 383 defining the third EM-energy tuning space 385, and the first EM-tuning portion 375 a can extend into the first EM-coupling region 362 a. The first EM-tuning portion 375 a can obtain first tunable microwave energy from the first EM-coupling region 362 a, and the first microwave energy can be transferred as first plasma-tuning energy to the process space 315 at the first location (x_(2a)) using the first plasma-tuning portion 370 a. The first EM-coupling region 362 a can include a tunable E-field region, a tunable H-field region, a maximum field region, a maximum voltage region, maximum energy region, or a maximum current region, or any combination thereof. For example, the first EM-coupling distance 376 a can vary from about 0.01 mm to about 10 mm, and the first EM-coupling distance 376 a can be wavelength-dependent and can vary from about (λ/4) to about (10λ).

A first plasma-tuning slab 361 a can be coupled to a first control assembly 360 a and can be used to move 363 a the first plasma-tuning slab 361 a a first EM-tuning distance 377 a relative to the first EM-tuning portion 375 a of the first plasma-tuning rod (370 a, 375 a) within the third EM-energy tuning space 385. The first control assembly 360 a and the first plasma-tuning slab 361 a can be used to optimize the microwave energy coupled from the first EM-coupling region 362 a to the first EM-tuning portion 375 a of the first plasma-tuning rod (370 a, 375 a). For example, the first EM-tuning distance 377 a can be established between the first EM-tuning portion 375 a and the first plasma-tuning slab 361 a within the third EM-energy tuning space 385, and the first EM-tuning distance 377 a can vary from about 0.01 mm to about 1 mm.

The first plasma-tuning rod (370 a, 375 a) can have a first diameter (d_(1a)) associated therewith, and the first diameter (d_(1a)) can vary from about 0.01 mm to about 1 mm. The first isolation assembly 364 a can have a first diameter (D_(1a)) associated therewith, and the first diameter (D_(1a)) can vary from about 1 mm to about 10 mm.

The first EM-tuning portion 375 a, the first EM-coupling region 362 a, the first control assembly 360 a, and the first plasma-tuning slab 361 a can have a first x/y plane offset (x_(1a)) associated therewith. For example, the first x/y plane offset (x_(1a)) can be established relative to the resonator wall 382 b, can be wavelength-dependent, and can vary from about (λ/4) to about (10λ). The first control assembly 360 a can have a cylindrical configuration and a diameter (d_(2a)) that can vary from about 1 mm to about 5 mm. The first plasma-tuning slab 361 a can have diameters (D_(2a)) associated therewith, and the diameter (D_(2a)) can vary from about 1 mm to about 10 mm.

A second plasma-tuning rod (370 b, 375 b) can have a second plasma-tuning portion 370 b that can extend into the second isolated protection space 373 b established in the second protection assembly 372 b at a second location (x_(2b)) in the process space 315, and a second EM-tuning portion 375 b that can extend into the third EM-energy tuning space 385 at a second location (x_(1b)). A second isolation assembly 364 b can be used to position (extend) the second plasma-tuning portion 370 b second plasma-tuning distances 371 b within the third isolated protection space 373 c established in the third protection assembly 372 c. For example, the second plasma-tuning distances 371 b can vary from about 10 mm to about 400 mm, and the second plasma-tuning distances 371 b can be wavelength-dependent and can vary from about (λ/4) to about (10λ).

A second EM-coupling region 362 b can be established at second EM-coupling distances 376 b from the lower resonator wall 383 defining the third EM-energy tuning space 385, and the second EM-tuning portion 375 b can extend into the second EM-coupling region 362 b. The second EM-tuning portion 375 b can obtain second tunable microwave energy from the second EM-coupling region 362 b, and the second microwave energy can be transferred as second plasma-tuning energy to the process space 315 at the second location (x_(2b)) using the second plasma-tuning portion 370 b. The second EM-coupling region 362 b can include a tunable E-field region, a tunable H-field region, a maximum field region, a maximum voltage region, maximum energy region, or a maximum current region, or any combination thereof. For example, the second EM-coupling distance 376 b can vary from about 0.01 mm to about 10 mm, and the second EM-coupling distance 376 b can be wavelength-dependent and can vary from about (λ/4) to about (10λ).

A second plasma-tuning slab 361 b can be coupled to a second control assembly 360 b and can be used to move 363 b the second plasma-tuning slab 361 b second EM-tuning distances 377 b relative to the second EM-tuning portion 375 b of the second plasma-tuning rod (370 b, 375 b) within the third EM-energy tuning space 385. The second control assembly 360 b and the second plasma-tuning slab 361 b can be used to optimize the microwave energy coupled from the second EM-coupling region 362 b to the second EM-tuning portion 375 b of the second plasma-tuning rod (370 b, 375 b). For example, the second EM-tuning distances 377 b can be established between the second EM-tuning portion 375 b and the second plasma-tuning slab 361 b within the third EM-energy tuning space 385, and the second EM-tuning distances 377 b can vary from about 0.01 mm to about 1 mm.

The second plasma-tuning rod (370 b, 375 b) can have second diameters (d_(1b)) associated therewith, and the second diameters (d_(1b)) can vary from about 0.01 mm to about 1 mm. The second isolation assembly 364 b can have second diameters (D_(1b)) associated therewith, and the second diameters (D_(1b)) can vary from about 1 mm to about 10 mm.

The second EM-tuning portion 375 b, the second EM-coupling region 362 b, the second control assembly 360 b, and the second plasma-tuning slab 361 b can have second x/y plane offsets (x_(1b)) associated therewith. For example, the second x/y plane offsets (x_(1b)) can be established relative to the resonator wall 382 b and can be wavelength-dependent and can vary from about (λ/4) to about (10λ). The second control assembly 360 b can have a cylindrical configuration and second diameters (d_(2b)) that can vary from about 1 mm to about 5 mm. The second plasma-tuning slab 361 b can have diameters (D_(2b)) associated therewith, and the diameters (D_(2b)) can vary from about 1 mm to about 10 mm.

A third plasma-tuning rod (370 c, 375 c) can have a third plasma-tuning portion 370 c that can extend into the third isolated protection space 373 c established in the third protection assembly 372 c at a third location (x_(2c)) in the process space 315, and a third EM-tuning portion 375 c that can extend into the third EM-energy tuning space 385 at a third location (x_(1c)). A third isolation assembly 364 c can be used to position (extend) the third plasma-tuning portion 370 c third plasma-tuning distances 371 c within the third isolated protection space 373 c established in the third protection assembly 372 c. For example, the third plasma-tuning distances 371 c can vary from about 10 mm to about 400 mm, and the third plasma-tuning distances 371 c can be wavelength-dependent and can vary from about (λ/4) to about (10λ).

A third EM-coupling region 362 c can be established at third EM-coupling distances 376 c from the lower resonator wall 383 defining the third EM-energy tuning space 385, and the third EM-tuning portion 375 c can extend into the third EM-coupling region 362 c. The third EM-tuning portion 375 c can obtain third tunable microwave energy from the third EM-coupling region 362 c, and the third microwave energy can be transferred as third plasma-tuning energy to the process space 315 at the third location (x_(2c)) using the third plasma-tuning portion 370 c. The third EM-coupling region 362 c can include a tunable E-field region, a tunable H-field region, a maximum field region, a maximum voltage region, maximum energy region, or a maximum current region, or any combination thereof. For example, the third EM-coupling distance 376 c can vary from about 0.01 mm to about 10 mm, and the third EM-coupling distance 376 c can be wavelength-dependent and can vary from about (λ/4) to about (10λ).

A third plasma-tuning slab 361 c can be coupled to a third control assembly 360 c and can be used to move 363 c the third plasma-tuning slab 361 c third EM-tuning distances 377 c relative to the third EM-tuning portion 375 c of the third plasma-tuning rod (370 c, 375 c) within the third EM-energy tuning space 385. The third control assembly 360 c and the third plasma-tuning slab 361 c can be used to optimize the microwave energy coupled from the third EM-coupling region 362 c to the third EM-tuning portion 375 b of the third plasma-tuning rod (370 c, 375 c). For example, the third EM-tuning distances 377 c can be established between the third EM-tuning portion 375 c and the third plasma-tuning slab 361 c within the third EM-energy tuning space 385, and the third EM-tuning distances 377 c can vary from about 0.01 mm to about 1 mm.

The third plasma-tuning rod (370 c, 375 c) can have third diameters (d_(1c)) associated therewith, and the third diameters (d_(1c)) can vary from about 0.01 mm to about 1 mm. The third isolation assembly 364 c can have third diameters (D_(1c)) associated therewith, and the third diameters (D_(1c)) can vary from about 1 mm to about 10 mm.

The third EM-tuning portion 375 c, the third EM-coupling region 362 c, the third control assembly 360 c, and the third plasma-tuning slab 361 c can have third x/y plane offsets (x_(1c)) associated therewith. For example, the third x/y plane offsets (x_(1c)) can be established relative to the resonator wall 382 b and can be wavelength-dependent and can vary from about (λ/4) to about (10λ). The third control assembly 360 c can have a cylindrical configuration and third diameters (d_(2c)) that can vary from about 1 mm to about 5 mm. The third plasma-tuning slab 361 c can have third diameters (D_(2c)) associated therewith, and the third diameters (D_(2c)) can vary from about 1 mm to about 10 mm.

The control assemblies (360 a, 360 b, and 360 c) can be coupled 396 to the controller 395, and the controller 395 can use process recipes to establish, control, and optimize the EM-tuning distances (377 a, 377 b, and 377 c) to control the EM-coupling regions (362 a, 362 b, and 362 c) in the EM-energy tuning space 385 and the plasma uniformity within the process space 315. The controller 395 can be coupled to the microwave source 350, the matching network 352, and the coupling network 354, and the controller 395 can use process recipes to establish, control, and optimize the microwave source 350, the matching network 352, and the coupling network 354 to control the EM-coupling regions (362 a, 362 b, and 362 c) in the EM-energy tuning space 385 and the plasma uniformity within the process space 315. For example, the microwave source 350 can operate at frequencies from about 500 MHz to about 5000 MHz. In addition, the controller 395 can be coupled to the resonator sensors 306 and process sensors 307, and the controller 395 can use process recipes to establish, control, and optimize the data from the resonator sensors 306 and the process sensors 307 to control the EM-coupling regions (362 a, 362 b, and 362 c) in the EM-energy tuning space 385 and the plasma uniformity within the process space 315.

The front view of the third microwave resonator system 300 includes an x/y plane view of a cavity-control assembly 355 that is shown coupled to a front view of a cavity-tuning slab 356. The cavity-control assembly 355 can have a first diameter (d_(1aa)) associated therewith, and the first diameter (d_(1aa)) can vary from about 0.01 mm to about 1 mm. The cavity-tuning slab 356 can have a second diameter (D_(1aa)) associated therewith, and the second diameter (D_(1aa)) can vary from about 1 mm to about 10 mm. The cavity-control assembly 355 and the cavity-tuning slab 356 can have a first x/y plane offset (y_(1aa)) associated therewith, and the first x/y plane offset (y_(1aa)) can vary from about 1 mm to about 10 mm.

The cavity-control assembly 355 can be used to move 357 the cavity-tuning slab 356 cavity-tuning distances 358 within the third EM-energy tuning space 385. The controller 395 can be coupled to the cavity-control assembly 355, and the controller 395 can use process recipes to establish, control, and optimize the cavity-tuning distances 358 to control and maintain the plasma uniformity within the process space 315 in real-time. For example, the cavity-tuning distances 358 can vary from about 0.01 mm to about 10 mm, and the cavity-tuning distances 358 can be wavelength-dependent and can vary from about (λ/16) to about (10λ).

Still referring to FIG. 3A, a substrate holder 320, and a lower electrode 321 are shown. When present, the lower electrode 321 can be used to couple Radio Frequency (RF) power to plasma in process space 315. For example, lower electrode 321 can be electrically biased at an RF voltage via the transmission of RF power from RF generator 330 through impedance match network 331 and RF sensor 335 to lower electrode 321. The RF bias can serve to heat electrons to form and/or maintain the plasma. A typical frequency for the RF bias can range from 1 MHz to 100 MHz and is preferably 13.56 MHz. Alternatively, RF power may be applied to the lower electrode 321 at multiple frequencies. Furthermore, impedance match network 331 can serve to maximize the transfer of RF power to the plasma in process chamber 310 by minimizing the reflected power. Various match network topologies and automatic control methods can be utilized. The RF sensor 335 can measure the power levels and/or frequencies associated with the fundamental signals, harmonic signals, and/or intermodulation signals. In addition, the controller 395 can be coupled 396 to the RF generator 330, the impedance match network 331, and the RF sensor 335, and the controller 395 can use process recipes to establish, control, and optimize the data to and from the RF generator 330, the impedance match network 331, and the RF sensor 335 to control the EM-coupling regions (362 a, 362 b, and 362 c) in the EM-energy tuning space 385 and the plasma uniformity within the process space 315.

Some of the third microwave resonator systems 300 can include a pressure control system 390 and exhaust port 391 coupled to the process chamber 310, and configured to evacuate the process chamber 310, as well as control the pressure within the process chamber 310. Alternatively, the pressure control system 390 and/or the exhaust port 391 may not be required.

As shown in FIG. 3A, the third microwave resonator systems 300 can comprise a first gas supply system 340 coupled to a first supply element 341, and the first supply element 341 can be one or more flow elements 342 that can be coupled to the process chamber 310. The flow elements 342 can be configured to introduce a first process gas to process space 315, and can include flow control and/or flow measuring devices. In addition, the third microwave resonator systems 300 can comprise a second gas supply system 345 coupled to a second supply element 346, and the second supply element 346 can be one or more second flow elements 347 that can be coupled to the process chamber 310. The second flow elements 347 can be configured to introduce a second process gas to process space 315, and can include flow control and/or flow measuring devices. Alternatively, the second gas supply system 345, the second supply element 346, and/or the second flow elements 347 may not be required.

During dry plasma etching, the process gas may comprise an etchant, a passivant, or an inert gas, or a combination of two or more thereof. For example, when plasma etching a dielectric film such as silicon oxide (SiO_(x)) or silicon nitride (Si_(x)N_(y)), the plasma etch gas composition generally includes a fluorocarbon-based chemistry (C_(x)F_(y)) such as at least one of C₄F₈, C₅F₈, C₃F₆, C₄F₆, CF₄, etc., and/or may include a fluorohydrocarbon-based chemistry (C_(x)H_(y)F_(z)) such as at least one of CHF₃, CH₂F₂, etc., and can have at least one of an inert gas, oxygen, CO or CO₂. Additionally, for example, when etching polycrystalline silicon (polysilicon), the plasma etch gas composition generally includes a halogen-containing gas such as HBr, Cl₂, NF₃, or SF₆ or a combination of two or more thereof, and may include fluorohydrocarbon-based chemistry (C_(x)H_(y)F_(z)) such as at least one of CHF₃, CH₂F₂, etc., and at least one of an inert gas, oxygen, CO or CO₂, or two or more thereof. During plasma-enhanced deposition, the process gas may comprise a film forming precursor, a reduction gas, or an inert gas, or a combination of two or more thereof.

FIG. 3B illustrates a top view of a third resonator assembly in accordance with embodiments of the invention. The third resonator assembly 381 can have a total length (x_(T1)) and a total height (z_(T1)) associated therewith in the x/z plane. For example, the total length (x_(T1)) can vary from about 10 mm to about 500 mm, and the total height (z_(T1)) can vary from about 10 mm to about 1000 mm.

The top view of third resonator subsystem 380 includes an x/z plane view of a first control assembly 360 a that is shown surrounded by a top (dash line) view of a first plasma-tuning slab 361 a. The first control assembly 360 a can have a first diameter (d_(2a)) associated therewith, and the first diameter (d_(2a)) can vary from about 0.01 mm to about 1 mm. The first plasma-tuning slab 361 a can have a second diameter (D_(2a)) associated therewith, and the second diameter (D_(2a)) can vary from about 1 mm to about 10 mm. The first control assembly 360 a and the first plasma-tuning slab 361 a can have first x/z plane offsets (x_(1a)) associated therewith, and the first x/z plane offsets (x_(1a)) can vary from about 1 mm to about 10 mm. Alternatively, the first control assembly 360 a and the first plasma-tuning slab 361 a may have different first x/z plane offsets (x_(1a)) associated therewith. The first control assembly 360 a and the first plasma-tuning slab 361 a can have first x/z plane offsets (z_(1a)) associated therewith, and the first x/z plane offsets (z_(1a)) can vary from about 1 mm to about 10 mm. Alternatively, the first control assembly 360 a and the first plasma-tuning slab 361 a may have different first x/z plane offsets (z_(1a)) associated therewith.

In addition, the top view of third resonator subsystem 380 includes an x/z plane view of a second control assembly 360 b that is shown surrounded by a top (dash line) view of a second plasma-tuning slab 361 b. The second control assembly 360 b can have a first diameter (d_(2b)) associated therewith, and the first diameter (d_(2b)) can vary from about 0.01 mm to about 1 mm. The second plasma-tuning slab 361 b can have a second diameter (D_(2b)) associated therewith, and the second diameter (D_(2b)) can vary from about 1 mm to about 10 mm. The second control assembly 360 b and the second plasma-tuning slab 361 b can have second x/z plane offsets (x_(1b)) associated therewith, and the second x/z plane offsets (x_(1b)) can vary from about 1 mm to about 10 mm. Alternatively, the second control assembly 360 b and the second plasma-tuning slab 361 b may have different second x/z plane offsets (x_(1b)) associated therewith. The second control assembly 360 b and the second plasma-tuning slab 361 b can have second x/z plane offsets (z_(1b)) associated therewith, and the second x/z plane offsets (z_(1b)) can vary from about 1 mm to about 10 mm. Alternatively, the second control assembly 360 b and the second plasma-tuning slab 361 b may have different second x/z plane offsets (z_(1a)) associated therewith.

Furthermore, the top view of third resonator subsystem 380 includes a x/z plane view of a third control assembly 360 c that is shown surrounded by a top (dash line) view of a third plasma-tuning slab 361 c. The third control assembly 360 c can have a first diameter (d_(2c)) associated therewith, and the first diameter (d_(2c)) can vary from about 0.01 mm to about 1 mm. The third plasma-tuning slab 361 c can have a second diameter (D_(2c)) associated therewith, and the third diameter (D_(2c)) can vary from about 1 mm to about 10 mm. The third control assembly 360 c and the third plasma-tuning slab 361 c can have third x/z plane offsets (x_(1c)) associated therewith, and the third x/z plane offsets (x_(1c)) can vary from about 1 mm to about 10 mm. Alternatively, the third control assembly 360 c and the third plasma-tuning slab 361 c may have different third x/z plane offsets (x_(1c)) associated therewith. The third control assembly 360 c and the third plasma-tuning slab 361 c can have third x/z plane offsets (z_(1c)) associated therewith, and the third x/z plane offsets (z_(1b)) can vary from about 1 mm to about 10 mm. Alternatively, the third control assembly 360 c and the third plasma-tuning slab 361 c may have different third x/z plane offsets (z_(1a)) associated therewith.

FIG. 3B shows top views of resonator walls (382 a, 382 b, 383, and 384). The resonator wall 382 a can have wall thicknesses (t_(a)) associated therewith, and the wall thicknesses (t_(a)) can vary from about 1 mm to about 5 mm. The resonator wall 382 b can have wall thicknesses (t_(b)) associated therewith, and the wall thicknesses (t_(b)) can vary from about 1 mm to about 5 mm. The resonator walls (382 a and 382 b) can have wall thicknesses (t) associated therewith, and the wall thicknesses (t) can vary from about 1 mm to about 5 mm.

The top view of the third microwave resonator system 300 includes an x/z plane view of a cavity-control assembly 355 and an x/z plane view of a cavity-tuning slab 356. The cavity-control assembly 355 can have a first diameter (d_(1aa)) associated therewith, and the first diameter (d_(1aa)) can vary from about 0.01 mm to about 1 mm. The cavity-tuning slab 356 can have a second diameter (D_(1aa)) associated therewith, and the second diameter (D_(1aa)) can vary from about 1 mm to about 10 mm. The cavity-control assembly 355 and the cavity-tuning slab 356 can have a first x/z plane offset (z_(1aa)) associated therewith, and the first x/z plane offset (z_(1aa)) can vary from about 1 mm to about 10 mm.

FIG. 3C illustrates a side view of the third microwave resonator system 300. The side view shows a y/z plane view of a process chamber 310 that can be configured using a first interface assembly 365 a, a plurality of chamber walls 312 coupled to the first interface assembly 312 a, and a process space 315 can be configured within the process chamber 310. For example, the chamber walls 312 can have wall thicknesses (t) associated therewith, and the wall thicknesses (t) can vary from about 1 mm to about 5 mm. The first interface assembly 312 a can have a first interface thickness (t_(i1)) associated therewith, and the first interface thickness (t_(i1)) can vary from about 1 mm to about 10 mm.

The side view shows a y/z plane view of a third resonator subsystem 380 that can comprise a third resonator assembly 381 that can be configured using a plurality of resonator walls (382 a, 382 b, 383, and 384). For example, the resonator walls (382 a, 382 b, 383, and 384) can include dielectric material such as quartz and can define a third EM-energy tuning space 385 therein. In addition, one or more resonator sensors 306 can be coupled to the third EM-energy tuning space 385 to obtain first resonator data.

The resonator walls 382 a can have wall thicknesses (t_(a)) associated therewith, and the wall thicknesses (t_(a)) can vary from about 1 mm to about 5 mm. The resonator walls 382 b can have wall thicknesses (t_(b)) associated therewith, and the wall thicknesses (t_(b)) can vary from about 1 mm to about 5 mm. The resonator walls 383 can have wall thicknesses (t) associated therewith, and the wall thicknesses (t) can vary from about 1 mm to about 5 mm.

In some examples, the first interface assembly 365 a can be used to removably couple the third resonator assembly 381 to the process chamber 310. The first interface assembly 365 a can have first interface thicknesses (t_(i1)) associated therewith, and the first interface thicknesses (t_(i1)) can vary from about 1 mm to about 10 mm. Alternatively, the first interface assembly 365 a may not be required or may be configured differently. A first interface assembly 365 a can comprise one or more isolation assemblies (364 a, 364 b, and 364 c). Each of the isolation assemblies (364 a, 364 b, and 364 c) can be removably coupled to a lower resonator wall 383 and removably coupled to one or more of the first interface assembly 365 a.

In addition, a second interface assembly 365 b can be coupled to the third resonator assembly 381 using an upper resonator wall 384. The second interface assembly 365 b can have second interface thicknesses (t_(i2)) associated therewith, and the second interface thicknesses (t_(i2)) can vary from about 1 mm to about 10 mm. Alternatively, the second interface assembly 365 b may not be required or may be configured differently. The second interface assembly 365 b can comprise one or more control assemblies (360 a, 360 b, and 360 c). Each of the control assemblies (360 a, 360 b, and 360 c) can be removably coupled to the upper resonator wall 384 and removably coupled to the second interface assembly 365 b.

The third microwave resonator system 300 can be configured to form plasma in the process space 315 as the substrate holder 320 and the substrate are moved through the process space 315. The third microwave resonator system 300 can be configured to process 200 mm substrates, 300 mm substrates, or larger-sized substrates. In addition, square and/or rectangular chambers can be configured so that the third microwave resonator system 300 may be configured to process square or rectangular substrates, wafers, or LCDs regardless of their size, as would be appreciated by those skilled in the art. Therefore, while aspects of the invention will be described in connection with the processing of a semiconductor substrate, the invention is not limited solely thereto.

In other embodiments, the third resonator subsystem 380 can comprise a plurality of resonant cavities (not shown) therein. In some other embodiments, the third resonator subsystem 380 can comprise a plurality of resonator subsystems having one or more resonant cavities therein. In various systems, the third resonator assembly 381 and the third EM-energy tuning space 385 can have cylindrical shapes, rectangular shapes, or squares shapes.

In FIG. 3C, a side view of third microwave resonator system 300 is shown. The microwave source 350 can be coupled to a matching network 352, and the matching network 352 can be coupled to a coupling network 354. Alternatively, a plurality of matching networks (not shown) or a plurality of coupling networks (not shown) may be coupled to the third resonator subsystem 380. The coupling network 354 can be removably coupled to an upper resonator wall 384 of the third resonator assembly 381 and can be used to provide microwave energy to the third EM-energy tuning space 385. Alternatively, other coupling configurations may be used.

The side view includes a y/z plane view of a first set of plasma-tuning rods {(370 a, 375 a), (370 b, 375 b), and (370 c, 375 c)} that can have a first set of plasma-tuning portions (370 a, 370 b, and 370 c) that can extend into first set of isolated protection spaces (373 a, 373 b, and 373 c) established in the first set of protection assemblies (372 a, 372 b, and 372 c) at first y/z plane locations (z_(2a-c)) in the process space 315, and a first set of EM-tuning portions (375 a, 375 b, and 375 c) that can extend into the third EM-energy tuning space 385 at second y/z plane locations (z_(1a-c)). A first set of isolation assemblies (364 a, 364 b, and 364 c) can be used to position (extend) the first set of plasma-tuning portions (370 a, 370 b, and 370 c) first set of plasma-tuning distances (371 a, 371 b, and 371 c) within the process space 315 at the first locations defined using (z_(2a-c)). For example, the first set of plasma-tuning distances (371 a, 371 b, and 371 c) can vary from about 10 mm to about 400 mm, and the first set of plasma-tuning distances (371 a, 371 b, and 371 c) can be wavelength-dependent and can vary from about (λ/4) to about (10λ).

A first set of EM-coupling regions (362 a, 362 b, and 362 c) can be established at the EM-coupling distances (376 a, 376 b, and 376 c) from the lower resonator wall 383 defining the third EM-energy tuning space 385, and the first set of EM-tuning portions (375 a, 375 b, and 375 c) can extend into the first set of EM-coupling regions (362 a, 362 b, and 362 c). The first set of EM-tuning portions (375 a, 375 b, and 375 c) can obtain tunable microwave energies from the first set of EM-coupling regions (362 a, 362 b, and 362 c), and the tunable microwave energies can be transferred as controllable plasma-tuning energies to the process space 315 at the first y/z plane locations (z_(2a-c)) using the first set of plasma-tuning portions (370 a, 370 b, and 370 c). The first set of EM-coupling regions (362 a, 362 b, and 362 c) can include a tunable E-field region, a tunable H-field region, a maximum field region, a maximum voltage region, maximum energy region, or a maximum current region, or any combination thereof. For example, the EM-coupling distances (376 a, 376 b, and 376 c) can vary from about 0.01 mm to about 10 mm, and the EM-coupling distances (376 a, 376 b, and 376 c) can be wavelength-dependent and can vary from about (λ/4) to about (10λ).

A first set of plasma-tuning slabs (361 a, 361 b, and 361 c) can be coupled to a first set of control assemblies (360 a, 360 b, and 360 c) and can be used to move (363 a, 363 b, and 363 c) the first set of plasma-tuning slabs (361 a, 361 b, and 361 c) first EM-tuning distances (377 a, 377 b, and 377 c) relative to the first set of EM-tuning portions (375 a, 375 b, and 375 c) of the first set of plasma-tuning rod {(370 a, 375 a), (370 b, 375 b), and (370 c, 375 c)} within the third EM-energy tuning space 385. The first set of control assemblies (360 a, 360 b, and 360 c) and the first set of plasma-tuning slabs (361 a, 361 b, and 361 c) can be used to optimize the microwave energies coupled from the first set of EM-coupling regions (362 a, 362 b, and 362 c) to the first set of EM-tuning portions (375 a, 375 b, and 375 c) of the first set of plasma-tuning rod {(370 a, 375 a), (370 b, 375 b), and (370 c, 375 c)}. For example, the first EM-tuning distances (377 a, 377 b, and 377 c) can be established between the first set of EM-tuning portions (375 a, 375 b, and 375 c) and the first set of plasma-tuning slabs (361 a, 361 b, and 361 c) within the third EM-energy tuning space 385, and the first EM-tuning distances (377 a, 377 b, and 377 c) can vary from about 0.01 mm to about 1 mm.

A first set of protection assemblies (372 a, 372 b, and 372 c) can be coupled to the first set of isolation assemblies (364 a, 364 b, and 364 c), and the first set of protection assemblies (372 a, 372 b, and 372 c) can be configured at first locations (z_(2a-c)) within the process space 315. The set of protection assemblies (372 a, 372 b, and 372 c) can have first sets of isolated protection spaces (373 a, 373 b, and 373 c) therein and can have insertion lengths (374 a, 374 b, and 374 c) associated therewith. For example, the insertion lengths (374 a, 374 b, and 374 c) can vary from about 1 mm to about 10 mm in the y/z plane, and the protection assemblies (372 a, 372 b, and 372 c) can be constructed using one or more dielectric materials.

The first set of plasma-tuning rod {(370 a, 375 a), (370 b, 375 b), and (370 c, 375 c)} can comprise dielectric material and can have first diameter (d_(1a)) associated therewith, and the first diameters (d_(1a)) can vary from about 0.01 mm to about 1 mm. The first set of isolation assemblies (364 a, 364 b, and 364 c) and the first set of protection assemblies (372 a, 372 b, and 372 c) can comprise dielectric material, can have first diameters (D_(1a)) associated therewith, and the first diameters (D_(1a)) can vary from about 1 mm to about 10 mm. Alternatively, the isolation assemblies (364 a, 364 b, and 364 c) and the first set of protection assemblies (372 a, 372 b, and 372 c) can have different diameters associated therewith.

The first set of EM-tuning portions (375 a, 375 b, and 375 c), the first set of EM-coupling regions (362 a, 362 b, and 362 c), the first set of control assemblies (360 a, 360 b, and 360 c), and the first set of plasma-tuning slabs (361 a, 361 b, and 361 c) can have y/z plane offsets (z_(1a-c)) associated therewith. For example, the y/z plane offsets (z_(1a-c)) can be established relative to the lower resonator wall 383 and can be wavelength-dependent and can vary from about (λ/4) to about (10λ). The first set of control assemblies (360 a, 360 b, and 360 c) can comprise dielectric material, can have cylindrical configurations and diameter (d_(2a-c)) that can vary from about 1 mm to about 5 mm. The first set of plasma-tuning slabs (361 a, 361 b, and 361 c) can comprise dielectric material, can have diameters (D_(2a-c)) associated therewith, and the diameters (D_(2a-c)) can vary from about 1 mm to about 10 mm.

As shown in FIG. 3C, the control assemblies (360 a, 360 b, and 360 c) can be coupled 396 to the controller 395, and the controller 395 can use process recipes to establish, control, and optimize the EM-tuning distances (377 a, 377 b, and 377 c) to control the EM-coupling regions (362 a, 362 b, and 362 c) in the EM-energy tuning space 385 and the plasma uniformity within the process space 315. The controller 395 can be coupled to the microwave source 350, the matching network 352, and the coupling network 354, and the controller 395 can use process recipes to establish, control, and optimize the microwave source 350, the matching network 352, and the coupling network 354 to control the plasma uniformity within the process space 315. For example, the microwave source 350 can operate at frequencies from about 500 MHz to about 5000 MHz. In addition, the controller 395 can be coupled to the resonator sensors 306 and process sensors 307, and the controller 395 can use process recipes to establish, control, and optimize the data from the resonator sensors 306 and the process sensors 307 to control the EM-coupling regions (362 a, 362 b, and 362 c) in the EM-energy tuning space 385 and the plasma uniformity within the process space 315.

The side view of the third microwave resonator system 300 includes a y/z plane view of a cavity-control assembly 355 that is shown coupled to a side view of a cavity-tuning slab 356. The cavity-control assembly 355 can have a first diameter (d_(1aa)) associated therewith, and the first diameter (d_(1aa)) can vary from about 0.01 mm to about 1 mm. The cavity-tuning slab 356 can have a second diameter (D_(1aa)) associated therewith, and the second diameter (D_(1aa)) can vary from about 1 mm to about 10 mm. The cavity-control assembly 355 and the cavity-tuning slab 356 can have first y/z plane offsets (y_(1aa)) associated therewith, and the first y/z plane offsets (y_(1aa)) can vary from about 1 mm to about 10 mm.

Still referring to FIG. 3C, side views of the substrate holder 320 and the lower electrode 321 are shown. When present, the lower electrode 321 can be used to couple Radio Frequency (RF) power to plasma in process space 315. For example, lower electrode 321 can be electrically biased at an RF voltage via the transmission of RF power from RF generator 330 through impedance match network 331 and RF sensor 335 to lower electrode 321. The RF bias can serve to heat electrons to form and/or maintain the plasma. A typical frequency for the RF bias can range from 1 MHz to 100 MHz and is preferably 13.56 MHz. Alternatively, RF power may be applied to the lower electrode 321 at multiple frequencies. Furthermore, impedance match network 331 can serve to maximize the transfer of RF power to the plasma in process chamber 310 by minimizing the reflected power. Various match network topologies and automatic control methods can be utilized. The RF sensor 335 can measure the power levels and/or frequencies associated with the fundamental signals, harmonic signals, and/or intermodulation signals. In addition, the controller 395 can be coupled 396 to the RF generator 330, the impedance match network 331, and the RF sensor 335, and the controller 395 can use process recipes to establish, control, and optimize the data to and from the RF generator 330, the impedance match network 331, and the RF sensor 335 to control the EM-coupling regions (362 a, 362 b, and 362 c) in the EM-energy tuning space 385 and the plasma uniformity within the process space 315.

The side view of the third microwave resonator system 300 can include a y/z plane view of a pressure control system 390 and exhaust port 391 coupled to the process chamber 310, and configured to evacuate the process chamber 310, as well as control the pressure within the process chamber 310. Alternatively, the pressure control system 390 and/or the exhaust port 391 may not be required.

As shown in FIG. 3C, the side view can include y/z plane views of the first gas supply system 340, the first supply element 341, the first flow elements 342, and the process chamber 310. The first flow elements 342 can be configured around the process space 315, and can be configured to introduce a first process gas to process space 315. In addition, the side view can include y/z plane views of the second gas supply system 345, the second supply element 346, and the second flow elements 347. The second flow elements 347 can be configured around the process space 315, and can be configured to introduce a second process gas to process space 315.

During dry plasma etching, the process gas may comprise an etchant, a passivant, or an inert gas, or a combination of two or more thereof. For example, when plasma etching a dielectric film such as silicon oxide (SiO_(x)) or silicon nitride (Si_(x)N_(y)), the plasma etch gas composition generally includes a fluorocarbon-based chemistry (C_(x)F_(y)) such as at least one of C₄F₈, C₅F₈, C₃F₆, C₄F₆, CF₄, etc., and/or may include a fluorohydrocarbon-based chemistry (C_(x)H_(y)F_(z)) such as at least one of CHF₃, CH₂F₂, etc., and can have at least one of an inert gas, oxygen, CO or CO₂. Additionally, for example, when etching polycrystalline silicon (polysilicon), the plasma etch gas composition generally includes a halogen-containing gas such as HBr, Cl₂, NF₃, or SF₆ or a combination of two or more thereof, and may include fluorohydrocarbon-based chemistry (C_(x)H_(y)F_(z)) such as at least one of CHF₃, CH₂F₂, etc., and at least one of an inert gas, oxygen, CO or CO₂, or two or more thereof. During plasma-enhanced deposition, the process gas may comprise a film forming precursor, a reduction gas, or an inert gas, or a combination of two or more thereof.

FIG. 4A illustrates a fourth microwave resonator system 400 according to embodiments of the invention. The fourth microwave resonator system 400 may be used in a dry plasma etching system or a plasma enhanced deposition system. The fourth microwave resonator system 400 can include a fourth resonator subsystem 480 that can be coupled to a process chamber 410. Alternatively, the fourth microwave resonator system 400 may be configured differently.

FIG. 4A shows a front view of the fourth microwave resonator system 400. The front view shows an x/y plane view of a process chamber 410 that can be configured using a first interface assembly 465 a, a plurality of chamber walls 412 coupled to the first interface assembly 465 a, and a process space 415 can be configured within the process chamber 410. For example, the chamber walls 412 can have wall thicknesses (t) associated therewith, and the wall thicknesses (t) can vary from about 1 mm to about 5 mm. The first interface assembly 465 a can have a first interface thickness (t_(i1)) associated therewith, and the first interface thickness (t_(i1)) can vary from about 1 mm to about 10 mm.

The front view shows an x/y plane view of a fourth resonator subsystem 480 that can comprise a third resonator assembly 481 having a plurality of resonator walls (482 a, 482 b, 483, and 484) defining a fourth EM-energy tuning space 485 therein. For example, the resonator walls (482 a, 482 b, 483, and 484) can include dielectric material such as quartz. In addition, one or more resonator sensors 406 can be coupled to the fourth EM-energy tuning space 485 to obtain first resonator data.

The resonator walls 482 a can have wall thicknesses (t_(a)) associated therewith, and the wall thicknesses (t_(a)) can vary from about 1 mm to about 5 mm. The resonator walls 482 b can have wall thicknesses (t_(b)) associated therewith, and the wall thicknesses (t_(b)) can vary from about 1 mm to about 5 mm. The resonator walls 482 can have wall thicknesses (t) associated therewith, and the wall thicknesses (t) can vary from about 1 mm to about 5 mm.

In some examples, the first interface assembly 465 a can be used to removably couple the fourth resonator assembly 481 to the process chamber 410. The first interface assembly 465 a can have first interface thicknesses (t_(i1)) associated therewith, and the first interface thicknesses (t_(i1)) can vary from about 1 mm to about 10 mm. Alternatively, the first interface assembly 465 a may not be required or may be configured differently.

A first interface assembly 465 a can comprise one or more isolation assemblies (464 a and 464 b). Each of the isolation assemblies (464 a and 464 b) can be removably coupled to a lower resonator wall 483 and removably coupled to the first interface assembly 465 a. A first protection assembly 472 a can be coupled to the first isolation assembly 464 a, and the first protection assembly 472 a can be configured at a first location (x_(2a)) within the process space 415. The first protection assembly 472 a can have a first isolated protection space 473 a therein and can have a first insertion length 474 a associated therewith. A second protection assembly 472 b can be coupled to the second isolation assembly 464 b, and the second protection assembly 472 b can be configured at a second location (x_(2b)) within the process space 415. The second protection assembly 472 b can have a second isolated protection space 473 b therein and can have a second insertion length 474 b associated therewith. For example, the insertion lengths (474 a and 474 b) can vary from about 1 mm to about 10 mm in the x/y plane, and the first set of protection assemblies (472 a and 472 b) can be constructed using one or more dielectric materials.

A third protection assembly 472 c can be coupled to the third isolation assembly 464 c, and the third protection assembly 472 c can be configured at a third location (y_(2c)) within the process space 415. The third protection assembly 472 c can have a third isolated protection space 473 c therein and can have a third insertion length 474 c associated therewith. A fourth protection assembly 472 d can be coupled to the fourth isolation assembly 464 d, and the fourth protection assembly 472 d can be configured at a fourth location (y_(2d)) within the process space 415. The fourth protection assembly 472 d can have a fourth isolated protection space 473 d therein and can have a fourth insertion length 474 d associated therewith. For example, the insertion lengths (474 c and 474 d) can vary from about 1 mm to about 10 mm in the x/y plane, and the second set of protection assemblies (472 c and 472 d) can be constructed using one or more dielectric materials.

In addition, a second interface assembly 465 b can be coupled to the fourth resonator assembly 481 using an upper resonator wall 484. The second interface assembly 465 b can have second interface thicknesses (t_(i2)) associated therewith, and the second interface thicknesses (t_(i2)) can vary from about 1 mm to about 10 mm. Alternatively, the second interface assembly 465 b may not be required or may be configured differently. The second interface assembly 465 b can comprise one or more control assemblies (460 a and 460 b). Each of the control assemblies (460 a and 460 b) can be removably coupled to the upper resonator wall 484 and removably coupled to the second interface assembly 465 b.

The fourth microwave resonator system 400 can be configured to form plasma in the process space 415 as the substrate holder 420 and the substrate are moved through the process space 415. The fourth microwave resonator system 400 can be configured to process 200 mm substrates, 300 mm substrates, or larger-sized substrates. In addition, square and/or rectangular chambers can be configured so that the fourth microwave resonator system 400 may be configured to process square or rectangular substrates, wafers, or LCDs regardless of their size, as would be appreciated by those skilled in the art. Therefore, while aspects of the invention will be described in connection with the processing of a semiconductor substrate, the invention is not limited solely thereto.

In other embodiments, the fourth resonator subsystem 480 can comprise a plurality of resonant cavities (not shown) therein. In some other embodiments, the fourth microwave resonator system 400 can comprise a plurality of resonator subsystems having one or more resonant cavities therein. In various systems, the fourth resonator assembly 481 and the fourth EM-energy tuning space 485 can have cylindrical shapes, rectangular shapes, or squares shapes.

In some embodiments, a microwave source 450 can be coupled to the fourth resonator assembly 481. In addition, one or more RF sources (not shown) sources (not shown) may be coupled to the fourth resonator subsystem 480. The microwave source 450 can be coupled to a matching network 452, and the matching network 452 can be coupled to a coupling network 454. Alternatively, a plurality of matching networks (not shown) or a plurality of coupling networks (not shown) may be coupled to the fourth resonator subsystem 480. The coupling network 454 can be removably coupled to an upper resonator wall 484 of the fourth resonator assembly 481 and can be used to provide microwave energy to the fourth EM-energy tuning space 485. Alternatively, other coupling configurations may be used.

A first plasma-tuning rod (470 a, 475 a) can have a first plasma-tuning portion 470 a that can extend into the first isolated protection space 473 a established in the first protection assembly 472 a at a first location (x_(2a)) in the process space 415, and a first EM-tuning portion 475 a that can extend into the fourth EM-energy tuning space 485 at a first location (x_(1a)). A first isolation assembly 464 a can be used to position (extend) the first plasma-tuning portion 470 a at first plasma-tuning distances 471 a within the first isolated protection space 473 a established in the first protection assembly 472 a. For example, the first plasma-tuning distance 471 a can vary from about 10 mm to about 400 mm, and the first plasma-tuning distance 471 a can be wavelength-dependent and can vary from about (λ/4) to about (10λ).

A first EM-coupling region 462 a can be established at a first EM-coupling distance 476 a from the lower resonator wall 483 defining the fourth EM-energy tuning space 485, and the first EM-tuning portion 475 a can extend into the first EM-coupling region 462 a. The first EM-tuning portion 475 a can obtain first tunable microwave energy from the first EM-coupling region 462 a, and the first microwave energy can be transferred as first plasma-tuning energy to the process space 415 at the first x/y plane location (x_(2a)) using the first plasma-tuning portion 470 a. The first EM-coupling region 462 a can include a tunable E-field region, a tunable H-field region, a maximum field region, a maximum voltage region, maximum energy region, or a maximum current region, or any combination thereof. For example, the first EM-coupling distance 476 a can vary from about 0.01 mm to about 10 mm, and the first EM-coupling distance 476 a can be wavelength-dependent and can vary from about (λ/4) to about (10λ).

A first plasma-tuning slab 461 a can be coupled to a first control assembly 460 a and can be used to move 463 a the first plasma-tuning slab 461 a a first EM-tuning distance 477 a relative to the first EM-tuning portion 475 a of the first plasma-tuning rod (470 a, 475 a) within the fourth EM-energy tuning space 485. The first control assembly 460 a and the first plasma-tuning slab 461 a can be used to optimize the microwave energy coupled from the first EM-coupling region 462 a to the first EM-tuning portion 475 a of the first plasma-tuning rod (470 a, 475 a). For example, the first EM-tuning distance 477 a can be established between the first EM-tuning portion 475 a and the first plasma-tuning slab 461 a within the fourth EM-energy tuning space 485, and the first EM-tuning distance 477 a can vary from about 0.01 mm to about 1 mm.

The first plasma-tuning rod (470 a, 475 a) can have a first diameter (d_(1a)) associated therewith, and the first diameter (d_(1a)) can vary from about 0.01 mm to about 1 mm. The first isolation assembly 464 a can have a first diameter (D_(1a)) associated therewith, and the first diameter (D_(1a)) can vary from about 1 mm to about 10 mm.

The first EM-tuning portion 475 a, the first EM-coupling region 462 a, the first control assembly 460 a, and the first plasma-tuning slab 461 a can have a first x/y plane offset (x_(1a)) associated therewith. For example, the first x/y plane offset (x_(1a)) can be established relative to the resonator wall 482 b, can be wavelength-dependent, and can vary from about (λ/4) to about (10λ). The first control assembly 460 a can have a cylindrical configuration and a diameter (d_(2a)) that can vary from about 1 mm to about 5 mm. The first plasma-tuning slab 461 a can have diameters (D_(2a)) associated therewith, and the diameter (D_(2a)) can vary from about 1 mm to about 10 mm.

A second plasma-tuning rod (470 b, 475 b) can have a second plasma-tuning portion 470 b that can extend into the second isolated protection space 473 b established in the second protection assembly 472 b at a second location (x_(2b)) in the process space 415, and a second EM-tuning portion 475 b that can extend into the fourth EM-energy tuning space 485 at a second x/y plane location (x_(1b)). A second isolation assembly 464 b can be used to position (extend) the second plasma-tuning portion 470 b second plasma-tuning distances 471 b within the third isolated protection space 473 c established in the third protection assembly 472 c. For example, the second plasma-tuning distances 471 b can vary from about 10 mm to about 400 mm, and the second plasma-tuning distances 471 b can be wavelength-dependent and can vary from about (λ/4) to about (10λ).

A second EM-coupling region 462 b can be established at second EM-coupling distances 476 b from the lower resonator wall 483 defining the fourth EM-energy tuning space 485, and the second EM-tuning portion 475 b can extend into the second EM-coupling region 462 b. The second EM-tuning portion 475 b can obtain second tunable microwave energy from the second EM-coupling region 462 b, and the second microwave energy can be transferred as second plasma-tuning energy to the process space 415 at the second x/y plane location (x_(2b)) using the second plasma-tuning portion 470 b. The second EM-coupling region 462 b can include a tunable E-field region, a tunable H-field region, a maximum field region, a maximum voltage region, maximum energy region, or a maximum current region, or any combination thereof. For example, the second EM-coupling distance 476 b can vary from about 0.01 mm to about 10 mm, and the second EM-coupling distance 476 b can be wavelength-dependent and can vary from about (λ/4) to about (10λ).

A second plasma-tuning slab 461 b can be coupled to a second control assembly 460 b and can be used to move 463 b the second plasma-tuning slab 461 b second EM-tuning distances 477 b relative to the second EM-tuning portion 475 b of the second plasma-tuning rod (470 b, 475 b) within the fourth EM-energy tuning space 485. The second control assembly 460 b and the second plasma-tuning slab 461 b can be used to optimize the microwave energy coupled from the second EM-coupling region 462 b to the second EM-tuning portion 475 b of the second plasma-tuning rod (470 b, 475 b). For example, the second EM-tuning distances 477 b can be established between the second EM-tuning portion 475 b and the second plasma-tuning slab 461 b within the fourth EM-energy tuning space 485, and the second EM-tuning distances 477 b can vary from about 0.01 mm to about 1 mm.

The second plasma-tuning rod (470 b, 475 b) can have second diameters (d_(1b)) associated therewith, and the second diameters (d_(1b)) can vary from about 0.01 mm to about 1 mm. The second isolation assembly 464 b can have second diameters (D_(1b)) associated therewith, and the second diameters (D_(1b)) can vary from about 1 mm to about 10 mm.

The second EM-tuning portion 475 b, the second EM-coupling region 462 b, the second control assembly 460 b, and the second plasma-tuning slab 461 b can have second x/y plane offsets (x_(1b)) associated therewith. For example, the second x/y plane offsets (x_(1b)) can be established relative to the resonator wall 482 b and can be wavelength-dependent and can vary from about (λ/4) to about (10λ). The second control assembly 460 b can have a cylindrical configuration and second diameters (d_(2b)) that can vary from about 1 mm to about 5 mm. The second plasma-tuning slab 461 b can have diameters (D_(2b)) associated therewith, and the diameters (D_(2b)) can vary from about 1 mm to about 10 mm.

A first resonator subassembly 481 c can be coupled to a first chamber wall 412 a at a first x/y plane offset (y_(3c)) and can have a first height (y_(4c)). For example, the first y/y plane offsets (y_(3c)) can be established relative to the lower chamber wall 412 and can be wavelength-dependent and can vary from about (λ/4) to about (100λ). In addition, the first height (y_(4c)) can vary from about (λ/4) to about (10λ).

In some embodiments, a first EM source 435 c can be coupled to the first resonator subassembly 481 c, and the first EM source 435 c can operate at frequencies from about 500 MHz to about 5000 MHz. The controller 495 can be coupled to the first resonator subassembly 481 c and the first EM source 435 c, and the controller 495 can use process recipes to establish, control, and optimize the first resonator subassembly 481 c and the first EM source 435 c to control the third EM-coupling region 462 c in the third EM-energy tuning space 485 c and the plasma uniformity within the process space 415.

A third plasma-tuning rod (470 c, 475 c) can have a third plasma-tuning portion 470 c that can extend into the third isolated protection space 473 c established in the third protection assembly 472 c at a third x/y plane location (y_(2c)) in the process space 415, and a third EM-tuning portion 475 c that can extend into the third EM-energy tuning space 485 c at a third x/y plane location (y_(1c)). A third isolation assembly 464 c can be used to position (extend) the third plasma-tuning portion 470 c third plasma-tuning distances 471 c within the third isolated protection space 473 c established in the third protection assembly 472 c. For example, the third plasma-tuning distances 471 c can vary from about 10 mm to about 400 mm, and the third plasma-tuning distances 471 c can be wavelength-dependent and can vary from about (λ/4) to about (10λ).

A third EM-coupling region 462 c can be established at third EM-coupling distances 476 c from at least one wall in the first resonator subassembly 481 c defining the third EM-energy tuning space 485 c, and the third EM-tuning portion 475 c can extend into the third EM-coupling region 462 c. The third EM-tuning portion 475 c can obtain third tunable microwave energy from the third EM-coupling region 462 c, and the third microwave energy can be transferred as third plasma-tuning energy to the process space 415 at the third x/y plane location (y_(2c)) using the third plasma-tuning portion 470 c. The third EM-coupling region 462 c can include a tunable E-field region, a tunable H-field region, a maximum field region, a maximum voltage region, maximum energy region, or a maximum current region, or any combination thereof. For example, the third EM-coupling distance 476 c can vary from about 0.01 mm to about 10 mm, and the third EM-coupling distance 476 c can be wavelength-dependent and can vary from about (λ/4) to about (10λ).

A third plasma-tuning slab 461 c can be coupled to a third control assembly 460 c and can be used to move 463 c the third plasma-tuning slab 461 c third EM-tuning distances 477 c relative to the third EM-tuning portion 475 c of the third plasma-tuning rod (470 c, 475 c) within the third EM-energy tuning space 485 c. The third control assembly 460 c and the third plasma-tuning slab 461 c can be used to optimize the microwave energy coupled from the third EM-coupling region 462 c to the third EM-tuning portion 475 c of the third plasma-tuning rod (470 c, 475 c). For example, the third EM-tuning distances 477 c can be established between the third EM-tuning portion 475 c and the third plasma-tuning slab 461 c within the third EM-energy tuning space 485 c, and the third EM-tuning distances 477 c can vary from about 0.01 mm to about 1 mm.

The third plasma-tuning rod (470 c, 475 c) can have third diameters (d_(1c)) associated therewith, and the third diameters (d_(1c)) can vary from about 0.01 mm to about 1 mm. The third isolation assembly 464 c can have third diameters (D_(1c)) associated therewith, and the third diameters (D_(1c)) can vary from about 1 mm to about 10 mm.

The third EM-tuning portion 475 c, the third EM-coupling region 462 c, the third control assembly 460 c, and the third plasma-tuning slab 461 c can have third x/y plane offsets (y_(1c)) associated therewith. For example, the third x/y plane offsets (y_(1c)) can be established relative to one or more walls of a first additional cavity 469 c, can be wavelength-dependent, and can vary from about (λ/4) to about (10λ). The third control assembly 460 c can have a cylindrical configuration and third diameters (d_(1c)) that can vary from about 1 mm to about 5 mm. The third plasma-tuning slab 461 c can have third diameters (D_(1c)) associated therewith, and the third diameters (D_(1c)) can vary from about 1 mm to about 10 mm.

A second resonator subassembly 481 d can be coupled to a second chamber wall 412 b at a second x/y plane offset (y_(3d)) and can have a second height (y_(4d)). For example, the second x/y plane offsets (y_(3d)) can be established relative to the lower chamber wall 412, can be wavelength-dependent and can vary from about (λ/4) to about (100λ). In addition, the second height (y_(4d)) can vary from about (λ/4) to about (10λ).

In some embodiments, a second EM source 435 d can be coupled to the second resonator subassembly 481 d, and the second EM source 435 d can operate at frequencies from about 500 MHz to about 5000 MHz. The controller 495 can be coupled to the second resonator subassembly 481 d and the second EM source 435 d, and the controller 495 can use process recipes to establish, control, and optimize the second resonator subassembly 481 d and the second EM source 435 d to control the fourth EM-coupling region 462 d in the fourth EM-energy tuning space 485 d and the plasma uniformity within the process space 415.

A fourth plasma-tuning rod (470 d, 475 d) can have a fourth plasma-tuning portion 470 d that can extend into the fourth isolated protection space 473 d established in the fourth protection assembly 472 d at a fourth x/y plane location (y_(2d)) in the process space 415, and a fourth EM-tuning portion 475 d that can extend into the fourth EM-energy tuning space 485 d at a fourth x/y plane location (y_(1c)). A fourth isolation assembly 464 d can be used to position (extend) the fourth plasma-tuning portion 470 d fourth plasma-tuning distances 471 d within the fourth isolated protection space 473 d established in the fourth protection assembly 472 d. For example, the fourth plasma-tuning distances 471 d can vary from about 10 mm to about 400 mm, and the fourth plasma-tuning distances 471 d can be wavelength-dependent and can vary from about (λ/4) to about (10λ).

A fourth EM-coupling region 462 d can be established at fourth EM-coupling distances 476 d from at least one wall in the second resonator subassembly 481 d defining the fourth EM-energy tuning space 485 d, and the fourth EM-tuning portion 475 d can extend into the fourth EM-coupling region 462 d. The fourth EM-tuning portion 475 d can obtain fourth tunable microwave energy from the fourth EM-coupling region 462 d, and the fourth microwave energy can be transferred as fourth plasma-tuning energy to the process space 415 at the fourth x/y plane location (y_(2d)) using the fourth plasma-tuning portion 470 d. The fourth EM-coupling region 462 d can include a tunable E-field region, a tunable H-field region, a maximum field region, a maximum voltage region, maximum energy region, or a maximum current region, or any combination thereof. For example, the fourth EM-coupling distance 476 d can vary from about 0.01 mm to about 10 mm, and the fourth EM-coupling distance 476 d can be wavelength-dependent and can vary from about (λ/4) to about (10λ).

A fourth plasma-tuning slab 461 d can be coupled to a fourth control assembly 460 d and can be used to move 463 d the fourth plasma-tuning slab 461 d fourth EM-tuning distances 477 d relative to the fourth EM-tuning portion 475 d of the fourth plasma-tuning rod (470 d, 475 d) within the fourth EM-energy tuning space 485 d. The fourth control assembly 460 d and the fourth plasma-tuning slab 461 d can be used to optimize the microwave energy coupled from the fourth EM-coupling region 462 d to the fourth EM-tuning portion 475 d of the fourth plasma-tuning rod (470 d, 475 d). For example, the fourth EM-tuning distances 477 d can be established between the fourth EM-tuning portion 475 d and the fourth plasma-tuning slab 461 d within the fourth EM-energy tuning space 485, and the fourth EM-tuning distances 477 d can vary from about 0.01 mm to about 1 mm.

The fourth plasma-tuning rod (470 d, 475 d) can have fourth diameters (d_(1d)) associated therewith, and the fourth diameters (d_(1d)) can vary from about 0.01 mm to about 1 mm. The fourth isolation assembly 464 d can have fourth diameters (D_(1d)) associated therewith, and the fourth diameters (D_(1d)) can vary from about 1 mm to about 10 mm.

The fourth EM-tuning portion 475 d, the fourth EM-coupling region 462 d, the fourth control assembly 460 d, and the fourth plasma-tuning slab 461 d can have fourth x/y plane offsets (y_(1d)) associated therewith. For example, the fourth x/y plane offsets (y_(1d)) can be established relative to one or more walls of a second additional cavity 469 d, can be wavelength-dependent, and can vary from about (λ/4) to about (10λ). The fourth control assembly 460 d can have a cylindrical configuration and fourth diameters (d_(1d)) that can vary from about 1 mm to about 5 mm. The fourth plasma-tuning slab 461 d can have fourth diameters (D_(1d)) associated therewith, and the fourth diameters (D_(1d)) can vary from about 1 mm to about 10 mm.

The control assemblies (460 a, 460 b, 460 c, and 460 d) can be coupled 496 to the controller 495, and the controller 495 can use process recipes to establish, control, and optimize the EM-tuning distances (477 a, 477 b, 477 c, and 477 d) to control the EM-coupling regions (462 a, 462 b, 462 c, and 462 d) in the EM-energy tuning spaces (485, 485 c, and 485 d) and the plasma uniformity within the process space 415. The controller 495 can be coupled to the microwave source 450, the matching network 452, and the coupling network 454, and the controller 495 can use process recipes to establish, control, and optimize the microwave source 450, the matching network 452, and the coupling network 454 to control the EM-coupling regions (462 a, 462 b, 462 c, and 462 d) in the EM-energy tuning spaces (485, 485 c, and 485 d) and the plasma uniformity within the process space 415. For example, the microwave source 450 can operate at frequencies from about 500 MHz to about 5000 MHz. In addition, the controller 495 can be coupled to the resonator sensors 406 and process sensors 407, and the controller 495 can use process recipes to establish, control, and optimize the data from the resonator sensors 406 and the process sensors 407 to control the EM-coupling regions (462 a, 462 b, 462 c, and 462 d) in the EM-energy tuning spaces (485, 485 c, and 485 d) and the plasma uniformity within the process space 415.

The front view of the fourth microwave resonator system 400 includes an x/y plane view of a cavity-control assembly 455 that is shown coupled to an x/y plane view of a cavity-tuning slab 456. The cavity-control assembly 455 can have a first diameter (d_(1aa)) associated therewith, and the first diameter (d_(1aa)) can vary from about 0.01 mm to about 1 mm. The cavity-tuning slab 456 can have a second diameter (D_(1aa)) associated therewith, and the second diameter (D_(1aa)) can vary from about 1 mm to about 10 mm. The cavity-control assembly 455 and the cavity-tuning slab 456 can have a first x/y plane offset (y_(1aa)) associated therewith, and the first x/y plane offset (y_(1aa)) can vary from about 1 mm to about 10 mm.

The cavity-control assembly 455 can be used to move 457 the cavity-tuning slab 456 cavity-tuning distances 458 within the fourth EM-energy tuning space 485. The controller 495 can be coupled to the cavity-control assembly 455, and the controller 495 can use process recipes to establish, control, and optimize the cavity-tuning distances 458 to control and maintain the plasma uniformity within the process space 415 in real-time. For example, the cavity-tuning distances 458 can vary from about 0.01 mm to about 10 mm, and the cavity-tuning distances 458 can be wavelength-dependent and can vary from about (λ/16) to about (10λ).

Still referring to FIG. 4A, a substrate holder 420, and a lower electrode 421 are shown. When present, the lower electrode 421 can be used to couple Radio Frequency (RF) power to plasma in process space 415. For example, lower electrode 421 can be electrically biased at an RF voltage via the transmission of RF power from RF generator 430 through impedance match network 431 and RF sensor 432 to lower electrode 421. The RF bias can serve to heat electrons to form and/or maintain the plasma. A typical frequency for the RF bias can range from 1 MHz to 100 MHz and is preferably 13.56 MHz. Alternatively, RF power may be applied to the lower electrode 421 at multiple frequencies. Furthermore, impedance match network 431 can serve to maximize the transfer of RF power to the plasma in process chamber 410 by minimizing the reflected power. Various match network topologies and automatic control methods can be utilized. The RF sensor 432 can measure the power levels and/or frequencies associated with the fundamental signals, harmonic signals, and/or intermodulation signals. In addition, the controller 495 can be coupled 496 to the RF generator 430, the impedance match network 431, and the RF sensor 432, and the controller 495 can use process recipes to establish, control, and optimize the data to and from the RF generator 430, the impedance match network 431, and the RF sensor 432 to control the EM-coupling regions (462 a, 462 b, 462 c, and 462 d) in the EM-energy tuning spaces (485, 485 c, and 485 d) and the plasma uniformity within the process space 415.

Some of the third microwave resonator systems 400 can include a pressure control system 490 and exhaust port 491 coupled to the process chamber 410, and configured to evacuate the process chamber 410, as well as control the pressure within the process chamber 410. Alternatively, the pressure control system 490 and/or the exhaust port 491 may not be required.

As shown in FIG. 4A, the fourth microwave resonator systems 400 can comprise a first gas supply system 440 coupled to first supply elements 441, and the first supply element 441 can be coupled to the process chamber 410. The first supply elements 441 can be configured to introduce a first process gas to process space 415, and can include flow control and/or flow measuring devices. Alternatively, a second gas supply system and second supply element may be required.

During dry plasma etching, the process gas may comprise an etchant, a passivant, or an inert gas, or a combination of two or more thereof. For example, when plasma etching a dielectric film such as silicon oxide (SiO_(x)) or silicon nitride (Si_(x)N_(y)), the plasma etch gas composition generally includes a fluorocarbon-based chemistry (C_(x)F_(y)) such as at least one of C₄F₈, C₅F₈, C₃F₆, C₄F₆, CF₄, etc., and/or may include a fluorohydrocarbon-based chemistry (C_(x)H_(y)F_(z)) such as at least one of CHF₃, CH₂F₂, etc., and can have at least one of an inert gas, oxygen, CO or CO₂. Additionally, for example, when etching polycrystalline silicon (polysilicon), the plasma etch gas composition generally includes a halogen-containing gas such as HBr, Cl₂, NF₃, or SF₆ or a combination of two or more thereof, and may include fluorohydrocarbon-based chemistry (C_(x)H_(y)F_(z)) such as at least one of CHF₃, CH₂F₂, etc., and at least one of an inert gas, oxygen, CO or CO₂, or two or more thereof. During plasma-enhanced deposition, the process gas may comprise a film forming precursor, a reduction gas, or an inert gas, or a combination of two or more thereof.

FIG. 4B illustrates a top view of a fourth resonator assembly in accordance with embodiments of the invention. The fourth resonator assembly 481 can have a total length (x_(T1)) and a total height (z_(T1)) associated therewith in the x/z plane. For example, the total length (x_(T1)) can vary from about 10 mm to about 500 mm, and the total height (z_(T1)) can vary from about 10 mm to about 1000 mm.

The top view of fourth resonator subsystem 480 includes an x/z plane view of a first control assembly 460 a that is shown surrounded by a top (dash line) view of a first plasma-tuning slab 461 a. The first control assembly 460 a can have a first diameter (d_(2a)) associated therewith, and the first diameter (d_(2a)) can vary from about 0.01 mm to about 1 mm. The first plasma-tuning slab 461 a can have a second diameter (D_(2a)) associated therewith, and the second diameter (D_(2a)) can vary from about 1 mm to about 10 mm. The first control assembly 460 a and the first plasma-tuning slab 461 a can have first x/z plane offsets (x_(1a)) associated therewith, and the first x/z plane offsets (x_(1a)) can vary from about 1 mm to about 10 mm. Alternatively, the first control assembly 460 a and the first plasma-tuning slab 461 a may have different first x/z plane offsets (x_(1a)) associated therewith. The first control assembly 460 a and the first plasma-tuning slab 461 a can have first x/z plane offsets (z_(1a)) associated therewith, and the first x/z plane offsets (z_(1a)) can vary from about 1 mm to about 10 mm. Alternatively, the first control assembly 460 a and the first plasma-tuning slab 461 a may have different first x/z plane offsets (z_(1a)) associated therewith.

In addition, the top view of fourth resonator assembly 481 includes an x/z plane view of a second control assembly 460 b that is shown surrounded by a top (dash line) view of a second plasma-tuning slab 461 b. The second control assembly 460 b can have a first diameter (d_(2b)) associated therewith, and the first diameter (d_(2b)) can vary from about 0.01 mm to about 1 mm. The second plasma-tuning slab 461 b can have a second diameter (D_(2b)) associated therewith, and the second diameter (D_(2b)) can vary from about 1 mm to about 10 mm. The second control assembly 460 b and the second plasma-tuning slab 461 b can have second x/z plane offsets (x_(1b)) associated therewith, and the second x/z plane offsets (x_(1b)) can vary from about 1 mm to about 10 mm. Alternatively, the second control assembly 460 b and the second plasma-tuning slab 461 b may have different second x/z plane offsets (x_(1b)) associated therewith. The second control assembly 460 b and the second plasma-tuning slab 461 b can have second x/z plane offsets (z_(1b)) associated therewith, and the second x/z plane offsets (z_(1b)) can vary from about 1 mm to about 10 mm. Alternatively, the second control assembly 460 b and the second plasma-tuning slab 461 b may have different second x/z plane offsets (z_(1a)) associated therewith.

FIG. 4B shows top views of resonator walls (482 a, 482 b, 483, and 484). The resonator wall 482 a can have wall thicknesses (t_(a)) associated therewith, and the wall thicknesses (t_(a)) can vary from about 1 mm to about 5 mm. The resonator wall 482 b can have wall thicknesses (t_(b)) associated therewith, and the wall thicknesses (t_(b)) can vary from about 1 mm to about 5 mm. The resonator walls (482 a and 482 b) can have wall thicknesses (t) associated therewith, and the wall thicknesses (t) can vary from about 1 mm to about 5 mm.

The top view of the fourth resonator assembly 481 includes an x/z plane view of a cavity-control assembly 455 and an x/z plane view of a cavity-tuning slab 456. The cavity-control assembly 455 can have a first diameter (d_(1aa)) associated therewith, and the first diameter (d_(1aa)) can vary from about 0.01 mm to about 1 mm. The cavity-tuning slab 456 can have a second diameter (D_(1aa)) associated therewith, and the second diameter (D_(1aa)) can vary from about 1 mm to about 10 mm. The cavity-control assembly 455 and the cavity-tuning slab 456 can have a first x/z plane offset (z_(1aa)) associated therewith, and the first x/z plane offset (z_(1aa)) can vary from about 1 mm to about 10 mm.

FIG. 4C illustrates a side view of the fourth microwave resonator systems 400. The side view shows a y/z plane view of a process chamber 410 that can be configured using a first interface assembly 465 a, a plurality of chamber walls 412 coupled to the first interface assembly 465 a, and a process space 415 can be configured within the process chamber 410. For example, the chamber walls 412 can have wall thicknesses (t) associated therewith, and the wall thicknesses (t) can vary from about 1 mm to about 5 mm. The first interface assembly 465 a can have a first interface thickness (t_(i1)) associated therewith, and the first interface thickness (t_(i1)) can vary from about 1 mm to about 10 mm.

The side view shows a y/z plane view of a fourth resonator subsystem 480 that can comprise a fourth resonator assembly 481 that can be configured using a plurality of resonator walls (482 a, 482 b, 483, and 484). For example, the resonator walls (482 a, 482 b, 483, and 484) can include dielectric material such as quartz and can define a fourth EM-energy tuning space 485 therein. In addition, one or more resonator sensors 406 can be coupled to the fourth EM-energy tuning space 485 to obtain first resonator data.

The resonator walls 482 a can have wall thicknesses (t_(a)) associated therewith, and the wall thicknesses (t_(a)) can vary from about 1 mm to about 5 mm. The resonator walls 482 b can have wall thicknesses (t_(b)) associated therewith, and the wall thicknesses (t_(b)) can vary from about 1 mm to about 5 mm. The resonator walls 482 can have wall thicknesses (t) associated therewith, and the wall thicknesses (t) can vary from about 1 mm to about 5 mm.

In some examples, the first interface assembly 465 a can be used to removably couple the third resonator assembly 481 to the process chamber 410. The first interface assembly 465 a can have first interface thicknesses (t_(i1)) associated therewith, and the first interface thicknesses (t_(i1)) can vary from about 1 mm to about 10 mm. Alternatively, the first interface assembly 465 a may not be required or may be configured differently. A first interface assembly 465 a can comprise one or more isolation assemblies (464 a and 464 b). Each of the isolation assemblies (464 a and 464 b) can be removably coupled to a lower resonator wall 483 and removably coupled to one or more of the first interface assembly 465 a.

In addition, a second interface assembly 465 b can be coupled to the third resonator assembly 481 using an upper resonator wall 484. The second interface assembly 465 b can have second interface thicknesses (t_(i2)) associated therewith, and the second interface thicknesses (t_(i2)) can vary from about 1 mm to about 10 mm. Alternatively, the second interface assembly 465 b may not be required or may be configured differently. The second interface assembly 465 b can comprise one or more control assemblies (460 a and 460 b). Each of the control assemblies (460 a and 460 b) can be removably coupled to the upper resonator wall 484 and removably coupled to the second interface assembly 465 b.

The fourth microwave resonator system 400 can be configured to form plasma in the process space 415 as the substrate holder 420 and the substrate are moved through the process space 415. The fourth microwave resonator system 400 can be configured to process 200 mm substrates, 300 mm substrates, or larger-sized substrates. In addition, square and/or rectangular chambers can be configured so that the fourth microwave resonator system 400 may be configured to process square or rectangular substrates, wafers, or LCDs regardless of their size, as would be appreciated by those skilled in the art. Therefore, while aspects of the invention will be described in connection with the processing of a semiconductor substrate, the invention is not limited solely thereto.

In other embodiments, the fourth resonator assembly 481 can comprise a plurality of resonant cavities (not shown) therein. In some other embodiments, the fourth resonator system 480 can comprise a plurality of resonator subsystems having one or more resonant cavities therein. In various systems, the fourth resonator assembly 481 and the fourth EM-energy tuning space 485 can have cylindrical shapes, rectangular shapes, or squares shapes.

In FIG. 4C, a microwave source 450 is shown coupled to the fourth resonator assembly 481. The microwave source 450 can be coupled to a matching network 452, and the matching network 452 can be coupled to a coupling network 454. Alternatively, a plurality of matching networks (not shown) or a plurality of coupling networks (not shown) may be coupled to the fourth resonator assembly 481. The coupling network 454 can be removably coupled to an upper resonator wall 484 of the fourth resonator assembly 481 and can be used to provide microwave energy to the fourth EM-energy tuning space 485. Alternatively, other coupling configurations may be used.

The side view includes a y/z plane view of a first set of plasma-tuning rods {(470 a, 475 a) and (470 b, 475 b)} that can have a first set of plasma-tuning portions (470 a and 470 b) that can extend into first set of isolated protection spaces (473 a and 473 b) established in the first set of protection assemblies (472 a and 472 b) at first y/z plane locations (z_(2a-b)) in the process space 415, and a first set of EM-tuning portions (475 a and 475 b) that can extend into the fourth EM-energy tuning space 485 at second y/z plane locations (z_(1a-c)). A first set of isolation assemblies (464 a and 464 b) can be used to position (extend) the first set of plasma-tuning portions (470 a and 470 b) first set of plasma-tuning distances (471 a and 471 b) within the process space 415 at the first locations defined using (z_(2a-b)). For example, the first set of plasma-tuning distances (471 a and 471 b) can vary from about 10 mm to about 400 mm, and the first set of plasma-tuning distances (471 a and 471 b) can be wavelength-dependent and can vary from about (λ/4) to about (10λ).

A first set of EM-coupling regions (462 a and 462 b) can be established at the EM-coupling distances (476 a and 476 b) from the lower resonator wall 483 defining the fourth EM-energy tuning space 485, and the first set of EM-tuning portions (475 a and 475 b) can extend into the first set of EM-coupling regions (462 a and 462 b). The first set of EM-tuning portions (475 a and 475 b) can obtain tunable microwave energies from the first set of EM-coupling regions (462 a and 462 b), and the tunable microwave energies can be transferred as controllable plasma-tuning energies to the process space 415 at the first y/z plane locations (z_(2a-c)) using the first set of plasma-tuning portions (470 a and 470 b). The first set of EM-coupling regions (462 a and 462 b) can include a tunable E-field region, a tunable H-field region, a maximum field region, a maximum voltage region, maximum energy region, or a maximum current region, or any combination thereof. For example, the EM-coupling distances (476 a and 476 b) can vary from about 0.01 mm to about 10 mm, and the EM-coupling distances (476 a and 476 b) can be wavelength-dependent and can vary from about (λ/4) to about (10λ).

A first set of plasma-tuning slabs (461 a and 461 b) can be coupled to a first set of control assemblies (460 a and, 460 b) and can be used to move (463 a and 463 b) the first set of plasma-tuning slabs (461 a and 461 b) EM-tuning distances (477 a and 477 b) relative to the first set of EM-tuning portions (475 a and 475 b) of the first set of plasma-tuning rod {(470 a, 475 a) and (470 b, 475 b)} within the fourth EM-energy tuning space 485. The first set of control assemblies (460 a and 460 b) and the first set of plasma-tuning slabs (461 a and 461 b) can be used to optimize the microwave energies coupled from the first set of EM-coupling regions (462 a and 462 b) to the first set of EM-tuning portions (475 a and 475 b) of the first set of plasma-tuning rod {(470 a, 475 a), and (470 b, 475 b)}. For example, the EM-tuning distances (477 a and 477 b) can be established between the first set of EM-tuning portions (475 a and 475 b) and the first set of plasma-tuning slabs (461 a and 461 b) within the fourth EM-energy tuning space 485, and the EM-tuning distances (477 a and 477 b) can vary from about 0.01 mm to about 1 mm.

A first set of protection assemblies (472 a and 472 b) can be coupled to the first set of isolation assemblies (464 a and 464 b), and the first set of protection assemblies (472 a and 472 b) can be configured at first locations (z_(2a-b)) within the process space 415. The set of protection assemblies (472 a and 472 b) can have first sets of isolated protection spaces (473 a and 473 b) therein and can have insertion lengths (474 a and 474 b) associated therewith. For example, the insertion lengths (474 a and 474 b) can vary from about 1 mm to about 10 mm in the y/z plane. In addition, the protection assemblies (472 a and 472 b) and the isolation assemblies (464 a and 464 b) can be constructed using one or more dielectric materials.

The first set of plasma-tuning rod {(470 a, 475 a) and (470 b, 475 b)} can comprise dielectric material and can have first diameter (d_(1a)) associated therewith, and the first diameters (d_(1a)) can vary from about 0.01 mm to about 1 mm. The first set of isolation assemblies (464 a and 464 b) and the first set of protection assemblies (472 a and 472 b) can have first diameters (D_(1a)) associated therewith, and the first diameters (D_(1a)) can vary from about 1 mm to about 10 mm. Alternatively, the isolation assemblies (464 a and 464 b) and the first set of protection assemblies (472 a and 472 b) can have different diameters associated therewith.

The first set of EM-tuning portions (475 a and 475 b), the first set of EM-coupling regions (462 a and 462 b), the first set of control assemblies (460 a and 460 b), and the first set of plasma-tuning slabs (461 a and 461 b) can have y/z plane offsets (z_(1a-b)) associated therewith. For example, the y/z plane offsets (z_(1a-b)) can be established relative to the lower resonator wall 483 and can be wavelength-dependent and can vary from about (λ/4) to about (10λ). The first set of control assemblies (460 a and 460 b) can comprise dielectric material, can have cylindrical configurations and diameter (d_(2a-c)) that can vary from about 1 mm to about 5 mm. The first set of plasma-tuning slabs (461 a and 461 b) can comprise dielectric material, can have diameters (D_(2a-b)) associated therewith, and the diameters (D_(2a-b)) can vary from about 1 mm to about 10 mm.

A first resonator subassembly 481 c can be coupled to a first chamber wall 412 a at a first y/z plane offset (y_(3c)) and can have a first height (y_(4c)). For example, the first x/y plane offsets (y_(3c)) can be established relative to the lower chamber wall 412 and can be wavelength-dependent and can vary from about (λ/4) to about (100λ). In addition, the first height (y_(4c)) can vary from about (λ/4) to about (10λ).

In some embodiments, a first EM source 435 c can be coupled to the first resonator subassembly 481 c, and the first EM source 435 c can operate at frequencies from about 500 MHz to about 5000 MHz. The controller 495 can be coupled to the first resonator subassembly 481 c and the first EM source 435 c, and the controller 495 can use process recipes to establish, control, and optimize the first resonator subassembly 481 c and the first EM source 435 c to control the EM-coupling regions (462 a, 462 b, 462 c, and 462 d) in the EM-energy tuning spaces (485, 485 c, and 485 d) and the plasma uniformity within the process space 415.

A third plasma-tuning rod (470 c, 475 c) can have a third plasma-tuning portion 470 c that can extend into the third isolated protection space 473 c established in the third protection assembly 472 c at a third x/y plane location (y_(2c)) in the process space 415, and a third EM-tuning portion 475 c that can extend into the third EM-energy tuning space 485 c at a third x/y plane location (y_(1c)). A third isolation assembly 464 c can be used to position (extend) the third plasma-tuning portion 470 c third plasma-tuning distances 471 c within the third isolated protection space 473 c established in the third protection assembly 472 c. For example, the third plasma-tuning distances 471 c can vary from about 10 mm to about 400 mm, and the third plasma-tuning distances 471 c can be wavelength-dependent and can vary from about (λ/4) to about (10λ).

A third EM-coupling region 462 c can be established at third EM-coupling distances 476 c from at least one wall in the first resonator subassembly 481 c defining the third EM-energy tuning space 485 c, and the third EM-tuning portion 475 c can extend into the third EM-coupling region 462 c. The third EM-tuning portion 475 c can obtain third tunable microwave energy from the third EM-coupling region 462 c, and the third microwave energy can be transferred as third plasma-tuning energy to the process space 415 at the third x/y plane location (y_(2c)) using the third plasma-tuning portion 470 c. The third EM-coupling region 462 c can include a tunable E-field region, a tunable H-field region, a maximum field region, a maximum voltage region, maximum energy region, or a maximum current region, or any combination thereof. For example, the third EM-coupling distance 476 c can vary from about 0.01 mm to about 10 mm, and the third EM-coupling distance 476 c can be wavelength-dependent and can vary from about (λ/4) to about (10λ).

A third plasma-tuning slab 461 c can be coupled to a third control assembly 460 c and can be used to move 463 c the third plasma-tuning slab 461 c third EM-tuning distances 477 c relative to the third EM-tuning portion 475 c of the third plasma-tuning rod (470 c, 475 c) within the third EM-energy tuning space 485 c. The third control assembly 460 c and the third plasma-tuning slab 461 c can be used to optimize the microwave energy coupled from the third EM-coupling region 462 c to the third EM-tuning portion 475 c of the third plasma-tuning rod (470 c, 475 c). For example, the third EM-tuning distances 477 c can be established between the third EM-tuning portion 475 c and the third plasma-tuning slab 461 c within the third EM-energy tuning space 485 c, and the third EM-tuning distances 477 c can vary from about 0.01 mm to about 1 mm.

The third plasma-tuning rod (470 c, 475 c) can have third diameters (d_(1c)) associated therewith, and the third diameters (d_(1c)) can vary from about 0.01 mm to about 1 mm. The third isolation assembly 464 c can have third diameters (D_(1c)) associated therewith, and the third diameters (D_(1c)) can vary from about 1 mm to about 10 mm.

The third EM-tuning portion 475 c, the third EM-coupling region 462 c, the third control assembly 460 c, and the third plasma-tuning slab 461 c can have third x/y plane offsets (y_(1c)) associated therewith. For example, the third x/y plane offsets (y_(1c)) can be established relative to one or more walls of a first additional cavity 469 c, can be wavelength-dependent, and can vary from about (λ/4) to about (10λ). The third control assembly 460 c can have a cylindrical configuration and third diameters (d_(1c)) that can vary from about 1 mm to about 5 mm. The third plasma-tuning slab 461 c can have third diameters (D_(1c)) associated therewith, and the third diameters (D_(1c)) can vary from about 1 mm to about 10 mm.

A second resonator subassembly 481 d can be coupled to a second chamber wall 412 b at a second x/y plane offset (y_(3d)) and can have a second height (y_(4d)). For example, the second x/y plane offsets (y_(3d)) can be established relative to the lower chamber wall 412, can be wavelength-dependent and can vary from about (λ/4) to about (100λ). In addition, the second height (y_(4d)) can vary from about (λ/4) to about (10λ).

In some embodiments, a second EM source 435 d can be coupled to the second resonator subassembly 481 d, and the second EM source 435 d can operate at frequencies from about 500 MHz to about 5000 MHz. The controller 495 can be coupled to the second resonator subassembly 481 d and the second EM source 435 d, and the controller 495 can use process recipes to establish, control, and optimize the second resonator subassembly 481 d and the second EM source 435 d to control the EM-coupling regions (462 a, 462 b, 462 c, and 462 d) in the EM-energy tuning spaces (485, 485 c, and 485 d) and the plasma uniformity within the process space 415.

A fourth plasma-tuning rod (470 d, 475 d) can have a fourth plasma-tuning portion 470 d that can extend into the fourth isolated protection space 473 d established in the fourth protection assembly 472 d at a fourth x/y plane location (y_(2d)) in the process space 415, and a fourth EM-tuning portion 475 d that can extend into the fourth EM-energy tuning space 485 d at a fourth x/y plane location (y_(1c)). A fourth isolation assembly 464 d can be used to position (extend) the fourth plasma-tuning portion 470 d fourth plasma-tuning distances 471 d within the fourth isolated protection space 473 d established in the fourth protection assembly 472 d. For example, the fourth plasma-tuning distances 471 d can vary from about 10 mm to about 400 mm, and the fourth plasma-tuning distances 471 d can be wavelength-dependent and can vary from about (λ/4) to about (10λ).

A fourth EM-coupling region 462 d can be established at fourth EM-coupling distances 476 d from at least one wall in the second resonator subassembly 481 d defining the fourth EM-energy tuning space 485 d, and the fourth EM-tuning portion 475 d can extend into the fourth EM-coupling region 462 d. The fourth EM-tuning portion 475 d can obtain fourth tunable microwave energy from the fourth EM-coupling region 462 d, and the fourth microwave energy can be transferred as fourth plasma-tuning energy to the process space 415 at the fourth x/y plane location (y_(2d)) using the fourth plasma-tuning portion 470 d. The fourth EM-coupling region 462 d can include a tunable E-field region, a tunable H-field region, a maximum field region, a maximum voltage region, maximum energy region, or a maximum current region, or any combination thereof. For example, the fourth EM-coupling distance 476 d can vary from about 0.01 mm to about 10 mm, and the fourth EM-coupling distance 476 d can be wavelength-dependent and can vary from about (λ/4) to about (10λ).

A fourth plasma-tuning slab 461 d can be coupled to a fourth control assembly 460 d and can be used to move 463 d the fourth plasma-tuning slab 461 d fourth EM-tuning distances 477 d relative to the fourth EM-tuning portion 475 d of the fourth plasma-tuning rod (470 d, 475 d) within the fourth EM-energy tuning space 485 d. The fourth control assembly 460 d and the fourth plasma-tuning slab 461 d can be used to optimize the microwave energy coupled from the fourth EM-coupling region 462 d to the fourth EM-tuning portion 475 d of the fourth plasma-tuning rod (470 d, 475 d). For example, the fourth EM-tuning distances 477 d can be established between the fourth EM-tuning portion 475 d and the fourth plasma-tuning slab 461 d within the fourth EM-energy tuning space 485, and the fourth EM-tuning distances 477 d can vary from about 0.01 mm to about 1 mm.

The fourth plasma-tuning rod (470 d, 475 d) can have fourth diameters (d_(1d)) associated therewith, and the fourth diameters (d_(1d)) can vary from about 0.01 mm to about 1 mm. The fourth isolation assembly 464 d can have fourth diameters (D_(1d)) associated therewith, and the fourth diameters (D_(1d)) can vary from about 1 mm to about 10 mm.

The fourth EM-tuning portion 475 d, the fourth EM-coupling region 462 d, the fourth control assembly 460 d, and the fourth plasma-tuning slab 461 d can have fourth x/y plane offsets (y_(1d)) associated therewith. For example, the fourth x/y plane offsets (y_(1d)) can be established relative to one or more walls of a second additional cavity 469 d, can be wavelength-dependent, and can vary from about (λ/4) to about (10λ). The fourth control assembly 460 d can have a cylindrical configuration and fourth diameters (d_(1d)) that can vary from about 1 mm to about 5 mm. The fourth plasma-tuning slab 461 d can have fourth diameters (D_(1d)) associated therewith, and the fourth diameters (D_(1d)) can vary from about 1 mm to about 10 mm.

As shown in FIG. 4C, the control assemblies (460 a and 460 b) can be coupled 496 to the controller 495, and the controller 495 can use process recipes to establish, control, and optimize the EM-tuning distances (477 a and 477 b) to control the EM-coupling regions (462 a, 462 b, 462 c, and 462 d) in the EM-energy tuning spaces (485, 485 c, and 485 d) and the plasma uniformity within the process space 415. The controller 495 can be coupled to the microwave source 450, the matching network 452, and the coupling network 454, and the controller 495 can use process recipes to establish, control, and optimize the microwave source 450, the matching network 452, and the coupling network 454 to control the EM-coupling regions (462 a, 462 b, 462 c, and 462 d) in the EM-energy tuning spaces (485, 485 c, and 485 d) and the plasma uniformity within the process space 415. For example, the microwave source 450 can operate at frequencies from about 500 MHz to about 5000 MHz. In addition, the controller 495 can be coupled to the resonator sensors 406 and process sensors 407, and the controller 495 can use process recipes to establish, control, and optimize the data from the resonator sensors 406 and the process sensors 407 to control the EM-coupling regions (462 a, 462 b, 462 c, and 462 d) in the EM-energy tuning spaces (485, 485 c, and 485 d) and the plasma uniformity within the process space 415.

The side view of the fourth microwave resonator system 400 includes a y/z plane view of a cavity-control assembly 455 that is shown coupled to a y/z plane view of a cavity-tuning slab 456. The cavity-control assembly 455 can have a first diameter (d_(1aa)) associated therewith, and the first diameter (d_(1aa)) can vary from about 0.01 mm to about 1 mm. The cavity-tuning slab 456 can have a second diameter (D_(1aa)) associated therewith, and the second diameter (D_(1aa)) can vary from about 1 mm to about 10 mm. The cavity-control assembly 455 and the cavity-tuning slab 456 can have first y/z plane offsets (y_(1aa)) associated therewith, and the first y/z plane offsets (y_(1aa)) can vary from about 1 mm to about 10 mm.

Still referring to FIG. 4C, side views of the substrate holder 420 and the lower electrode 421 are shown. When present, the lower electrode 421 can be used to couple Radio Frequency (RF) power to plasma in process space 415. For example, lower electrode 421 can be electrically biased at an RF voltage via the transmission of RF power from RF generator 430 through impedance match network 431 and RF sensor 432 to lower electrode 421. The RF bias can serve to heat electrons to form and/or maintain the plasma. A typical frequency for the RF bias can range from 1 MHz to 100 MHz and is preferably 13.56 MHz. Alternatively, RF power may be applied to the lower electrode 421 at multiple frequencies. Furthermore, impedance match network 431 can serve to maximize the transfer of RF power to the plasma in process chamber 410 by minimizing the reflected power. Various match network topologies and automatic control methods can be utilized. The RF sensor 432 can measure the power levels and/or frequencies associated with the fundamental signals, harmonic signals, and/or intermodulation signals. In addition, the controller 495 can be coupled 496 to the RF generator 430, the impedance match network 431, and the RF sensor 432, and the controller 495 can use process recipes to establish, control, and optimize the data to and from the RF generator 430, the impedance match network 431, and the RF sensor 432 to control the EM-coupling regions (462 a, 462 b, 462 c, and 462 d) in the EM-energy tuning spaces (485, 485 c, and 485 d) and the plasma uniformity within the process space 415.

The side view of the fourth microwave resonator system 400 can include a y/z plane view of a pressure control system 490 and exhaust port 491 coupled to the process chamber 410, and configured to evacuate the process chamber 410, as well as control the pressure within the process chamber 410. Alternatively, the pressure control system 490 and/or the exhaust port 491 may not be required.

As shown in FIG. 4C, the side view can include y/z plane views of the gas supply system 440, the supply elements 441, and the process chamber 410. The supply elements 441 can be configured around the process space 415, and can be configured to introduce process gas to process space 415.

During dry plasma etching, the process gas may comprise an etchant, a passivant, or an inert gas, or a combination of two or more thereof. For example, when plasma etching a dielectric film such as silicon oxide (SiO_(x)) or silicon nitride (Si_(x)N_(y)), the plasma etch gas composition generally includes a fluorocarbon-based chemistry (C_(x)F_(y)) such as at least one of C₄F₈, C₅F₈, C₃F₆, C₄F₆, CF₄, etc., and/or may include a fluorohydrocarbon-based chemistry (C_(x)H_(y)F_(z)) such as at least one of CHF₃, CH₂F₂, etc., and can have at least one of an inert gas, oxygen, CO or CO₂. Additionally, for example, when etching polycrystalline silicon (polysilicon), the plasma etch gas composition generally includes a halogen-containing gas such as HBr, Cl₂, NF₃, or SF₆ or a combination of two or more thereof, and may include fluorohydrocarbon-based chemistry (C_(x)H_(y)F_(z)) such as at least one of CHF₃, CH₂F₂, etc., and at least one of an inert gas, oxygen, CO or CO₂, or two or more thereof. During plasma-enhanced deposition, the process gas may comprise a film forming precursor, a reduction gas, or an inert gas, or a combination of two or more thereof.

FIGS. 5A-5D show different views of exemplary plasma-tuning rods in accordance with embodiments of the invention. FIG. 5A shows a front view and a side view of a first exemplary plasma-tuning rod (570 a, 575 a). The first plasma-tuning portion 570 a can have first lengths (y₁₁) associated therewith, and the first lengths (y₁₁) can vary from about 1 mm to about 400 mm. The first EM-tuning portion 575 a can have lengths (y₁₂) associated therewith, and the lengths (y₁₂) can vary from about 1 mm to about 400 mm. The first plasma-tuning portion 570 a and the first EM-tuning portion 575 a can have first heights (x₁) associated therewith, and the first heights (x₁) can vary from about 0.1 mm to about 10 mm. The first plasma-tuning portion 570 a and the first EM-tuning portion 575 a can have first widths (z₁) associated therewith, and the first widths (z₁) can vary from about 0.1 mm to about 10 mm. For example, the first plasma-tuning rod (570 a and 575 a) can comprise dielectric material, can be circular, and have a solid cross-section.

FIG. 5B shows a front view and a side view of a second exemplary plasma-tuning rod (570 b, 575 b). The second plasma-tuning portion 570 b can have first lengths (y₂₁) associated therewith, and the first lengths (y₂₁) can vary from about 1 mm to about 400 mm. The second EM-tuning portion 575 b can have lengths (y₂₂) associated therewith, and the lengths (y₂₂) can vary from about 1 mm to about 400 mm. The second plasma-tuning portion 570 b and the second EM-tuning portion 575 b can have second heights (x₂) associated therewith, and the second heights (x₂) can vary from about 0.1 mm to about 10 mm. The second plasma-tuning portion 570 b and the second EM-tuning portion 575 b can have second widths (z₂) associated therewith, and the second widths (z₂) can vary from about 0.1 mm to about 10 mm. For example, the second plasma-tuning rod (570 b and 575 b) can comprise dielectric material, can be oval, and have a solid cross-section.

FIG. 5C shows a front view and a side view of a third exemplary plasma-tuning rod (570 c, 575 c). The third plasma-tuning portion 570 c can have third lengths (y₃₁) associated therewith, and the third lengths (y₃₁) can vary from about 1 mm to about 400 mm. The third EM-tuning portion 575 c can have a length (y₃₂) associated therewith, and the length (y₃₂) can vary from about 1 mm to about 400 mm. The third plasma-tuning portion 570 c and the third EM-tuning portion 575 c can have third heights (x₃) associated therewith, and the third heights (x₃) can vary from about 0.1 mm to about 10 mm. The third plasma-tuning portion 570 c and the third EM-tuning portion 575 c can have third widths (z₃) associated therewith, and the third widths (z₃) can vary from about 0.1 mm to about 10 mm. For example, the third plasma-tuning rod (570 c and 575 c) can comprise dielectric material, can be square, and have a solid cross-section.

FIG. 5D shows a front view and a side view of a fourth exemplary plasma-tuning rod (570 d, 575 d). The fourth plasma-tuning portion 570 d can have fourth lengths (y₄₁) associated therewith, and the fourth lengths (y₄₁) can vary from about 1 mm to about 400 mm. The fourth EM-tuning portion 575 d can have a length (y₄₂) associated therewith, and the length (y₄₂) can vary from about 1 mm to about 400 mm. The fourth plasma-tuning portion 570 d and the fourth EM-tuning portion 575 d can have fourth heights (x₄) associated therewith, and the fourth heights (x₄) can vary from about 0.1 mm to about 10 mm. The fourth plasma-tuning portion 570 d and the fourth EM-tuning portion 575 d can have fourth widths (z₄) associated therewith, and the fourth widths (z₄) can vary from about 0.1 mm to about 10 mm. For example, the fourth plasma-tuning rod (570 d and 575 d) can comprise dielectric material, can be rectangular, and have a solid cross-section.

FIGS. 6A-6D show different views of exemplary plasma-tuning rods in accordance with embodiments of the invention. FIG. 6A shows a front view and a side view of a first exemplary plasma-tuning rod (670 a, 675 a). The first plasma-tuning portion 670 a can have first lengths (y₁₁) associated therewith, and the first lengths (y₁₁) can vary from about 1 mm to about 400 mm. The first EM-tuning portion 675 a can have lengths (y₁₂) associated therewith, and the lengths (y₁₂) can vary from about 1 mm to about 400 mm. The first plasma-tuning portion 670 a and the first EM-tuning portion 675 a can have first heights (x₁) associated therewith, and the first heights (x₁) can vary from about 0.1 mm to about 10 mm. The first plasma-tuning portion 670 a and the first EM-tuning portion 675 a can have first widths (z₁) associated therewith, and the first widths (z₁) can vary from about 0.1 mm to about 10 mm. The first plasma-tuning portion 670 a and the first EM-tuning portion 675 a can have first thicknesses (t_(z1)) associated therewith, and the first thicknesses (t_(z1)) can vary from about 0.01 mm to about 1 mm. For example, the first plasma-tuning rod (670 a and 675 a) can comprise dielectric material, can be circular, and can have a hollow or partially hollow cross-section.

FIG. 6B shows a front view and a side view of a second exemplary plasma-tuning rod (670 b, 675 b). The second plasma-tuning portion 670 b can have first lengths (y₂₁) associated therewith, and the first lengths (y₂₁) can vary from about 1 mm to about 400 mm. The second EM-tuning portion 675 b can have lengths (y₂₂) associated therewith, and the lengths (y₂₂) can vary from about 1 mm to about 400 mm. The second plasma-tuning portion 670 b and the second EM-tuning portion 675 b can have second heights (x₂) associated therewith, and the second heights (x₂) can vary from about 0.1 mm to about 10 mm. The second plasma-tuning portion 670 b and the second EM-tuning portion 675 b can have second widths (z₂) associated therewith, and the second widths (z₂) can vary from about 0.1 mm to about 10 mm. The second plasma-tuning portion 670 b and the second EM-tuning portion 675 b can have second thicknesses (t_(z2)) associated therewith, and the second thicknesses (t_(z2)) can vary from about 0.01 mm to about 1 mm. For example, the second plasma-tuning rod (670 b and 675 b) can comprise dielectric material, can be oval, and can have a hollow or partially hollow cross-section.

FIG. 6C shows a front view and a side view of a third exemplary plasma-tuning rod (670 c, 675 c). The third plasma-tuning portion 670 c can have third lengths (y₃₁) associated therewith, and the third lengths (y₃₁) can vary from about 1 mm to about 400 mm. The third EM-tuning portion 675 c can have a length (y₃₂) associated therewith, and the length (y₃₂) can vary from about 1 mm to about 400 mm. The third plasma-tuning portion 670 c and the third EM-tuning portion 675 c can have third heights (x₃) associated therewith, and the third heights (x₃) can vary from about 0.1 mm to about 10 mm. The third plasma-tuning portion 670 c and the third EM-tuning portion 675 c can have third widths (z₃) associated therewith, and the third widths (z₃) can vary from about 0.1 mm to about 10 mm. The third plasma-tuning portion 670 c and the third EM-tuning portion 675 c can have third thicknesses (t_(z3) and t_(x3)) associated therewith, and the third thicknesses (t_(z3) and t_(x3)) can vary from about 0.01 mm to about 1 mm. For example, the third plasma-tuning rod (670 c and 675 c) can comprise dielectric material, can be square, and can have a hollow or partially hollow cross-section.

FIG. 6D shows a front view and a side view of a fourth exemplary plasma-tuning rod (670 d, 675 d). The fourth plasma-tuning portion 670 d can have fourth lengths (y₄₁) associated therewith, and the fourth lengths (y₄₁) can vary from about 1 mm to about 400 mm. The fourth EM-tuning portion 675 d can have a length (y₄₂) associated therewith, and the length (y₄₂) can vary from about 1 mm to about 400 mm. The fourth plasma-tuning portion 670 d and the fourth EM-tuning portion 675 d can have fourth heights (x₄) associated therewith, and the fourth heights (x₄) can vary from about 0.1 mm to about 10 mm. The fourth plasma-tuning portion 670 d and the fourth EM-tuning portion 675 d can have fourth widths (z₄) associated therewith, and the fourth widths (z₄) can vary from about 0.1 mm to about 10 mm. The fourth plasma-tuning portion 670 d and the fourth EM-tuning portion 675 d can have fourth thicknesses (t_(z4) and t_(x4)) associated therewith, and the fourth thicknesses (t_(z4) and t_(x4)) can vary from about 0.01 mm to about 1 mm. For example, the fourth plasma-tuning rod (670 d and 675 d) can comprise dielectric material, can be rectangular, and can have a hollow or partially hollow cross-section.

FIGS. 7A-7D show different views of exemplary plasma-tuning rods in accordance with embodiments of the invention. FIG. 7A shows a front view and a side view of a first exemplary plasma-tuning rod (770 a, 775 a). The first plasma-tuning portion 770 a can have first lengths (y₁₁) associated therewith, and the first lengths (y₁₁) can vary from about 1 mm to about 400 mm. The first EM-tuning portion 775 a can have lengths (y₁₂) associated therewith, and the lengths (y₁₂) can vary from about 1 mm to about 400 mm. The first plasma-tuning portion 770 a and the first EM-tuning portion 775 a can have first heights (x₁) associated therewith, and the first heights (x₁) can vary from about 0.1 mm to about 10 mm. The first plasma-tuning portion 770 a and the first EM-tuning portion 775 a can have first widths (z₁) associated therewith, and the first widths (z₁) can vary from about 0.1 mm to about 10 mm. A first temperature control loop 772 a can be configured within the first exemplary plasma-tuning rod (770 a, 775 a). For example, a temperature control fluid and/or gas can flow through the first temperature control loop 772 a to control the temperature of the first exemplary plasma-tuning rod (770 a, 775 a). The first temperature control loop 772 a can have first diameters (d_(z1)) associated therewith, and the first diameters (d_(z1)) can vary from about 0.001 mm to about 0.001 mm. In addition, the first temperature control loop 772 a have first offsets (l_(x11) and l_(x12)) associated therewith, and the first offsets (l_(x11) and l_(x12)) can vary from about 0.01 mm to about 0.1 mm. For example, the first plasma-tuning rod (770 a and 775 a) can comprise dielectric material, can be circular, and can have a hollow or partially hollow cross-section to accommodate different configurations and/or shapes for the first temperature control loop 772 a.

FIG. 7B shows a front view and a side view of a second exemplary plasma-tuning rod (770 b, 775 b). The second plasma-tuning portion 770 b can have first lengths (y₂₁) associated therewith, and the first lengths (y₂₁) can vary from about 1 mm to about 400 mm. The second EM-tuning portion 775 b can have lengths (y₂₂) associated therewith, and the lengths (y₂₂) can vary from about 1 mm to about 400 mm. The second plasma-tuning portion 770 b and the second EM-tuning portion 775 b can have second heights (x₂) associated therewith, and the second heights (x₂) can vary from about 0.1 mm to about 10 mm. The second plasma-tuning portion 770 b and the second EM-tuning portion 775 b can have second widths (z₂) associated therewith, and the second widths (z₂) can vary from about 0.1 mm to about 10 mm. A second temperature control loop 772 b can be configured within the second exemplary plasma-tuning rod (770 b, 775 b). For example, a temperature control fluid and/or gas can flow through the second temperature control loop 772 b to control the temperature of the second exemplary plasma-tuning rod (770 b, 775 b). The second temperature control loop 772 b can have second diameters (d_(z2)) associated therewith, and the second diameters (d_(z2)) can vary from about 0.001 mm to about 0.001 mm. In addition, the second temperature control loop 772 b have second offsets (l_(x21) and l_(x22)) associated therewith, and the second offsets (l_(x21) and l_(x22)) can vary from about 0.01 mm to about 0.1 mm. For example, the second plasma-tuning rod (770 b and 775 b) can comprise dielectric material, can be oval, and can have a hollow or partially hollow cross-section to accommodate different configurations and/or shapes for the second temperature control loop 772 b. FIG. 7C shows a front view and a side view of a third exemplary plasma-tuning rod (770 c, 775 c). The third plasma-tuning portion 770 c can have third lengths (y₃₁) associated therewith, and the third lengths (y₃₁) can vary from about 1 mm to about 400 mm. The third EM-tuning portion 775 c can have a length (y₃₂) associated therewith, and the length (y₃₂) can vary from about 1 mm to about 400 mm. The third plasma-tuning portion 770 c and the third EM-tuning portion 775 c can have third heights (x₃) associated therewith, and the third heights (x₃) can vary from about 0.1 mm to about 10 mm. The third plasma-tuning portion 770 c and the third EM-tuning portion 775 c can have third widths (z₃) associated therewith, and the third widths (z₃) can vary from about 0.1 mm to about 10 mm. A third temperature control loop 772 c can be configured within the third exemplary plasma-tuning rod (770 c, 775 c). For example, a temperature control fluid and/or gas can flow through the third temperature control loop 772 c to control the temperature of the third exemplary plasma-tuning rod (770 c, 775 c). The third temperature control loop 772 c can have third diameters (d_(z3)) associated therewith, and the third diameters (d_(z3)) can vary from about 0.001 mm to about 0.001 mm. In addition, the third temperature control loop 772 c have third offsets (l_(x31) and l_(x32)) associated therewith, and the third offsets (l_(x31) and l_(x32)) can vary from about 0.01 mm to about 0.1 mm. For example, the third plasma-tuning rod (770 c and 775 c) can comprise dielectric material, can be square, and can have a hollow or partially hollow cross-section to accommodate different configurations and/or shapes for the third temperature control loop 772 c.

FIG. 7D shows a front view and a side view of a fourth exemplary plasma-tuning rod (770 d, 775 d). The fourth plasma-tuning portion 770 d can have fourth lengths (y₄₁) associated therewith, and the fourth lengths (y₄₁) can vary from about 1 mm to about 400 mm. The fourth EM-tuning portion 775 d can have a length (y₄₂) associated therewith, and the length (y₄₂) can vary from about 1 mm to about 400 mm. The fourth plasma-tuning portion 770 d and the fourth EM-tuning portion 775 d can have fourth heights (x₄) associated therewith, and the fourth heights (x₄) can vary from about 0.1 mm to about 10 mm. The fourth plasma-tuning portion 770 d and the fourth EM-tuning portion 775 d can have fourth widths (z₄) associated therewith, and the fourth widths (z₄) can vary from about 0.1 mm to about 10 mm. A fourth temperature control loop 772 d can be configured within the fourth exemplary plasma-tuning rod (770 d, 775 d). For example, a temperature control fluid and/or gas can flow through the fourth temperature control loop 772 d to control the temperature of the fourth exemplary plasma-tuning rod (770 d, 775 d). The fourth temperature control loop 772 d can have fourth diameters (d_(z4)) associated therewith, and the fourth diameters (d_(z4)) can vary from about 0.001 mm to about 0.001 mm. In addition, the fourth temperature control loop 772 d have fourth offsets (l_(x41) and l_(x42)) associated therewith, and the fourth offsets (l_(x41) and l_(x42)) can vary from about 0.01 mm to about 0.1 mm. For example, the fourth plasma-tuning rod (770 d and 775 d) can comprise dielectric material, can be rectangular, and can have a hollow or partially hollow cross-section to accommodate different configurations and/or shapes for the fourth temperature control loop 772 d.

FIG. 8 illustrates a flow diagram for an exemplary operating procedure in accordance with embodiments of the invention. A multi-step procedure 800 is shown in FIG. 8. Alternatively, a different multi-step procedure may be used.

In 810, a substrate (105-405) can be positioned on a movable substrate holder (120-420) in a process chamber (110-410), and a resonator assembly (181-481) can be coupled to the process chamber (110-410). In some embodiments, the resonator assembly (181-481) with the EM-energy tuning spaces (185-485) therein can be coupled to the process chambers (110-410) using the first interface assemblies (165 a-465 a). Alternatively, other configurations may be used.

In 820, a plurality of plasma-tuning rods can be configured from the EM-energy tuning spaces (185-485) through the first interface assemblies (165 a-465 a) into the process spaces (115-415) in the process chambers (110-410). Isolation assemblies (164 a, 164 c-464 a, 464 b) can be removably coupled to the first interface assemblies (165 a-465 a) and can be configured to isolate the process spaces (115-415) in the process chambers (110-410) from the EM-energy tuning spaces (185-485). The isolation assemblies (164 a, 164 c-464 a, 464 b) can be used to removably couple the plasma-tuning rods to the first interface assemblies (165 a-465 a). For example, the plasma-tuning portions of the plasma-tuning rods can be configured in the process spaces (115-415), and the EM-tuning portions can be configured within the EM-energy tuning spaces (185-485).

In 830, process gas can be supplied into the process chamber around the plasma-tuning rods. During dry plasma etching, the process gas may comprise an etchant, a passivant, or an inert gas, or a combination of two or more thereof. For example, when plasma etching a dielectric film such as silicon oxide (SiO_(x)) or silicon nitride (Si_(x)N_(y)), the plasma etch gas composition generally includes a fluorocarbon-based chemistry (C_(x)F_(y)) such as at least one of C₄F₈, C₅F₈, C₃F₆, C₄F₆, CF₄, etc., and/or may include a fluorohydrocarbon-based chemistry (C_(x)H_(y)F_(z)) such as at least one of CHF₃, CH₂F₂, etc., and can have at least one of an inert gas, oxygen, CO or CO₂. Additionally, for example, when etching polycrystalline silicon (polysilicon), the plasma etch gas composition generally includes a halogen-containing gas such as HBr, Cl₂, NF₃, or SF₆ or a combination of two or more thereof, and may include fluorohydrocarbon-based chemistry (C_(x)H_(y)F_(z)) such as at least one of CHF₃, CH₂F₂, etc., and at least one of an inert gas, oxygen, CO or CO₂, or two or more thereof. During plasma-enhanced deposition, the process gas may comprise a film forming precursor, a reduction gas, or an inert gas, or a combination of two or more thereof.

In 840, uniform microwave plasma can be created by applying tunable microwave signals to the plasma-tuning rods.

In some systems, one or more sets of EM-coupling regions {(162 a-162 c, FIG. 1), (262 a-262 c, FIG. 2), (362 a-362 c, FIG. 3), or (462 a-462 d, FIG. 4)} can be established at first set of EM-coupling distances {(176 a-176 c, FIG. 1), (276 a-276 c, FIG. 2), (376 a-376 c, FIG. 3), or (476 a-476 d, FIG. 4)} from the lower resonator walls (183-483) within the resonator assemblies (181-481), and the EM-tuning portions {(175 a-175 c, FIG. 1), (275 a-275 c, FIG. 2), (375 a-375 c, FIG. 3), or (475 a-475 b, FIG. 4)} can extend into the first set of EM-coupling regions {(162 a-162 c, FIG. 1), (262 a-262 c, FIG. 2), (362 a-362 c, FIG. 3), or (462 a-462 d, FIG. 4)}. The EM-tuning portions can obtain different tunable microwave signals (energies) from the sets of EM-coupling regions, and the different tunable microwave signals (energies) can be transferred as controllable plasma-tuning energies to the process spaces (115-415) at different locations using the plasma-tuning portions {(170 a-170 c, FIG. 1), (270 a-270 c, FIG. 2), (370 a-370 c, FIG. 3), or (470 a-470 b, FIG. 4)}). The sets of EM-coupling regions {(162 a-162 c, FIG. 1), (262 a-262 c, FIG. 2), (362 a-362 c, FIG. 3), or (462 a-462 b, FIG. 4)} can include tunable E-field regions, tunable H-field regions, maximum E-field regions, maximum H-field regions, maximum voltage regions, maximum energy regions, or maximum current regions, or any combination thereof.

One or more sets of plasma-tuning slabs {(161 a-161 c, FIG. 1), (261 a-261 c, FIG. 2), (361 a-361 c, FIG. 3), or (461 a-461 b, FIG. 4)} can be coupled to a first set of control assemblies {(160 a-160 c, FIG. 1), (260 a-260 c, FIG. 2), (360 a-360 c, FIG. 3), or (460 a-460 b, FIG. 4)} and can be used to move {(163 a-163 c, FIG. 1), (263 a-263 c, FIG. 2), (363 a-363 c, FIG. 3), or (463 a-463 b, FIG. 4)} the sets of plasma-tuning slabs sets of EM-tuning distances {(177 a-177 c, FIG. 1), (277 a-277 c, FIG. 2), (377 a-377 c, FIG. 3), or (477 a-477 b, FIG. 4)} relative to the sets of EM-tuning portions of the sets of plasma tuning rods within the EM-energy tuning spaces (185-485). The sets of control assemblies and the sets of plasma-tuning slabs can be used to tune/optimize the different tunable microwave signals (energies) coupled from the sets of EM-coupling regions to the sets of EM-tuning portions associated with the sets of plasma tuning rods.

One or more controllers (195-495) can be coupled to one or more of the sets of control assemblies {(160 a-160 c, FIG. 1), (260 a-260 c, FIG. 2), (360 a-360 c, FIG. 3), or (460 a-460 b, FIG. 4)} and can be used to control/optimize the movements {(163 a-163 c, FIG. 1), (263 a-263 c, FIG. 2), (363 a-363 c, FIG. 3), or (463 a-463 b, FIG. 4)} of the sets of plasma-tuning slabs {(161 a-161 c, FIG. 1), (261 a-261 c, FIG. 2), (361 a-361 c, FIG. 3), or (461 a-461 d, FIG. 4)}. For example, one or more of the controllers (195-495) can be used to control/optimize the sets of EM-tuning distances {(177 a-177 c, FIG. 1), (277 a-277 c, FIG. 2), (377 a-377 c, FIG. 3), or (477 a-477 b, FIG. 4)} to create, optimize, and/or maintain a uniform microwave plasma within the process space (115-415) during substrate processing.

In addition, one or more sets of the cavity-control assemblies {(155 a-155 c, FIG. 1), (255 a-255 c, FIG. 2), (355 a-355 c, FIG. 3), or (455 a-455 b, FIG. 4)} can be used to move {(157 a-157 c, FIG. 1), (257 a-257 c, FIG. 2), (357 a-357 c, FIG. 3), or (457 a-457 b, FIG. 4)} the cavity-tuning slabs {(156 a-156 c, FIG. 1), (256 a-256 c, FIG. 2), (356 a-356 c, FIG. 3), or (456 a-456 b, FIG. 4)} cavity-tuning distances {(158 a-158 c, FIG. 1), (258 a-258 c, FIG. 2), (358 a-358 c, FIG. 3), or (458 a-458 b, FIG. 4)} within the EM-energy tuning spaces (185-485). One or more of the controllers (195-495) can be coupled to one or more of the cavity-control assemblies (155-455), and the controllers can use process recipes to establish, control, and optimize the cavity-tuning distances to control and maintain the plasma uniformity within the process spaces in real-time.

Furthermore, one or more of the controllers (195-495) can be coupled to the microwave sources (150-450), the matching networks (152-452), the coupling networks (154-454), and the resonant assemblies (181-481), and at least one of the controllers can use process recipes to establish, control, and optimize the microwave sources (150-450), the matching networks (152-452), and the coupling networks (154-454) to control the microwave plasma uniformity within the process spaces (115-415).

In 850, the substrate can be processed by moving the substrate through the uniform microwave plasma.

FIG. 9 illustrates a plasma processing system 900 according to embodiments of the invention. The plasma processing system 900 may comprise a dry plasma etching system or a plasma enhanced deposition system.

The plasma processing system 900 comprises a rectangular process chamber 910 having a plurality of chamber walls 912 and coupling networks (954 a and 954 b) configured to define a process space 915. The plasma processing system 900 comprises a substrate holder 920 configured to support and/or move 906 the substrate 905 through the process space 915. The plasma processing system 900 comprises a process gas system 940 and a process gas shower plate 941 configured to provide process gas to the process space 915. The substrate 905 can be exposed to plasma or process chemistry in process space 915. The plasma processing system 900 can comprise a first set of resonator assemblies (981 a, 981 b, and 981 c) that can be coupled to the first coupling networks 954 a, and a second set of resonator assemblies (981 d, 981 e, and 981 f) that can be coupled to the second coupling networks 954 b. In some embodiments, the first coupling network 954 a can be coupled to a first matching network 952 a that can be coupled to a first microwave source 950 a, and the second coupling network 954 b can be coupled to a second matching network 952 b that can be coupled to a second microwave source 950 b. The plasma processing system 900 can be configured to form plasma in the process space 915. For example, the resonator assemblies (981 a, 981 b, 981 c, 981 d, 981 e, and 981 f) can be configured using the microwave resonator systems (100, 200, 300, or 400) described herein.

Although only certain embodiments of this invention have been described in detail above, those skilled in the art will readily appreciate that many modifications are possible in the embodiments without materially departing from the novel teachings and advantages of this invention. Accordingly, all such modifications are intended to be included within the scope of this invention.

Thus, the description is not intended to limit the invention and the configuration, operation, and behavior of the present invention has been described with the understanding that modifications and variations of the embodiments are possible, given the level of detail present herein. Accordingly, the preceding detailed description is not mean or intended to, in any way, limit the invention—rather the scope of the invention is defined by the appended claims. 

1. A microwave processing system for processing a substrate comprising: a rectangular process chamber comprising a process space having a substrate holder therein; a first resonator assembly coupled to the rectangular process chamber using a first interface assembly, the first resonator assembly having an electromagnetic (EM) energy tuning space therein, the first interface assembly including a first set of isolation assemblies, wherein a first set of EM-coupling regions are established in the EM-energy tuning space; a first set of plasma-tuning rods coupled to the first set of isolation assemblies, the first set of plasma-tuning rods having first plasma-tuning portions configured to control plasma uniformity in the process space and first EM-tuning portions configured in the EM-energy tuning space and coupled to at least one of the first set of EM-coupling regions; a resonator sensor coupled to the EM-energy tuning space, the resonator sensor being configured to obtain resonator data; and a controller coupled to the first set of isolation assemblies and the resonator sensor, wherein the controller is configured to control the first set of plasma-tuning rods using the first set of isolation assemblies and the resonator data, thereby controlling the first set of EM-coupling regions in the first EM-energy tuning space and the plasma uniformity in the process space.
 2. The microwave processing system of claim 1, further comprising: a coupling network coupled to the first resonator assembly; a matching network coupled to the coupling network; a microwave source coupled to the matching network, wherein the microwave source is configured to operate in a frequency range from 500 MHz to 5000 MHz, wherein the controller is coupled to the microwave source, the matching network and the coupling network, the controller being configured to control the microwave source, the matching network and/or the coupling network, thereby controlling the first set of EM-coupling regions in the EM-energy tuning space and the plasma uniformity in the process space.
 3. The microwave processing system of claim 1, further comprising: a second interface assembly coupled to the first resonator assembly; a plurality of control assemblies coupled to the second interface assembly; and a plurality of plasma-tuning slabs coupled to the control assemblies configured proximate to at least one EM-coupling region in the EM-energy tuning space, wherein the controller is coupled to the control assemblies and is configured to control EM-tuning distances established between the plasma-tuning slabs and the first EM-tuning portions of the first set of plasma-tuning rods within the first EM-energy tuning space, thereby controlling the first set of EM-coupling regions in the EM-energy tuning space and the plasma uniformity in the process space.
 4. The microwave processing system of claim 1, further comprising: a plurality of flow elements coupled to the rectangular process chamber and configured to provide process gas to the process space; a plurality of supply elements coupled to the flow elements; and a gas supply system coupled to the supply elements, wherein the controller is coupled to the gas supply system, the controller being configured to control the gas supply system, thereby controlling the first set of EM-coupling regions in the EM-energy tuning space and the plasma uniformity in the process space.
 5. The microwave processing system of claim 4, wherein the process gas comprises two or more of: a carbon-containing gas, a fluorine-containing gas, a hydrogen-containing gas, an oxygen-containing gas, and an inert gas.
 6. The microwave processing system of claim 1, further comprising: a cavity-tuning slab configured proximate to a first end of the first EM-energy tuning space in the first resonator assembly; a first cavity-control assembly coupled to the cavity-tuning slab, wherein the cavity-tuning slab is positioned at a cavity-tuning distance from at least one wall of the first resonator assembly, wherein the controller is coupled to the first cavity-control assembly and is configured to control the cavity-tuning distance, thereby controlling the first set of EM-coupling regions in the EM-energy tuning space and the plasma uniformity in the process space.
 7. The microwave processing system of claim 1, further comprising: a lower electrode configured within the substrate holder; and a Radio Frequency (RF) generator coupled to the lower electrode, wherein the controller is coupled to the RF generator and is configured to control the RF generator, thereby controlling the first set of EM-coupling regions in the EM-energy tuning space and the plasma uniformity in the process space.
 8. The microwave processing system of claim 1, wherein the first resonator assembly is coupled to the rectangular process chamber using one or more baffle members.
 9. A microwave processing system for processing a substrate comprising: a rectangular process chamber comprising a process space having a movable substrate holder therein; a first resonator assembly coupled to the rectangular process chamber using a first interface assembly, the first resonator assembly having a first electromagnetic (EM) energy tuning space therein, the first interface assembly including a first set of isolation assemblies, wherein a first set of EM-coupling regions are established in the EM-energy tuning space; a plurality of protection assemblies coupled to the first set of isolation assemblies and extending into the process space, the protection assemblies having isolated protection spaces therein; a first set of plasma-tuning rods coupled to the first set of isolation assemblies, the first set of plasma-tuning rods having first plasma-tuning portions configured in the isolated protection spaces and first EM-tuning portions configured in the first EM-energy tuning space and coupled to at least one of the first set of EM-coupling regions, where the first plasma-tuning portions are configured to control plasma uniformity in the process space; a resonator sensor coupled to the EM-energy tuning space, the resonator sensor being configured to obtain resonator data; and a controller coupled to the first set of isolation assemblies and the resonator sensor, wherein the controller is configured to control the first set of plasma-tuning rods using the first set of isolation assemblies and the resonator data, thereby controlling the first set of EM-coupling regions in the first EM-energy tuning space and the plasma uniformity in the process space.
 10. The microwave processing system of claim 9, further comprising: a coupling network coupled to the first resonator assembly; a matching network coupled to the coupling network; a microwave source coupled to the matching network, wherein the microwave source is configured to operate in a frequency range from 500 MHz to 5000 MHz, wherein the controller is coupled to the microwave source, the matching network and the coupling network, the controller being configured to control the microwave source, the matching network and/or the coupling network, thereby controlling the first set of EM-coupling regions in the first EM-energy tuning space and the plasma uniformity in the process space.
 11. The microwave processing system of claim 9, further comprising: a second interface assembly coupled to the first resonator assembly; a plurality of control assemblies coupled to the second interface assembly; and a plurality of plasma-tuning slabs coupled to the control assemblies configured proximate to at least one EM-coupling region in the first EM-energy tuning space, wherein the controller is coupled to the control assemblies and is configured to control EM-tuning distances established between the plasma-tuning slabs and the first EM-tuning portions of the first set of plasma-tuning rods within the first EM-energy tuning space, thereby controlling the first set of EM-coupling regions in the EM-energy tuning space and the plasma uniformity in the process space.
 12. The microwave processing system of claim 9, further comprising: a plurality of supply elements coupled to the rectangular process chamber and configured to provide process gas to the process space; and a gas supply system coupled to the supply elements, wherein the controller is coupled to the gas supply system, the controller being configured to control the gas supply system, thereby controlling the first set of EM-coupling regions in the EM-energy tuning space and the plasma uniformity in the process space.
 13. The microwave processing system of claim 12, wherein the process gas comprises two or more of: a carbon-containing gas, a fluorine-containing gas, a hydrogen-containing gas, an oxygen-containing gas, and an inert gas.
 14. The microwave processing system of claim 9, further comprising: a cavity-tuning slab configured proximate to a first end of the first EM-energy tuning space in the first resonator assembly; a first cavity-control assembly coupled to the cavity-tuning slab, wherein the cavity-tuning slab is positioned at a cavity-tuning distance from at least one wall of the first resonator assembly, wherein the controller is coupled to the first cavity-control assembly and is configured to control the cavity-tuning distance, thereby controlling the first set of EM-coupling regions in the EM-energy tuning space and the plasma uniformity in the process space.
 15. The microwave processing system of claim 9, further comprising: a first resonator subassembly coupled to a first chamber wall at a first offset and having a third EM-energy tuning space therein; a third isolation assembly coupled to the first chamber wall and configured to isolate the third EM-energy tuning space from the process space; a third protection assembly coupled to the third isolation assembly, the third protection assembly being configured at a third location within the process space, wherein the third protection assembly has a third isolated protection space therein and has a third insertion length associated therewith; a third plasma-tuning rod coupled to the third isolation assembly and having a third plasma-tuning portion extending into the third isolated protection space established in the third protection assembly, and having a third EM-tuning portion extending into a third EM-coupling region within the third EM-energy tuning space; and a first EM source coupled to the first resonator subassembly, wherein the first EM source is configure to operate at frequencies from about 500 MHz to about 5000 MHz, wherein the controller is coupled to the first EM source, the controller being configured to control the first EM source, thereby controlling the third EM-coupling region in the third EM-energy tuning space and the plasma uniformity in the process space.
 16. The microwave processing system of claim 9, further comprising: a third control assembly coupled to a first resonator subassembly; and a third plasma-tuning slab coupled to the third control assembly and configured proximate to a third EM-coupling region in a third EM-energy tuning space, wherein the controller is coupled to the third control assembly and is configured to control third EM-tuning distances established between the third plasma-tuning slab and a third EM-tuning portion of a third plasma-tuning rod within the third EM-energy tuning space, thereby controlling the third EM-coupling region in the third EM-energy tuning space and the plasma uniformity in the process space.
 17. The microwave processing system of claim 15, further comprising: a second resonator subassembly coupled to a second chamber wall at a second offset and having a fourth EM-energy tuning space therein; a fourth isolation assembly coupled to the second chamber wall and configured to isolate the fourth EM-energy tuning space from the process space; a fourth protection assembly coupled to the fourth isolation assembly, the fourth protection assembly being configured at a fourth location within the process space, wherein the fourth protection assembly has a fourth isolated protection space therein and has a fourth insertion length associated therewith; a fourth plasma-tuning rod coupled to the fourth isolation assembly and having a fourth plasma-tuning portion extending into the fourth isolated protection space established in the fourth protection assembly, and having a fourth EM-tuning portion extending into a fourth EM-coupling region within the fourth EM-energy tuning space; and a second EM source coupled to the second resonator subassembly, wherein the second EM source is configure to operate at second frequencies from about 500 MHz to about 5000 MHz, wherein the controller is coupled to the second EM source, the controller being configured to control the second EM source, thereby controlling the fourth EM-coupling region in the fourth EM-energy tuning space and the plasma uniformity in the process space.
 18. The microwave processing system of claim 17, further comprising: a fourth control assembly coupled to the second resonator subassembly; and a fourth plasma-tuning slab coupled to the fourth control assembly and configured proximate to the fourth EM-coupling region in the fourth EM-energy tuning space, wherein the controller is coupled to the fourth control assembly and is configured to control a fourth EM-tuning distance established between the fourth plasma-tuning slab and the fourth EM-tuning portion of the fourth plasma-tuning rod within the fourth EM-energy tuning space, thereby controlling the fourth EM-coupling region in the fourth EM-energy tuning space and the plasma uniformity in the process space.
 19. A method of processing a substrate using a microwave processing system comprising: positioning the substrate on a movable substrate holder within a process space in a rectangular process chamber; coupling a first resonator assembly to the rectangular process chamber using a first interface assembly, the first resonator assembly having a first electromagnetic (EM) energy tuning space therein, the first interface assembly comprising a first set of isolation assemblies, wherein first EM-coupling regions are established in the EM-energy tuning space; coupling a first set of plasma-tuning rods to the first set of isolation assemblies, the first set of plasma-tuning rods having first plasma-tuning portions configured in the process space and first EM-tuning portions configured in the EM-energy tuning space and coupled to at least one of a first set of EM-coupling regions; providing process gas to the process space using a plurality of supply elements coupled to the rectangular process chamber, wherein a gas supply system is coupled to the supply elements; applying tunable microwave energies to the first set of plasma-tuning rods, thereby creating a uniform microwave plasma in the process space; and moving the substrate through the uniform microwave plasma, thereby processing the substrate.
 20. The method of claim 19, further comprising: coupling a second interface assembly to the first resonator assembly; coupling a plurality of control assemblies to the second interface assembly; coupling a plurality of plasma-tuning slabs to the control assemblies configured proximate to at least one EM-coupling region in the EM-energy tuning space; and coupling a controller to the control assemblies, wherein the controller is configured to control EM-tuning distances established between the plasma-tuning slabs and the first EM-tuning portions of the first set of plasma-tuning rods within the first EM-energy tuning space, thereby controlling the first set of EM-coupling regions in the EM-energy tuning space and plasma uniformity in the process space. 